According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The second electrode layer is provided between the first electrode layer and the first major surface. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. The third surface is positioned between the first surface and the second electrode layer. An electrical resistance of the first surface is less than an average electrical resistance of the first portion.

An Ionization unit (7) for cleaning air in a room (1) with a ceiling (3) and a floor (5), comprising an ionizer (19) configured to electrically charge particles in the air; and a support unit (13) configured to enable the ionization unit (7) to be positioned at a distance of at least 50 centimeters above the floor (5) of the room (1), wherein the support unit (13) allows the ionization unit (7) to travel within the room (1) while being distanced from the floor (5).

The invention provides a nano water ion group generator, including: at least a pair of P/N-type semiconductor dies including P-type semiconductor dies and N-type semiconductor dies, with one end being a cooling end and the other end being a heating end; a heat absorption member for obtaining a cold energy generated by the cooling end and transferring the cold energy to a blocking member; the blocking member for conducting the cold energy to obtain moisture in a condensed water or an air with high relative humidity; an ionizing member to absorb, collect or accumulate moisture in the condensed water or the air with high relative humidity, and be electrically coupled to the high voltage power supply for further ionizing the air and the moisture around the ionizing member under the action of avalanche effect to obtain at least one nanometer-sized substance among charged particles and oxygen-containing radicals.

The invention provides a nano water ion group generator, including: at least a pair of P/N-type semiconductor dies including P-type semiconductor dies and N-type semiconductor dies, with one end being a cooling end and the other end being a heating end; a heat absorption member for obtaining a cold energy generated by the cooling end and transferring the cold energy to a blocking member; the blocking member for conducting the cold energy to obtain moisture in a condensed water or an air with high relative humidity; an ionizing member to absorb, collect or accumulate moisture in the condensed water or the air with high relative humidity, and be electrically coupled to the high voltage power supply for further ionizing the air and the moisture around the ionizing member under the action of avalanche effect to obtain at least one nanometer-sized substance among charged particles and oxygen-containing radicals.

A plasma purification module is described. The plasma purification module includes a first electrode plate, a second electrode plate, at least one long electrode and a catchment element. The first electrode plate is configured to be connected to a first electrode of a power supply. The second electrode plate is disposed over a surface of the first electrode plate, and is configured to be connected to a second electrode of the power supply, in which the second electrode plate has a channel. The long electrode is configured to form a discharge area. The long electrode is disposed on the surface of the first electrode plate and passes through the channel. The long electrode has a tip. The catchment element is disposed adjacent to the tip, and is configured to provide the discharge area with mist or water.

An electrostatic chucking method uses a substrate processing apparatus including an electrostatic chuck, a focus ring, a supply unit configured to supply a heat transfer medium to a space formed between the focus ring and the electrostatic chuck, and a plurality of electrodes provided at a region in the electrostatic chuck which corresponds to the focus ring. The electrostatic chucking method includes supplying by the supply unit the heat transfer medium to the space for a plasma processing period for which a plasma for processing the substrate is generated, and applying different voltages to the plurality of electrodes to attract and hold the focus ring on the electrostatic chuck for a period other than the plasma processing period.

The present invention relates to a system for air purification. The system comprises at least a first plant and a second plant, and a voltage pulse device connectable to a power source for generating and transmitting a voltage pulse to the first plant, wherein the second plant is connected to the first plant using at least one voltage pulse transmission unit, and the first plant and the second plant are arranged to form one or more contact areas at a leaf portion. The system may also comprise a plurality of plants mounted on a support structure in accordance with some embodiments. The present invention also relates to a voltage pulse device for use with the system for air purification.

The present invention relates to a system for air purification. The system comprises at least a first plant and a second plant, and a voltage pulse device connectable to a power source for generating and transmitting a voltage pulse to the first plant, wherein the second plant is connected to the first plant using at least one voltage pulse transmission unit, and the first plant and the second plant are arranged to form one or more contact areas at a leaf portion. The system may also comprise a plurality of plants mounted on a support structure in accordance with some embodiments. The present invention also relates to a voltage pulse device for use with the system for air purification.

A thermal management system includes an ionic motion generator to direct fluid flow towards a heated component (e.g., equipment to be cooled or a heatsink mounted thereat). In certain systems, the fluid is directed through a conduit arrangement. In certain systems, the fluid is directed past the heated component to a heat exchanger. Certain types of thermal management systems have no moving components to create the fluid flow.

A facial beautifying and care apparatus includes a beauty bar (1) having an air supply passage (A), a negative pressure connecting hole (132), a conductive suction nozzle (15) and a first connection port (134); an EMS generation module (20) inside the beauty bar (1) electrically connected to the first connection port (134); an external negative pressure unit (6) separated from the beauty bar (1) and having a negative pressure driving control module (62) and a second connection port (637); the negative pressure driving control module (62) having an air supply tube assembly (66) with a negative pressure communicating hole (661); a communicating tube (7) communicating with the negative pressure connecting hole (132) and the negative pressure communicating hole (661); a conductive wire (8) connected to the first connecting port (134) and the second connecting port (637). Accordingly, the effects of facial skin firming, cleaning, beautifying and caring are achieved.