This disclosure provides a vapor-liquid reaction device including a vapor-liquid reaction chamber and a projecting member. The vapor-liquid reaction chamber holds a molten metal in a lower portion of an internal space of the vapor-liquid reaction chamber.

A CaTiO.sub.3—TiO.sub.2 composite electrode and method of making is described. The composite electrode comprises a substrate with an average 2-12 μm thick layer of CaTiO.sub.3—TiO.sub.2 composite particles having average diameters of 0.2-2.2 μm. The method of making the composite electrode involves contacting the substrate with an aerosol comprising a solvent, a calcium complex, and a titanium complex. The CaTiO.sub.3—TiO.sub.2 composite electrode is capable of being used in a photoelectrochemical cell for water splitting.

One or more embodiments described herein generally relate to methods and systems for forming films on substrates in semiconductor processes. In embodiments described herein, a process system includes different materials each contained in separate ampoules. Each material is flowed into a separate portion of a showerhead contained within a process chamber via a heated gas line. From the showerhead, each material is flowed on to a substrate that sits on the surface of a rotating pedestal. Controlling the mass flow rate out of the showerhead and the rotation rate of the pedestal helps result in films with desirable material domain sizes to be deposited on the substrate.

One or more embodiments described herein generally relate to methods and systems for forming films on substrates in semiconductor processes. In embodiments described herein, a process system includes different materials each contained in separate ampoules. Each material is flowed into a separate portion of a showerhead contained within a process chamber via a heated gas line. From the showerhead, each material is flowed on to a substrate that sits on the surface of a rotating pedestal. Controlling the mass flow rate out of the showerhead and the rotation rate of the pedestal helps result in films with desirable material domain sizes to be deposited on the substrate.

A method for producing a liquid transport apparatus is disclosed. The liquid transport apparatus includes a pressure chamber plate, a ceramics layer formed on a surface of the pressure chamber plate, a piezoelectric layer formed on the ceramics layer, and an electrode formed on the piezoelectric layer. The ceramics layer is formed by heating an insulating ceramic material at a temperature lower than an annealing temperature of the piezoelectric layer. Accordingly, the atoms of the pressure chamber plate are suppressed from being diffused into the piezoelectric layer.

A method or process for producing non-aggregated carbon-coated silicon particles and lithium-ion batteries utilizing the same. The process includes providing or producing a dry mixture by mixing silicon particles and polyacrylonitrile present in solid form. Thermally decomposing the polyacrylonitrile present in solid form in the dry mixture to form gaseous carbon precursors. Forming gaseous carbon precursors that are carbonized in the presence of the silicon particles by CVD processes (chemical vapor deposition, chemical gas phase deposition). Where the non-aggregated carbon-coated silicon particles have an average particle diameters d.sub.50 of from 1 to 15 μm and containing ≤10% by weight of carbon and ≥90% by weight of silicon, each based on the total weight of the carbon-coated silicon particles.

A method or process for producing non-aggregated carbon-coated silicon particles and lithium-ion batteries utilizing the same. The process includes providing or producing a dry mixture by mixing silicon particles and polyacrylonitrile present in solid form. Thermally decomposing the polyacrylonitrile present in solid form in the dry mixture to form gaseous carbon precursors. Forming gaseous carbon precursors that are carbonized in the presence of the silicon particles by CVD processes (chemical vapor deposition, chemical gas phase deposition). Where the non-aggregated carbon-coated silicon particles have an average particle diameters d.sub.50 of from 1 to 15 μm and containing ≤10% by weight of carbon and ≥90% by weight of silicon, each based on the total weight of the carbon-coated silicon particles.

Provided is a mist generator including: a container that stores a liquid; a gas supply unit that supplies a gas into the container; and an electrode that generates plasma of the gas between the electrode and the liquid, where the supply direction of the gas fed from the gas supply opening of the gas supply unit is different from a direction in which gravity acts.

Provided is a mist generator including: a container that stores a liquid; a gas supply unit that supplies a gas into the container; and an electrode that generates plasma of the gas between the electrode and the liquid, where the supply direction of the gas fed from the gas supply opening of the gas supply unit is different from a direction in which gravity acts.

Apparatus and methods for supplying a vapor to a processing chamber such as a film deposition chamber are described. The vapor delivery apparatus comprises an inlet conduit and an outlet conduit, in fluid communication with an ampoule. A needle valve device restricts flow through the outlet conduit.