This optical laminate includes a transparent substrate, an optical functional layer, and an antifouling layer laminated in this order, wherein the optical functional layer is a laminate in which a low refractive index layer and a high refractive index layer are alternately laminated, the antifouling layer is formed of a vapor-deposited film obtained by vapor deposition of an antifouling material, and the residual amount of fluorine atoms in the antifouling layer detected by XRF after 10 minutes of cleaning by irradiation with 40 KHz and 240 W ultrasonic waves in a fluorine-based solvent is 70% or more.

A vacuum assembly may include a vacuum chamber housing, a transport device for transporting a substrate along a transport path within the vacuum chamber housing, a plasma source having a plasma source housing in which a cavity is provided, an electrode disposed in the vacuum chamber housing and adjacent the plasma source, and a radio frequency transmission device that ohmically couples the plasma source housing to the electrode. The plasma source may be adapted to form a plasma to which the transport path is exposed by the cavity.

A method of forming a hydrophobic conductive substrate includes forming a metal thin film on a substrate and coating with a hydrophobic coating. For example, the hydrophobic coating can be a self-assembled monolayer of phosphonic acid.

Embodiment of the present disclosure generally relate to optical device structures and methods for forming a metal containing interconnection structure in a high aspect ratio gap on a substrate for an optical device. In one embodiment, the method includes providing a substrate having a gap in a material layer disposed on a substrate, depositing a gap fill material in an opening of the gap, etching the gap fill material to remove portions of the gap fill material deposited in the gap, and cyclically depositing more of the gap fill material in the opening of the gap to completely fill the gap.