A method for coating a metal strip by means of a metallic substrate in a strip coating system, wherein the coating is carried out according to the principle of physical vapor deposition and the layer thickness is set via the parameters of the strip speed and the vaporization rate. It is provided according to the invention that in the event of a layer thickness change and/or a width change of the metal strip, the vaporization rate and the strip speed are changed simultaneously, so that the layer thickness change can be implemented directly independently of the thermal vaporization process.

According to one embodiment, a film formation apparatus that suppresses effects of pre-processing and enables stable film formation is provided. A film formation apparatus of the present disclosure includes a chamber that can be made vacuum, a transporter that is provided inside the chamber and that circulates and transports a workpiece in a trajectory of a circle, a film formation unit that forms film by sputtering on the workpiece circulated and transported by the transporter, a load-lock room that loads the workpiece into and out of the chamber relative to air space while keeping an interior of the chamber vacuum, and a pre-processing unit that is provided in the chamber at a position adjacent to the load-lock room and that performs pre-processing to the workpiece loaded in from the load-lock room in a state distant from the transporter.

An apparatus for accommodating an article in a vacuum-coating installation has a carrier with a coating opening and a retaining device for retaining the article in the coating opening. The retaining device has a pivot bearing that is secured on the carrier and a pivot axis, about which it is possible to pivot the retaining device to thereby turn the article in the coating opening. The pivot bearing has a bearing body with a circumferentially closed mount for a round body, which extends in the direction of the pivot axis, wherein the bearing body has a circumferentially closed mount and a circumferentially open mount for the round body, and therefore, when the retaining device is arranged on the carrier, the round body can be introduced through the circumferentially open mount into the circumferentially closed mount.

An apparatus for accommodating an article in a vacuum-coating installation has a carrier with a coating opening and a retaining device for retaining the article in the coating opening. The retaining device has a pivot bearing that is secured on the carrier and a pivot axis, about which it is possible to pivot the retaining device to thereby turn the article in the coating opening. The pivot bearing has a bearing body with a circumferentially closed mount for a round body, which extends in the direction of the pivot axis, wherein the bearing body has a circumferentially closed mount and a circumferentially open mount for the round body, and therefore, when the retaining device is arranged on the carrier, the round body can be introduced through the circumferentially open mount into the circumferentially closed mount.

The present invention discloses a PVD coating process for producing a multifunctional coating structure comprising the steps of producing a HEA ceramic matrix on a substrate and the targeted introduction of a controlled precipitate structure into the HEA ceramic matrix to generate a desired specific property of the coating structure.

Provided are a crack-free laminated film and a structure including this laminated film. This laminated film includes: a buffer layer; and at least one layer of gallium nitride base film disposed on the buffer layer. Moreover, the compression stress of the entire laminated film is −2.0 to 5.0 GPa.

Provided are a crack-free laminated film and a structure including this laminated film. This laminated film includes: a buffer layer; and at least one layer of gallium nitride base film disposed on the buffer layer. Moreover, the compression stress of the entire laminated film is −2.0 to 5.0 GPa.

Embodiments of the disclosure provide methods and apparatus for fabricating magnetic tunnel junction (MTJ) structures on a substrate for MRAM applications. In one embodiment, a magnetic tunnel junction (MTJ) device structure includes a junction structure disposed on a substrate, the junction structure comprising a first ferromagnetic layer and a second ferromagnetic layer sandwiching a tunneling barrier layer, a dielectric capping layer disposed on the junction structure, a metal capping layer disposed on the junction structure, and a top buffer layer disposed on the metal capping layer.

A module for operating a carrier of one or more substrates to be treated in a vacuum deposition method includes a frame provided with a plate receiving, on a first side, an electronic assembly comprising radio transmitter/receiver electronics, a processor card, motor controller electronics and a battery for supplying power to the module. The processor card has a program memory with a program for controlling the motor controller electronics according to data received from a remote apparatus provided with a radio transmitting/receiving device for communicating with the module's radio transmitter/receiver electronics and, on a second side, a device for operating the carrier, which device is provided with a first motor for rotating the carrier about a first axis parallel to the plate and with a second motor for rotating the carrier about a second axis perpendicular to the plate.

A module for operating a carrier of one or more substrates to be treated in a vacuum deposition method includes a frame provided with a plate receiving, on a first side, an electronic assembly comprising radio transmitter/receiver electronics, a processor card, motor controller electronics and a battery for supplying power to the module. The processor card has a program memory with a program for controlling the motor controller electronics according to data received from a remote apparatus provided with a radio transmitting/receiving device for communicating with the module's radio transmitter/receiver electronics and, on a second side, a device for operating the carrier, which device is provided with a first motor for rotating the carrier about a first axis parallel to the plate and with a second motor for rotating the carrier about a second axis perpendicular to the plate.