Patent classifications
C22B5/18
SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM, AND METHOD FOR PROCESSING SUBSTRATE
A substrate processing device reduces a surface of a substrate. The surface includes a metal layer. The substrate processing device includes a chamber body, a hot plate, a plasma supply unit, and a controller. The hot plate is accommodated in the chamber body and configured to set the substrate. The plasma supply unit is configured to supply plasma of a hydrogen gas to the chamber body. The controller is configured to execute a degassing process and a reducing process. In the degassing process, the controller drives the hot plate to remove an adsorbate from the surface before driving the plasma supply unit. In the reducing process, the controller drives the plasma supply unit after driving the hot plate to supply the plasma to the surface that has undergone the degassing process.
SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING SYSTEM, AND METHOD FOR PROCESSING SUBSTRATE
A substrate processing device reduces a surface of a substrate. The surface includes a metal layer. The substrate processing device includes a chamber body, a hot plate, a plasma supply unit, and a controller. The hot plate is accommodated in the chamber body and configured to set the substrate. The plasma supply unit is configured to supply plasma of a hydrogen gas to the chamber body. The controller is configured to execute a degassing process and a reducing process. In the degassing process, the controller drives the hot plate to remove an adsorbate from the surface before driving the plasma supply unit. In the reducing process, the controller drives the plasma supply unit after driving the hot plate to supply the plasma to the surface that has undergone the degassing process.
A PROCESS FOR TRANSITION METAL OXIDE REDUCTION
The present disclosure generally relates to processes for the reduction of transition metals using alkali metals to produce reduced transition metals.
A PROCESS FOR TRANSITION METAL OXIDE REDUCTION
The present disclosure generally relates to processes for the reduction of transition metals using alkali metals to produce reduced transition metals.
METHOD FOR PREPARING REDUCED TITANUIM POWDER BY MULTISTAGE DEEP REDUCTION
Provided is a method for preparing a reduced titanium powder by a multistage deep reduction, including the following steps of: uniformly mixing a dried titanium dioxide powder with a magnesium powder to obtain a mixture, adding the mixture in a self-propagating reaction furnace, triggering a self-propagating reaction, obtaining an intermediate product of which low-valence titanium oxides Ti.sub.xO are dispersed in an MgO matrix, leaching the intermediate product with a hydrochloric acid as a leaching solution, performing filtering, washing and vacuum drying to obtain a low-valence titanium oxide Ti.sub.xO precursor, uniformly mixing the low-valence titanium oxide Ti.sub.xO precursor with a calcium powder, performing a pressing to obtain semi-finished products, placing the semi-finished products in a vacuum reduction furnace for a second-time deep reduction, and leaching a deep reduction product with a hydrochloric acid as a leaching solution so as to obtain the reduced titanium powder.
Thermochemical Processing of Exothermic Metallic System
This invention relates to a method for controlling exothermic reactions between metal chlorides of Zn, V, Cr, Co, Sn, Ag, Ta, Ni, Fe, Nb Cu, Pt, W, Pd, and Mo, and Al and the use of the method for preparation of metallic alloys and compounds based on base metals Zn, V, Cr, Co, Sn, Ag, Ta, Ni, Fe, Nb Cu, Pt, W, Pd, and Mo. The method provides for a mixture of precursor chemicals including at least one solid base metal chloride to be mixed and reacted exothermically with a control powder based on Zn, V, Cr, Co, Sn, Ag, Ta, Ni, Fe, Nb Cu, Pt, W, Pd, and Mo and then reacting the resulting intermediates with an Al scavenger. Reduction is carried out in a controlled manner to regulate reaction rates and prevent excessive rise in the temperature of the reactants and the reaction products.
Method of recovering nuclear fuel material
According to an embodiment, a nuclear fuel material recovery method of recovering a nuclear fuel material containing thorium metal by reprocessing an oxide of a nuclear fuel material containing thorium oxide in a spent fuel is provided. The method has: a first electrolytic reduction step of electrolytically reducing thorium oxide in a first molten salt of alkaline-earth metal halide; a first reduction product washing step of washing a reduction product; and a main electrolytic separation step of separating the reduction product. The first molten salt further contains alkali metal halide, and contains at least one out of a group consisting of calcium chloride, magnesium chloride, calcium fluoride and magnesium fluoride. The method may further has a second electrolytic reduction step of electrolytically reducing uranium oxide, plutonium oxide, and minor actinoid oxide in a second molten salt of alkali metal halide.
Method of recovering nuclear fuel material
According to an embodiment, a nuclear fuel material recovery method of recovering a nuclear fuel material containing thorium metal by reprocessing an oxide of a nuclear fuel material containing thorium oxide in a spent fuel is provided. The method has: a first electrolytic reduction step of electrolytically reducing thorium oxide in a first molten salt of alkaline-earth metal halide; a first reduction product washing step of washing a reduction product; and a main electrolytic separation step of separating the reduction product. The first molten salt further contains alkali metal halide, and contains at least one out of a group consisting of calcium chloride, magnesium chloride, calcium fluoride and magnesium fluoride. The method may further has a second electrolytic reduction step of electrolytically reducing uranium oxide, plutonium oxide, and minor actinoid oxide in a second molten salt of alkali metal halide.
Direct smelting process and apparatus
A process and apparatus for direct smelting metalliferous material is disclosed. The invention concentrates injection of solid feed materials comprising metalliferous material and carbonaceous material into a direct smelting vessel during the course of the process into a relatively small region within a metal layer in a molten bath in the vessel in order to generate a substantial upward movement of molten material and gas from the metal layer into a region in the vessel that is above the molten bath. In particular, the invention injects the solid food materials with sufficient momentum and/or velocity via an opposed pair of lances that are oriented within the vessel and arranged to form overlapping plumes of injected material in the molten bath.
Direct smelting process and apparatus
A process and apparatus for direct smelting metalliferous material is disclosed. The invention concentrates injection of solid feed materials comprising metalliferous material and carbonaceous material into a direct smelting vessel during the course of the process into a relatively small region within a metal layer in a molten bath in the vessel in order to generate a substantial upward movement of molten material and gas from the metal layer into a region in the vessel that is above the molten bath. In particular, the invention injects the solid food materials with sufficient momentum and/or velocity via an opposed pair of lances that are oriented within the vessel and arranged to form overlapping plumes of injected material in the molten bath.