A pressure sensor includes a flexible diaphragm which is flexed by pressure changes and a coating layer on one surface of the diaphragm. The diaphragm is a single layer containing silicon, nitrogen, and oxygen. Further, the coating layer contains silicon oxynitride. Also, the coating layer has a nitrogen concentration distribution that varies across the thickness of the coating layer.

Methods for treating steel, along with the resulting treated steel, are provided. The method may comprise: nitriding a carburized Ferrium steel component such that the Ferrium steel component has a surface portion with a nitrogen content that is greater than 0% to about 5% by weight. Nitriding the Ferrium steel component may increase the surface hardness of the Ferrium steel. The surface portion may have a nitrogen content of about 0.05% to about 0.5% by weight.

Methods for treating steel, along with the resulting treated steel, are provided. The method may comprise: nitriding a carburized Ferrium steel component such that the Ferrium steel component has a surface portion with a nitrogen content that is greater than 0% to about 5% by weight. Nitriding the Ferrium steel component may increase the surface hardness of the Ferrium steel. The surface portion may have a nitrogen content of about 0.05% to about 0.5% by weight.

A soft magnetic material that is sheet-shaped or foil-shaped and has a high saturation magnetic flux density, contains iron, carbon, and nitrogen, and includes a martensite containing carbon and nitrogen, and γ-Fe, wherein the γ-Fe includes a nitrogen-containing phase. The soft magnetic material is produced by steps of heating an iron-based material that is sheet-shaped or foil-shaped, carburizing the iron-based material with a carburizing gas, dispersing a granular carbide in α-Fe in the iron-based material at a temperature equal to or lower than a eutectoid temperature, transforming the α-Fe into γ-Fe at a temperature higher than the eutectoid temperature, diffusing nitrogen into the γ-Fe using a nitrogen supply gas to form γ-Fe—N—C, and rapidly heating and then rapidly cooling the γ-Fe—N—C to transform the γ-Fe—N—C into a martensite. The result is a thermally stable soft magnetic material having a saturation magnetic flux density higher than that of pure iron.

The invention describes a method of heat-treating an article, which includes a first step of heating the article to a temperature of 400° C. to 500° C. at a pressure of 1 to 3 millibar in an atmosphere comprising hydrogen for a period of 0.1 to 50 hours to produce a hot article, a second step of heating the hot article at a temperature of 400° C. to 500° C. at a pressure of 1 to 3 millibar in an atmosphere comprising at least one of hydrogen, argon, and nitrogen, for 0.1 to 50 hours to produce a preliminary heat treated article, and a third step of heating the preliminary heat treated article at a temperature of 400° C. to 500° C. at a pressure of 1 to 3 millibar in an atmosphere comprising at least one of hydrogen, nitrogen, and a hydrocarbon gas, for 0.1 to 50 hours; to produce a heat-treated article.

The disclosure describes techniques for forming nanoparticles including Fe.sub.16N.sub.2 phase. In some examples, the nanoparticles may be formed by first forming nanoparticles including iron, nitrogen, and at least one of carbon or boron. The carbon or boron may be incorporated into the nanoparticles such that the iron, nitrogen, and at least one of carbon or boron are mixed. Alternatively, the at least one of carbon or boron may be coated on a surface of a nanoparticle including iron and nitrogen. The nano particle including iron, nitrogen, and at least one of carbon or boron then may be annealed to form at least one phase domain including at least one of Fe.sub.16N.sub.2, Fe.sub.16(NB).sub.2, Fe.sub.16(NC).sub.2, or Fe.sub.16(NCB).sub.2.

A microstructure may be provided by forming a metal layer such as a molybdenum layer over a substrate. An aluminum nitride layer is formed on a top surface of the metal layer. A surface portion of the aluminum nitride layer is converted into a continuous aluminum oxide-containing layer by oxidation. A dielectric spacer layer may be formed over the continuous aluminum oxide-containing layer. Contact via cavities extending through the dielectric spacer layer, the continuous aluminum oxide-containing layer, and the aluminum nitride layer and down to a respective portion of the at least one metal layer may be formed using etch processes that contain a wet etch step while suppressing formation of an undercut in the aluminum nitride layer. Contact via structures may be formed in the contact via cavities. The microstructure may include a micro-electromechanical system (MEMS) device containing a piezoelectric transducer.

A microstructure may be provided by forming a metal layer such as a molybdenum layer over a substrate. An aluminum nitride layer is formed on a top surface of the metal layer. A surface portion of the aluminum nitride layer is converted into a continuous aluminum oxide-containing layer by oxidation. A dielectric spacer layer may be formed over the continuous aluminum oxide-containing layer. Contact via cavities extending through the dielectric spacer layer, the continuous aluminum oxide-containing layer, and the aluminum nitride layer and down to a respective portion of the at least one metal layer may be formed using etch processes that contain a wet etch step while suppressing formation of an undercut in the aluminum nitride layer. Contact via structures may be formed in the contact via cavities. The microstructure may include a micro-electromechanical system (MEMS) device containing a piezoelectric transducer.

A grain-oriented electrical steel sheet includes: a base steel sheet; an intermediate layer arranged in contact with the base steel sheet; and an insulation coating arranged in contact with the intermediate layer to be an outermost surface, in which the insulation coating has a crystalline phosphide-containing layer containing a crystalline phosphide in an area in contact with the intermediate layer when viewing a cross section whose cutting direction is parallel to a thickness direction.

A method for treating a metal material to make a surface portion hydrophobic. The method includes oxidizing an untreated surface portion of the metal material to form an oxidized surface portion. The untreated surface portion has metal atoms. The oxidizing step forming bonds between the metal atoms and oxygen atoms. The method further includes doping the oxidized surface portion with a liquid containing a fluorine-containing salt to form a fluorinated surface portion. The doping step forming bonds between fluorine atoms and at least a portion of the metal atoms and the oxygen atoms. The fluorinated surface portion is hydrophobic.