Patent classifications
C23C14/14
Gold sputtering target
A gold sputtering target is made of gold and inevitable impurities, and has a surface to be sputtered. In the gold sputtering target, an average value of Vickers hardness is 40 or more and 60 or less, and an average crystal grain size is 15 μm or more and 200 μm or less. A {110} plane of gold is preferentially oriented at the surface to be sputtered.
Gold sputtering target
A gold sputtering target is made of gold and inevitable impurities, and has a surface to be sputtered. In the gold sputtering target, an average value of Vickers hardness is 40 or more and 60 or less, and an average crystal grain size is 15 μm or more and 200 μm or less. A {110} plane of gold is preferentially oriented at the surface to be sputtered.
MEMS process power
A transducer includes a first piezoelectric layer; and a second piezoelectric layer that is above the first piezoelectric layer; wherein the second piezoelectric layer is a more compressive layer with an average stress that is less than or more compressive than an average stress of the first piezoelectric layer.
MEMS process power
A transducer includes a first piezoelectric layer; and a second piezoelectric layer that is above the first piezoelectric layer; wherein the second piezoelectric layer is a more compressive layer with an average stress that is less than or more compressive than an average stress of the first piezoelectric layer.
METHOD FOR PRODUCING MOLYBDENUM ALLOY TARGETS
The present invention relates to a method for producing a molybdenum alloy target, and solves the problem of low density and coarser grains of the molybdenum alloy targets in the prior art. The present invention comprises subjecting a mixed powder with a mass ratio depending upon the formula composition of a molybdenum alloy to a pre-press forming process to obtain a preformed molybdenum alloy target blank; placing the preformed molybdenum alloy target blank in a capsule and subjecting the capsule to processes of preheating for degassing and vacuum seal welding; subjecting the target blank to a hot isostatic pressing process to obtain a densified molybdenum alloy prefabricated target; removing the capsule; and subjecting the molybdenum alloy prefabricated target with the capsule removed to a temperature-rising and pressure-decreasing process, followed by finish machining to obtain a molybdenum alloy target.
COMPOSITE COATING AND FABRICATION METHOD THEREOF
The present disclosure provides a composite coating and a method for fabricating the composite coating. The composite coating comprises a polymer layer, a metal interlayer and an amorphous metal coating. The polymer layer is formed on a substrate and acts as a diffusion barrier layer, which is thick and dense enough to prevent the corrosive substances from penetrating into the substrate. The metal interlayer is formed between the polymer layer and the amorphous metal coating for improving the adhesion of the amorphous metal coating to the substrate.
METHODS OF ALTERING THE SURFACE ENERGY OF COMPONENTS OF A MESH NEBULIZER AND MESH NEBULIZERS FORMED THEREBY
Methods of altering the surface energy of components of a mesh nebulizer are provided, comprising: a) depositing a metal surface layer on surfaces of the component; b) forming a hydrophobic coating layer comprising an organo-silicon or a self-assembled monolayer of an organophosphorus acid directly on the metal surface layer or indirectly on the metal surface layer through an intermediate organometallic coating; and either: i) removing select areas of the hydrophobic coating layer to expose the metal surface layer; or ii) forming a polymeric coating layer chemically bonded to and propagated from terminal functional groups on the hydrophobic coating layer that are capable of initiating polymer growth when exposed to a source of polymerizable monomer, on select areas of the components. Mesh nebulizers formed by such methods are also provided.
METHODS OF ALTERING THE SURFACE ENERGY OF COMPONENTS OF A MESH NEBULIZER AND MESH NEBULIZERS FORMED THEREBY
Methods of altering the surface energy of components of a mesh nebulizer are provided, comprising: a) depositing a metal surface layer on surfaces of the component; b) forming a hydrophobic coating layer comprising an organo-silicon or a self-assembled monolayer of an organophosphorus acid directly on the metal surface layer or indirectly on the metal surface layer through an intermediate organometallic coating; and either: i) removing select areas of the hydrophobic coating layer to expose the metal surface layer; or ii) forming a polymeric coating layer chemically bonded to and propagated from terminal functional groups on the hydrophobic coating layer that are capable of initiating polymer growth when exposed to a source of polymerizable monomer, on select areas of the components. Mesh nebulizers formed by such methods are also provided.
Electrode for electrochemical sensors
An electrochemical electrode for use in a biosensor. The electrode comprises a substrate, a palladium metal layer manufactured on the substrate, and a palladium oxide-containing layer manufactured on the palladium metal layer. The palladium metal layer has a thickness of no more than 90 nm, and the palladium oxide-containing layer has a thickness of no more than 40 nm.
Electrode for electrochemical sensors
An electrochemical electrode for use in a biosensor. The electrode comprises a substrate, a palladium metal layer manufactured on the substrate, and a palladium oxide-containing layer manufactured on the palladium metal layer. The palladium metal layer has a thickness of no more than 90 nm, and the palladium oxide-containing layer has a thickness of no more than 40 nm.