A method for producing an organic EL device in this disclosure includes the steps of providing an element substrate including a substrate and a plurality of organic EL devices arranged on the substrate; and forming a thin film encapsulation structure over the element substrate. The step of forming the thin film encapsulation structure includes the steps of forming a first inorganic barrier layer over the element substrate; condensing a photocurable resin on the first inorganic barrier layer; irradiating a plurality of selected regions of the photocurable resin with a laser beam to cure at least a part of the photocurable resin, thus to form a photocurable resin layer; removing an uncured part of the photocurable resin; and forming a second inorganic barrier layer, covering the photocurable resin layer, on the first inorganic barrier layer.

A preparation method for a high-refractive index hydrogenated silicon film, a high-refractive index hydrogenated silicon film, a light filtering lamination and a light filtering piece. The method includes: (a) by magnetic controlled Si target sputtering, Si deposits on a base body, forming a silicon film, which (b) forms an oxygenic hydrogenated silicon film in environment of active hydrogen and active oxygen, the amount of active oxygen accounts for 4%-99% of the total amount of active hydrogen and active oxygen, or, a nitric hydrogenated silicon film in environment of active hydrogen and active nitrogen, the amount of active nitrogen accounts for 5%-20% of the total amount of active hydrogen and active nitrogen. Sputtering and reactions are separately conducted, Si first deposits on the base body by magnetic controlled Si target sputtering, and then plasmas of active hydrogen and active oxygen/nitrogen react with silicon for oxygenic or nitric SiH.

An extractive system, such as SPME, has an adsorptive phase in the form of a porous coating that has essentially vertical, mutually supporting, columnar structures with nanospaces at the boundaries of the grains.

A method of manufacturing a sensor comprises: providing a substrate; forming a photoresist layer on the substrate, wherein the photoresist layer comprises a hole array which comprises a plurality of holes which pass through from one side of the photoresist layer to the substrate; sputtering a metallic glass material on the photoresist layer to deposit the metallic glass material on a hole wall of each hole and a part of the substrate defined by the hole wall; removing the photoresist layer and forming a nanotube array structure of the metallic glass material, wherein the nanotube array structure comprises a plurality of nanotubes, and each nanotube has an open end opposite to the substrate; performing a surface treatment on the nanotube array structure to form a plurality of functional groups in each nanotube; and anchoring a plurality of aptamers in each nanotube by activating the plurality of functional groups.

An article comprises a body having a coating. The coating comprises a YOF coating or other yttrium-based oxy-fluoride coating generated either by performing a fluorination process on a yttrium-based oxide coating or an oxidation process on a yttrium-based fluorine coating.

The thermal barrier coating includes reactive gadolinia in its microstructures and the embedded gadolinia effectively reacts with CMAS contaminant reducing the damage from CMAS. Moreover, a method to produce a CMAS resistant thermal barrier coating can include a post-treatment to the thermal barrier coating with the reactive gadolinia suspension in sol-gel state.

Amorphous tungsten nitride compounds, products, and methods of manufacture, as well as devices incorporating the same are disclosed herein. An example electro-mechanical device includes a first gate, a first drain, and a source having a completely amorphous metal tungsten nitride film cantilever. The cantilever extends from an anchor of the source transversely to the first gate and the first drain.

An extractive system, such as SPME, has an adsorptive phase in the form of a porous coating that has essentially vertical, mutually supporting, columnar structures with nanospaces at the boundaries of the grains.

A microthruster system may include a substrate and a source film. The substrate may include a plurality of emitter tips, and a source film deposited on the substrate. The source film may include silver. The microthruster system may also include a solid electrolyte film, which may include chalcogenide film, deposited over the source film. The solid electrolyte film may cause ions of the source film to move to the plurality of emitter tips.

The present invention provides a Cr-rich cathodic arc coating, an article in turbine blade coated with the chromizing over cathodic arc coating, and a method to produce the coating thereof. The Cr-rich cathodic arc coating in the present invention comprises a cathodic arc coating and a diffusion coating deposited atop the cathodic arc coating to enforce hot corrosion resistance. The hardware coated with the chromizing over cathodic arc coating in the present invention is reinforced with superior-hot corrosion resistance. The present invention further provides a novel method for producing the chromizing over cathodic arc coating by re-sequencing coating deposition order. The method in the present invention is efficient and cost-reducing by eliminating some operations, e.g., DHT and peening, between the cathodic arc coating and the diffusion coating. The hot corrosion resistance in the present invention results from the high Cr content in the surface of the coating.