A method of manufacturing a composite material for thermal shields, and a composite material manufactured by the method are proposed. The method may include preparing a mixed powder including (i) a metal powder including a powder of aluminum or aluminum alloy and (ii) a polymer or ceramic powder. The method may also include sintering the mixed powder through pressureless sintering or spark plasma sintering to produce a composite material. According to the present disclosure, a powder of polymer, ceramic, and/or metal which have a relatively low level of thermal conductivity can be compounded with a metal material including aluminum through a sintering process of powder metallurgy, such as pressureless sintering or spark plasma sintering. Thus, a heterogeneous composite material with a low-level thermal conductivity (10 W/mk or less) can be obtained, and the composite material can be used as a material for various thermal shields.

The present invention provides an alloy, an alloy powder, an alloy member, and a composite member which are excellent in corrosion resistance and wear resistance, have crack resistance, and are suitable for an additive manufacturing method and the like. An alloy and an alloy powder include, by mass %, Cr: 18 to 22%, Mo: 18 to 28%, Ta: 1.5 to 57%, C: 1.0 to 2.5%, Nb: 0 to 42%, Ti: 0 to 15%, V: 0 to 27%, Zr: 0 to 29%, and a remainder consisting of Ni and unavoidable impurities, where a molar ratio of (Ta+0.7Nb+Ti+0.6V+Zr)/C=0.5 to 1.5 is satisfied. An alloy member is an additively manufactured product or a cast having such a solidification structure, and the solidification structure is a dendrite-like crystal structure having a metal phase having a face-centered cubic structure and carbides.

An electrostatic chuck includes a base plate that is made of a metal; a ceramic plate that is fixed to the base plate and configured to adsorb an object by electrostatic force; and a bonding layer that is provided between the base plate and the ceramic plate to bond the base plate and the ceramic plate to each other. The bonding layer is formed of a composite material including the metal forming the base plate and a ceramic forming the ceramic plate.

An electrostatic chuck includes a base plate that is made of a metal; a ceramic plate that is fixed to the base plate and configured to adsorb an object by electrostatic force; and a bonding layer that is provided between the base plate and the ceramic plate to bond the base plate and the ceramic plate to each other. The bonding layer is formed of a composite material including the metal forming the base plate and a ceramic forming the ceramic plate.

Disclosed are a method of manufacturing an aluminum alloy clad section, and an aluminum alloy clad section manufactured by the method. The method includes preparing a composite powder by ball-milling aluminum powder and carbon nanotubes, preparing a billet from the composite powder, and subjecting the billet to direct extrusion using an extrusion die. The method is simple in procedure and uses simple equipment because it is based on direct extrusion which is suitable for mass production. Thus, the method is capable of producing a lightweight high-strength functional aluminum alloy clad section having a competitive advantage in terms of price over conventional aluminum alloy clad sections.

A method of making a lithiated silicon-based precursor material for a negative electrode material of an electrochemical cell that cycles lithium ions is provided. An admixture comprising a plurality of lithium particles and a plurality of silicon particles is briquetted by applying pressure of greater than or equal to about 10 MPa and applying heat at a temperature of less than or equal to about 180° C. to form a precursor briquette. The briquette has lithium particles and silicon particles distributed in a matrix and has a porosity level of less than or equal to about 60% of the total volume of the precursor briquette. The briquetting is conducted in an environment having less than or equal to about 0.002% by weight of any oxygen-bearing species or nitrogen (N.sub.2).

Provided is an Fe—Pt—BN-based sputtering target that has a high relative density and that suppresses particle generation.

The Fe—Pt—BN-based sputtering target has, as a residue after dissolution in aqua regia measured by a procedure below, the particle size distribution in which D90 is 5.5 μm or less and a proportion of fine particles smaller than 1 μm is 35% or less. The procedure includes: (1) cutting out an about 4 mm-square sample piece from the sputtering target, followed by pulverizing to prepare a pulverized product; (2) classifying the pulverized product using sieves of 106 μm and 300 μm in opening size and collecting a powder that has passed through the 300 μm sieve and remained on the 106 μm sieve; (3) immersing the powder in aqua regia heated to 200° C. to prepare a residue-containing solution in which the powder has been dissolved; (4) filtering the residue-containing solution through a 5A filter paper specified in JIS P 3801 and drying a residue on the filter paper at 80° C. to prepare a residue powder; (5) dispersing the residue powder in water containing a surfactant to prepare a sample solution; and (6) setting the sample solution in a particle size analyzer and measuring the particle size distribution.

A method for manufacturing a functionally graded composite material for a printed circuit board (PCB) is proposed. The method may include preparing two or more types of mixed powders with different contents of polymer or ceramic powder, each mixed powder comprising (i) a metal powder comprising a powder made of aluminum or an aluminum alloy and a powder of magnesium and (ii) the polymer or ceramic powder. The method may also include laminating the two or more types of mixed powders to form a functionally graded laminate in which a ratio of the content of the polymer or ceramic powder to the content of the metal powder in each of layers stacked in sequence from bottom to the top of the laminate differs. The method may further include preparing a functionally graded composite material by sintering the functionally graded laminate by pressureless sintering or spark plasma sintering.

This application relates to a method of manufacturing an electrostatic chuck having a high heat dissipation property and high thermal shock resistance and being lightweight, and an electrostatic chuck manufactured by the method. In one aspect, the method includes preparing a composite powder by milling (i) aluminum or aluminum alloy powder and (ii) carbon-based nanomaterial powder through ball milling. The method may also include manufacturing a multilayer billet including a core layer and one or more shell layers surrounding the core layer, in which at least one of the core and shell layers contains the composite powder. The method may further include extruding the multilayer billet to form an electrode layer and forming a dielectric layer on the electrode layer.

This application relates to a method of manufacturing an electrostatic chuck having a high heat dissipation property and high thermal shock resistance and being lightweight, and an electrostatic chuck manufactured by the method. In one aspect, the method includes preparing a composite powder by milling (i) aluminum or aluminum alloy powder and (ii) carbon-based nanomaterial powder through ball milling. The method may also include manufacturing a multilayer billet including a core layer and one or more shell layers surrounding the core layer, in which at least one of the core and shell layers contains the composite powder. The method may further include extruding the multilayer billet to form an electrode layer and forming a dielectric layer on the electrode layer.