C23C16/4418

Metal sulfide filled carbon nanotubes and synthesis methods thereof

Filled carbon nanotubes (CNTs) and methods of synthesizing the same are provided. An in situ chemical vapor deposition technique can be used to synthesize CNTs filled with metal sulfide nanowires. The CNTs can be completely and continuously filled with the metal sulfide fillers up to several micrometers in length. The filled CNTs can be easily collected from the substrates used for synthesis using a simple ultrasonication method.

SELECTIVE VAPOR DEPOSITION PROCESS FOR ADDITIVE MANUFACTURING

A selective vapor deposition method is provided and includes evaporating a precursor material in a low vacuum evaporating chamber to produce a precursor vapor, evacuating the precursor vapor into a nozzle of a venturi element and accelerating the precursor vapor through a diffuser of the venturi element and toward a target build surface.

Chuck for chemical vapor deposition systems and related methods therefor
10494714 · 2019-12-03 · ·

The present invention provides chucks having a well that supports rods produced during chemical vapor deposition. The chucks can utilize slats and windows around the well up to which the rod can grow and become supported.

METHOD AND APPARATUS FOR PREPARING BORON NITRIDE NANOTUBES BY HEAT TREATING BORON PRECURSOR PREPARED BY USING AIR-JET
20190337812 · 2019-11-07 ·

A method and apparatus for preparing boron nitride nanotubes (BNNTs) according to an embodiment may ensure mass-production, may increase yield by reducing a production time, and may prepare BNNTs with high purity.

Method to Prevent Grounding from a Silicon Rod to a Plate in Polycrystalline Silicon Reactor
20190337030 · 2019-11-07 ·

A method to prevent groundings of polycrystalline silicon rod holders to a reactor plate by the residual polymer in the following manner: first, providing a polycrystalline silicon reactor having a reactor plate with a plurality of silicon rod holders separated from the reactor plate with an insulation; next establishing an electrical circuit from a ground connection on the reactor plate connected to high potential test equipment to a high voltage probe; and finally completing the electrical circuit by contacting the high voltage probe to the holder. By this method any remaining polymer is physically removed as the polymer burns or is ejected by the energetic release caused by mild arcing from the holder to the reactor plate.

Electrode for depositing polycrystalline silicon
11965264 · 2024-04-23 · ·

Electrode assemblies useful, inter alia, for mounting thin rods in Siemens reactors for manufacture of polysilicon, have a base segment which receives a holder segment, and an insert, interfacial surface(s) of which have depressions and/or elevations which reduce contact surface area, allowing the holder, base segment, insert, and optional intermediate segments to be constructed of materials having different thermal conductivities.

Method and system for growth of graphene nanostripes by plasma enhanced chemical vapor deposition

A method of forming graphene nanostripes includes providing a substrate comprising at least one of copper foil or nickel foam and subjecting the substrate to a reduced pressure environment in a processing chamber. The method also includes providing methane gas and 1,2-dichlorobenzene (1,2-DCB) gas, flowing the methane gas and the 1,2-DCB into the processing chamber, and establishing a partial pressure ratio of 1,2-DCB gas to methane gas in the processing chamber. The partial pressure ratio is between 0 and 3. The method further includes generating a plasma, thereafter, exposing the at least a portion of the substrate to the methane gas, the 1,2-DCB gas, and the plasma, and growing the graphene nanostripes coupled to the at least a portion of the substrate.

METHOD AND APPARATUS FOR PREPARING BORON NITRIDE NANOTUBES BY HEAT TREATING BORON PRECURSOR PREPARED BY USING AIR-JET
20190322536 · 2019-10-24 ·

A method and apparatus for preparing boron nitride nanotubes (BNNTs) according to an embodiment may ensure mass-production, may increase yield by reducing a production time, and may prepare BNNTs with high purity.

Reactor filament assembly with enhanced misalignment tolerance
10450649 · 2019-10-22 · ·

A tubular filament assembly for a CVD silicon deposition reactor is disclosed that provides consistent, low resistance connections to vertical tubular filaments by forming slidable connections between upper and/or lower ends of the tubular filaments and shaped elements cooperative with the bridge and/or the support chucks, so that the connections are insensitive at least to small variations in tilt angle of the vertical filaments and/or the horizontal bridge. The shaped elements can be incorporated into or separate and cooperative with the bridge and/or the chucks. Various embodiments are described.

Boron filled hybrid nanotubes
10453583 · 2019-10-22 ·

A boron filled hybrid nanotube and a method for producing and rendering boron filled hybrid nanotubes suitable for applications are provided. A mixture of a boron containing nanowire producing compound and catalysts is prepared and ground for a predetermined time period. The ground mixture is subjected to a vapor deposition process including passing an inert gas over the ground mixture after adding a nanotube producing compound to the ground mixture or after passing a reactant gas on the ground mixture in a reactor at a configurable reaction temperature and a configurable reaction pressure for a configurable reaction time to produce the boron filled hybrid nanotubes with enhanced mechanical, thermal and electrical properties. Each boron filled hybrid nanotube includes one or more boron based nanowires embedded within one or more single walled or multi-walled nanotubes. The boron filled hybrid nanotubes are further purified and functionalized using acids, and/or bases, and/or surfactants.