Patent classifications
C23C4/14
Apparatus for continuous molten metal coating treatment and method for molten metal coating treatment using same
The disclosure provides a fully new method for molten metal coating treatment coating treatment, as a method for treating surfaces of a metal strip by molten metal coating, by which inherent issues in conventional immersion coatings and spray coatings are avoided. In the disclosed method for molten metal coating treatment, a surface of a metal strip is coated by discharging a droplet of a molten metal toward the surface of the metal strip, using a nozzle system configured to discharge the droplet of the molten metal from a nozzle due to an action of the Lorentz force generated on the molten metal by sending an electric current to the molten metal in a chamber, the chamber being applied with magnetic flux in a given direction, while the electric current sent in a direction perpendicular to the given direction.
Rare-earth oxide based coatings based on ion assisted deposition
A component for a processing chamber includes a ceramic body having at least one surface with a first average surface roughness. The component further includes a conformal protective layer on at least one surface of the ceramic body, wherein the conformal protective layer is a plasma resistant rare earth oxide film having a substantially uniform thickness of less than 300 μm over the at least one surface and having a second average surface roughness that is less than the first average surface roughness.
Rare-earth oxide based coatings based on ion assisted deposition
A component for a processing chamber includes a ceramic body having at least one surface with a first average surface roughness. The component further includes a conformal protective layer on at least one surface of the ceramic body, wherein the conformal protective layer is a plasma resistant rare earth oxide film having a substantially uniform thickness of less than 300 μm over the at least one surface and having a second average surface roughness that is less than the first average surface roughness.
AMORPHOUS INNER-COATED PIPE AND METHOD FOR PRODUCING SAME
Disclosed is a coated pipe having an amorphous inner surface and a method of manufacturing the same, whereby an amorphous alloy powder is coated on an inner surface of the pipe, thus ensuring that an amorphous structure is maintained after coating and thus coating density, corrosion resistance, and wear resistance of the pipe are improved. The coated pipe having an amorphous inner surface includes: a pipe; and a coating layer provided on an inner surface of the pipe, wherein the coating layer is an alloy or metal layer of a material different from a material of the pipe and contains an amorphous phase in a proportion of equal to or greater than 90%.
RARE-EARTH OXIDE BASED COATINGS BASED ON ION ASSISTED DEPOSITION
A component for a processing chamber includes a ceramic body having at least one surface with a first average surface roughness. The component further includes a conformal protective layer on at least one surface of the ceramic body, wherein the conformal protective layer is a plasma resistant rare earth oxide film having a substantially uniform thickness of less than 300 μm over the at least one surface and having a second average surface roughness that is less than the first average surface roughness.
RARE-EARTH OXIDE BASED COATINGS BASED ON ION ASSISTED DEPOSITION
A component for a processing chamber includes a ceramic body having at least one surface with a first average surface roughness. The component further includes a conformal protective layer on at least one surface of the ceramic body, wherein the conformal protective layer is a plasma resistant rare earth oxide film having a substantially uniform thickness of less than 300 μm over the at least one surface and having a second average surface roughness that is less than the first average surface roughness.
Rare-earth oxide based coatings based on ion assisted deposition
A component for a semiconductor processing chamber includes a ceramic body having at least one surface with a first average surface roughness of approximately 8-16 micro-inches. The component further includes a conformal protective layer on at least one surface of the ceramic body, wherein the conformal protective layer is a plasma resistant rare earth oxide film having a substantially uniform thickness of less than 300 m over the at least one surface and having a second average surface roughness of below 10 micro-inches, wherein the second average surface roughness is less than the first average surface roughness.
Rare-earth oxide based coatings based on ion assisted deposition
A component for a semiconductor processing chamber includes a ceramic body having at least one surface with a first average surface roughness of approximately 8-16 micro-inches. The component further includes a conformal protective layer on at least one surface of the ceramic body, wherein the conformal protective layer is a plasma resistant rare earth oxide film having a substantially uniform thickness of less than 300 m over the at least one surface and having a second average surface roughness of below 10 micro-inches, wherein the second average surface roughness is less than the first average surface roughness.
Thermal spray coatings onto non-smooth surfaces
This invention relates to thermal spray coatings and processes onto non-smooth surfaces. The coating and processes can coat non-smooth surfaces without substantial degradation of the underlying surface texture or profile of the non-smooth surfaces so as to sufficiently preserve the underlying surface texture or profile. The ability for coating fractional coverage to maintain the surface profile while maintaining wear resistance is unprecedented by conventional thermal spray processes.
Thermal spray coatings onto non-smooth surfaces
This invention relates to thermal spray coatings and processes onto non-smooth surfaces. The coating and processes can coat non-smooth surfaces without substantial degradation of the underlying surface texture or profile of the non-smooth surfaces so as to sufficiently preserve the underlying surface texture or profile. The ability for coating fractional coverage to maintain the surface profile while maintaining wear resistance is unprecedented by conventional thermal spray processes.