A component for a semiconductor processing chamber includes a ceramic body having at least one surface with a first average surface roughness of approximately 8-16 micro-inches. The component further includes a conformal protective layer on at least one surface of the ceramic body, wherein the conformal protective layer is a plasma resistant rare earth oxide film having a substantially uniform thickness of less than 300 m over the at least one surface and having a second average surface roughness of below 10 micro-inches, wherein the second average surface roughness is equal to or less than the first average surface roughness.

A method for regeneration of internal conduit surfaces by thermal projection of metals, includes inserting a device including a vehicle having a rolling assembly to permit rolling of the vehicle and carrying a thermal projection system, through a manhole in a conduit installation, including the steps of inserting the device in a conduit with the rolling assembly in a retracted position, and expanding the rolling assembly inside the conduit until the device is centered in the conduit; inserting electrical, pneumatic and/or hydraulic conduits and conduits for supplying metal to be thermally projected, through the manhole, such that the conduits are connected with the vehicle; positioning a regeneration device including the thermal projection system connected with the vehicle by a remote-control pulling system in a particular position to be regenerated; thermally projecting metal from the regeneration device; advancing the vehicle and connected regeneration device to a new regeneration position.

A method for regeneration of internal conduit surfaces by thermal projection of metals, includes inserting a device including a vehicle having a rolling assembly to permit rolling of the vehicle and carrying a thermal projection system, through a manhole in a conduit installation, including the steps of inserting the device in a conduit with the rolling assembly in a retracted position, and expanding the rolling assembly inside the conduit until the device is centered in the conduit; inserting electrical, pneumatic and/or hydraulic conduits and conduits for supplying metal to be thermally projected, through the manhole, such that the conduits are connected with the vehicle; positioning a regeneration device including the thermal projection system connected with the vehicle by a remote-control pulling system in a particular position to be regenerated; thermally projecting metal from the regeneration device; advancing the vehicle and connected regeneration device to a new regeneration position.

A method of manufacturing an article comprises providing a lid or nozzle for an etch reactor. Ion assisted deposition (IAD) is then performed to deposit a protective layer on at least one surface of the lid or nozzle, wherein the protective layer is a plasma resistant rare earth oxide film having a thickness of less than 300 m and an average surface roughness of 10 micro-inches or less.

The invention relates to a thermal spraying material (5) for the coating of a surface of a workpiece by means of a thermal spraying method, wherein the spraying material (5) contains zinc. The invention further relates to a thermal spraying method and to a thermally sprayed coating sprayed with the material (5).

The invention relates to a thermal spraying material (5) for the coating of a surface of a workpiece by means of a thermal spraying method, wherein the spraying material (5) contains zinc. The invention further relates to a thermal spraying method and to a thermally sprayed coating sprayed with the material (5).

A hearth roll for a continuous annealing furnace, the hearth roll comprising a thermal spray coating on a surface of the hearth roll, wherein the thermal spray coating comprises main components consisting of a Co-based alloy, a carbide of a transition metal, and a double oxide; and impurities, the double oxide consists of one or two types of a first double oxide consisting of Al and a rare earth element and a second double oxide consisting of a transition metal and a rare earth element, and when the main components are 100 mass %, a content of the Co-based alloy is 25 mass % or more and 50 mass % or less, a content of the carbide is 5 mass % or more and 30 mass % or less, and a content of the double oxide is 20 mass % or more and 45 mass % or less.

A hearth roll for a continuous annealing furnace, the hearth roll comprising a thermal spray coating on a surface of the hearth roll, wherein the thermal spray coating comprises main components consisting of a Co-based alloy, a carbide of a transition metal, and a double oxide; and impurities, the double oxide consists of one or two types of a first double oxide consisting of Al and a rare earth element and a second double oxide consisting of a transition metal and a rare earth element, and when the main components are 100 mass %, a content of the Co-based alloy is 25 mass % or more and 50 mass % or less, a content of the carbide is 5 mass % or more and 30 mass % or less, and a content of the double oxide is 20 mass % or more and 45 mass % or less.

A hearth roll for a continuous annealing furnace, the hearth roll comprising a thermal spray coating on a surface of the hearth roll, wherein the thermal spray coating comprises main components consisting of a Co-based alloy, a carbide of a transition metal, and a double oxide; and impurities, the double oxide consists of one or two types of a first double oxide consisting of Al and a rare earth element and a second double oxide consisting of a transition metal and a rare earth element, and when the main components are 100 mass %, a content of the Co-based alloy is 25 mass % or more and 50 mass % or less, a content of the carbide is 5 mass % or more and 30 mass % or less, and a content of the double oxide is 20 mass % or more and 45 mass % or less.

A hearth roll for a continuous annealing furnace, the hearth roll comprising a thermal spray coating on a surface of the hearth roll, wherein the thermal spray coating comprises main components consisting of a Co-based alloy, a carbide of a transition metal, and a double oxide; and impurities, the double oxide consists of one or two types of a first double oxide consisting of Al and a rare earth element and a second double oxide consisting of a transition metal and a rare earth element, and when the main components are 100 mass %, a content of the Co-based alloy is 25 mass % or more and 50 mass % or less, a content of the carbide is 5 mass % or more and 30 mass % or less, and a content of the double oxide is 20 mass % or more and 45 mass % or less.