The part made of low-silicon aluminum alloy contains magnesium, copper, manganese, titanium, and strontium. Said part is obtained by a method that consists in: casting said alloy in a mold so as to obtain the part; after the casting, demolding the part constituting a preform that is still hot; cooling said preform and then subjecting it to an operation suitable for reheating it to a temperature lying in the range 470° C. to 550° C.; positioning said part between two shells of a die that defines a cavity of dimensions substantially equal to but less than the dimensions of the cavity of the mold; and strongly pressing the two shells together to exert on the part disposed between said shells a combined pressing and surface kneading effect.

The part made of low-silicon aluminum alloy contains magnesium, copper, manganese, titanium, and strontium. Said part is obtained by a method that consists in: casting said alloy in a mold so as to obtain the part; after the casting, demolding the part constituting a preform that is still hot; cooling said preform and then subjecting it to an operation suitable for reheating it to a temperature lying in the range 470° C. to 550° C.; positioning said part between two shells of a die that defines a cavity of dimensions substantially equal to but less than the dimensions of the cavity of the mold; and strongly pressing the two shells together to exert on the part disposed between said shells a combined pressing and surface kneading effect.

In some embodiments of present disclosure, a method includes: obtaining an aluminum sheet comprising a 3xxx or a 5xxx alloy having a tensile yield strength as measured in the longitudinal direction of 27-33 ksi and an ultimate tensile strength; wherein the ultimate tensile strength minus the tensile yield strength is less than 3.30 ksi (UTS-TYS<3.30 ksi); and forming a container having a dome from the aluminum sheet.

In some embodiments of present disclosure, a method includes: obtaining an aluminum sheet comprising a 3xxx or a 5xxx alloy having a tensile yield strength as measured in the longitudinal direction of 27-33 ksi and an ultimate tensile strength; wherein the ultimate tensile strength minus the tensile yield strength is less than 3.30 ksi (UTS-TYS<3.30 ksi); and forming a container having a dome from the aluminum sheet.

An alloy composition is provided. The alloy composition includes silicon (Si) at a concentration of greater than or equal to about 0.55 wt. % to less than or equal to about 0.75 wt. %, magnesium (Mg) at a concentration of greater than or equal to about 0.55 wt. % to less than or equal to about 0.75 wt. %, chromium (Cr) at a concentration of greater than or equal to about 0.15 wt. % to less than or equal to about 0.3 wt. %, and a balance of the alloy composition being aluminum (Al). The alloy composition has an intermetallic phase content of less than or equal to about 3 wt. %. Methods of preparing the alloy composition and of processing the alloy composition are also provided.

An alloy composition is provided. The alloy composition includes silicon (Si) at a concentration of greater than or equal to about 0.55 wt. % to less than or equal to about 0.75 wt. %, magnesium (Mg) at a concentration of greater than or equal to about 0.55 wt. % to less than or equal to about 0.75 wt. %, chromium (Cr) at a concentration of greater than or equal to about 0.15 wt. % to less than or equal to about 0.3 wt. %, and a balance of the alloy composition being aluminum (Al). The alloy composition has an intermetallic phase content of less than or equal to about 3 wt. %. Methods of preparing the alloy composition and of processing the alloy composition are also provided.

A substrate handling chamber body is formed from a castable aluminum alloy including a manganese (Mn) constituent and an iron (Fe) constituent. The castable aluminum alloy has a manganese (Mn) constituent-to-iron (Fe) constituent ratio that between about 1.125 and about 1.525 to limit microporosity and shrinkage porosity within the castable aluminum alloy forming the substrate handling chamber body. Semiconductor processing systems and methods of making substrate handling chamber bodies for semiconductor processing systems are also described.

A substrate handling chamber body is formed from a castable aluminum alloy including a manganese (Mn) constituent and an iron (Fe) constituent. The castable aluminum alloy has a manganese (Mn) constituent-to-iron (Fe) constituent ratio that between about 1.125 and about 1.525 to limit microporosity and shrinkage porosity within the castable aluminum alloy forming the substrate handling chamber body. Semiconductor processing systems and methods of making substrate handling chamber bodies for semiconductor processing systems are also described.

Some embodiments of the present disclosure relate to a 6xxx aluminum alloy having: silicon (Si) in an amount of 0.70 wt % to 1.1 wt % based on a total weight of the 6xxx aluminum alloy; magnesium (Mg) in an amount of 0.75 wt % to 1.15 wt % based on the total weight of the 6xxx aluminum alloy; a weight ratio of Mg to Si in the 6xxx aluminum alloy from 0.68:1.0 to 1.65:1.0; and copper (Cu) in an amount of 0.30 wt % to 0.8 wt % based on the total weight of the 6xxx aluminum alloy. Some embodiments of the present disclosure further relate to a method including steps of: casting an exemplary 6xxx aluminum alloy, homogenizing the exemplary 6xxx aluminum alloy; extruding the exemplary 6xxx aluminum alloy; and aging the 6xxx aluminum alloy.

Some embodiments of the present disclosure relate to a 6xxx aluminum alloy having: silicon (Si) in an amount of 0.70 wt % to 1.1 wt % based on a total weight of the 6xxx aluminum alloy; magnesium (Mg) in an amount of 0.75 wt % to 1.15 wt % based on the total weight of the 6xxx aluminum alloy; a weight ratio of Mg to Si in the 6xxx aluminum alloy from 0.68:1.0 to 1.65:1.0; and copper (Cu) in an amount of 0.30 wt % to 0.8 wt % based on the total weight of the 6xxx aluminum alloy. Some embodiments of the present disclosure further relate to a method including steps of: casting an exemplary 6xxx aluminum alloy, homogenizing the exemplary 6xxx aluminum alloy; extruding the exemplary 6xxx aluminum alloy; and aging the 6xxx aluminum alloy.