Patent classifications
C23C14/34
Plasma erosion resistant rare-earth oxide based thin film coatings
A chamber component for a process chamber comprises a ceramic body and one or more protective layer on at least one surface of the ceramic body, wherein the one or more protective layer comprises Y.sub.3Al.sub.5O.sub.12 having a dielectric constant of 9.76+/−up to 30% and a hermiticity of 4.4E-10 cm.sup.3/s+/−up to 30%.
Plasma erosion resistant rare-earth oxide based thin film coatings
A chamber component for a process chamber comprises a ceramic body and one or more protective layer on at least one surface of the ceramic body, wherein the one or more protective layer comprises Y.sub.3Al.sub.5O.sub.12 having a dielectric constant of 9.76+/−up to 30% and a hermiticity of 4.4E-10 cm.sup.3/s+/−up to 30%.
Magnetic field detectors, implantable medical devices, and related methods that utilize a suspended proof mass and magnetically sensitive material
Magnetic field detectors include a proof mass suspended by deformable arms similar to a three dimensional accelerometer. The magnetic field detectors further include magnetically sensitive material present on the proof mass and/or deformable arms to cause movement of the proof mass and/or deformable arms when in the presence of a magnetic field. This movement is converted to an electrical signal and that electrical signal is compared to a reference to determine if a magnetic field of interest is present. The magnetic field detector may be included within an implantable medical device, and when the magnetic field detector indicates that a magnetic field of an MRI scanner is present, the implantable medical device may switch to an MRI mode of operation. The device may also switch back to a normal mode of operation once the MRI scanner is no longer detected such as after a predefined amount of time.
Magnetic field detectors, implantable medical devices, and related methods that utilize a suspended proof mass and magnetically sensitive material
Magnetic field detectors include a proof mass suspended by deformable arms similar to a three dimensional accelerometer. The magnetic field detectors further include magnetically sensitive material present on the proof mass and/or deformable arms to cause movement of the proof mass and/or deformable arms when in the presence of a magnetic field. This movement is converted to an electrical signal and that electrical signal is compared to a reference to determine if a magnetic field of interest is present. The magnetic field detector may be included within an implantable medical device, and when the magnetic field detector indicates that a magnetic field of an MRI scanner is present, the implantable medical device may switch to an MRI mode of operation. The device may also switch back to a normal mode of operation once the MRI scanner is no longer detected such as after a predefined amount of time.
Method for forming conductive mesh pattern, and mesh electrode and laminate manufactured thereby
The present invention relates to a method for manufacturing a conductive mesh pattern, a mesh electrode manufactured by the same, and a laminate.
Method for forming conductive mesh pattern, and mesh electrode and laminate manufactured thereby
The present invention relates to a method for manufacturing a conductive mesh pattern, a mesh electrode manufactured by the same, and a laminate.
Method for the fabrication and transfer of graphene
Provided herein are processes for transferring high quality large-area graphene layers (e.g., single-layer graphene) to a flexible substrate based on preferential adhesion of certain thin metallic films to graphene followed by lamination of the metallized graphene layers to a flexible target substrate in a process that is compatible with roll-to-roll manufacturing, providing an environmentally benign and scalable process of transferring graphene to flexible substrates.
Method for the fabrication and transfer of graphene
Provided herein are processes for transferring high quality large-area graphene layers (e.g., single-layer graphene) to a flexible substrate based on preferential adhesion of certain thin metallic films to graphene followed by lamination of the metallized graphene layers to a flexible target substrate in a process that is compatible with roll-to-roll manufacturing, providing an environmentally benign and scalable process of transferring graphene to flexible substrates.
Method for preparing an electrochromic device
A method for preparing an electrochromic device. In the method the device is prepared by inserting monovalent cations into a reducing electrochromic layer in advance, for instance, through a dry process. In particular, the method involves inserting monovalent cations into an electrochromic layer which includes a reducing electrochromic material. Then, subsequently and sequentially, placing an electrolyte layer and an ion storage layer on the electrochromic layer. In this way, it is possible to improve driving durability of the electrochromic device.
Method for preparing an electrochromic device
A method for preparing an electrochromic device. In the method the device is prepared by inserting monovalent cations into a reducing electrochromic layer in advance, for instance, through a dry process. In particular, the method involves inserting monovalent cations into an electrochromic layer which includes a reducing electrochromic material. Then, subsequently and sequentially, placing an electrolyte layer and an ion storage layer on the electrochromic layer. In this way, it is possible to improve driving durability of the electrochromic device.