Patent classifications
C23C14/34
Apparatus for manufacturing template and method for manufacturing template
According to one embodiment, an apparatus for manufacturing a template includes a vacuum chamber, an electrode and an adjustor. The vacuum chamber includes an inlet and an exhaust port of a reactive gas. The vacuum chamber is capable of maintaining an atmosphere depressurized below atmospheric pressure. The electrode is provided in an interior of the vacuum chamber. A high frequency voltage is applied to the electrode. A substrate is placed on the electrode. The substrate has a back surface on a side of the electrode. A recess is provided in the back surface. The adjustor is inserted into the recess. The adjustor is insulative.
Break resistant and shock resistant sapphire plate
A break resistant sapphire plate and a corresponding production process. The sapphire plate may include a planar sapphire substrate, and at least one shock absorbing layer arranged on a surface of the substrate. The shock absorbing layer may have a thickness of between 0.1% to 10% of the thickness of the substrate. The production process for producing the sapphire plate may include providing a planar sapphire substrate, and coating at least one surface of the substrate with a shock absorbing layer. The shock absorbing layer may include a layer thickness between 0.1% to 10% of the thickness of the substrate.
Break resistant and shock resistant sapphire plate
A break resistant sapphire plate and a corresponding production process. The sapphire plate may include a planar sapphire substrate, and at least one shock absorbing layer arranged on a surface of the substrate. The shock absorbing layer may have a thickness of between 0.1% to 10% of the thickness of the substrate. The production process for producing the sapphire plate may include providing a planar sapphire substrate, and coating at least one surface of the substrate with a shock absorbing layer. The shock absorbing layer may include a layer thickness between 0.1% to 10% of the thickness of the substrate.
Zn—Mg alloy plated steel sheet, and method for manufacturing same
Provided are a Zn—Mg alloy plated steel sheet and a method for manufacturing same. The Zn—Mg alloy plated steel sheet comprises a base steel sheet and a Zn—Mg plating layer formed on the base steel sheet, wherein the content of Mg in the Zn—Mg plating layer is 8 weight % or less (provided that 0 weight % is excluded), and the Zn—Mg plating layer is a compound phase of Zn and Mg2Zn11. According to the present invention, provided are a Zn—Mg alloy plated steel sheet and a method for manufacturing the same, wherein the Zn—Mg alloy plated steel sheet has excellent corrosion resistance, high adhesion, and superior surface quality of metallic luster.
Zn—Mg alloy plated steel sheet, and method for manufacturing same
Provided are a Zn—Mg alloy plated steel sheet and a method for manufacturing same. The Zn—Mg alloy plated steel sheet comprises a base steel sheet and a Zn—Mg plating layer formed on the base steel sheet, wherein the content of Mg in the Zn—Mg plating layer is 8 weight % or less (provided that 0 weight % is excluded), and the Zn—Mg plating layer is a compound phase of Zn and Mg2Zn11. According to the present invention, provided are a Zn—Mg alloy plated steel sheet and a method for manufacturing the same, wherein the Zn—Mg alloy plated steel sheet has excellent corrosion resistance, high adhesion, and superior surface quality of metallic luster.
Film forming method
The present disclosure discloses a film-forming device belongs to the field of film forming technology comprising: a film-forming chamber configured to form a film on a substrate disposed inside the film-forming chamber; a transfer assembly configured to transport a shielding plate into the film-forming chamber along a conveying path, move the shielding plate to a first position, and remove the shielding plate from the film-forming chamber along the conveying path; and a cleaning assembly disposed at the conveying path outside the film-forming chamber for cleaning the shielding plate removed from the film-forming chamber.
Film forming method
The present disclosure discloses a film-forming device belongs to the field of film forming technology comprising: a film-forming chamber configured to form a film on a substrate disposed inside the film-forming chamber; a transfer assembly configured to transport a shielding plate into the film-forming chamber along a conveying path, move the shielding plate to a first position, and remove the shielding plate from the film-forming chamber along the conveying path; and a cleaning assembly disposed at the conveying path outside the film-forming chamber for cleaning the shielding plate removed from the film-forming chamber.
Process for producing sputtering target and sputtering target
A process for producing a sputtering target in which a target material is diffusion-bonded to a backing plate material having an annular frame part, the method comprising: an incorporating step of incorporating the target material inside the frame part of the backing plate material in such a manner that the uppermost position of the target material becomes higher than the uppermost position of the frame part of the backing plate material in a height direction of the frame part of the backing plate material; and a bonding step of diffusion-bonding the target material to the backing plate material.
Composite support material for three-dimensional printing
The present disclosure provides composite support material and associated methods used in the fabrication of three-dimensional objects. In one example, a composite support material for three-dimensional printing can include a soluble filament core that is soluble in a solvent and is encapsulated with an insoluble shell that is insoluble in the solvent. The composite support material is stable in air and, when printed, is dissolvable in the solvent.
Composite support material for three-dimensional printing
The present disclosure provides composite support material and associated methods used in the fabrication of three-dimensional objects. In one example, a composite support material for three-dimensional printing can include a soluble filament core that is soluble in a solvent and is encapsulated with an insoluble shell that is insoluble in the solvent. The composite support material is stable in air and, when printed, is dissolvable in the solvent.