A coating system configured to be applied to a thermal barrier coating of an article includes an infiltration coating configured to be applied to the thermal barrier coating. The infiltration coating infiltrates at least some pores of the thermal barrier coating. The infiltration coating decomposes within the at least some pores of the thermal barrier coating to coat a portion of the at least some pores of the thermal barrier coating. The infiltration coating reduces a porosity of the thermal barrier coating. The coating system also includes a reactive phase spray formulation coat configured to be applied to the thermal barrier coating. The reactive phase spray formulation coating reacts with dust deposits on the thermal barrier coating

In some embodiments, a semiconductor fabrication tool is provided. The semiconductor fabrication tool includes a first processing zone having a first ambient environment and a second processing zone having a second ambient environment disposed at different location inside a processing chamber. A first exhaust port and a second exhaust port are disposed in the first and second processing zones, respectively. A first exhaust pipe couples the first exhaust port to a first individual exhaust output. A second exhaust pipe couples the second exhaust port to a second individual exhaust output, where the second exhaust pipe is separate from the first exhaust pipe. A first adjustable fluid control element controls the first ambient environment. A second adjustable fluid control element controls the second ambient environment, where the first adjustable fluid control element and the second adjustable fluid control element are independently adjustable.

A material contains open pores in which the channels and pores that are internally coated with at least one layer of phosphorus-containing alumina. Such material is formed by infiltrating a porous material one or more times with a non-colloidal, low-viscosity liquid coating precursor, drying, and curing the coating precursor to form a phosphorus-containing alumina layer within pores of the material.

A coating composition and a method is used to coat metallic substrates for corrosion resistance. The coating composition includes acid, metal acetate, organosilane and water. The method includes steps of depositing the composition on an aluminum or aluminum alloy substrate and allowing the composition to dry to form a sol-gel coating on the substrate.

An anti-corrosion coating to protect against corrosion, comprising: a high-density protective coating on a substrate which is prone to corrosion, preferably metals and/or alloys thereof, containing pre-condensed coat-forming alkoxysilane precursors, wherein the molecules of the pre-condensed coat-forming alkoxysilane precursors are built up from monomer units selected from the group formed by coat-forming alkoxysilane precursors, wherein the molecules of the pre-condensed coat-forming alkoxysilane precursors are cross-linked with each other, wherein the high-density protective coating has a coating thickness of at least 50 μm. The high-density protective coating formed by an inorganic-organic hybrid material, which is preferably produced without solvents (i.e. without the addition of solvents, in particular organic solvents), is comprised of at least one coat-forming alkoxysilane precursor, in particular selected from the group formed by trialkoxysilane precursors.

An ultra dense and ultra low power microhotplates using silica aerogel and method of making the same, comprising creating a sol-gel by impregnation of ethanol with functional colloidal alcogel particles is described. The technique further comprises forming tiny aerogel particles on the wafer and networking the particles together just by exposure to air during spin coating. The novelty of this technique is not limited to the processing of thin film and thick film silica aerogel.

A method of forming a corrosion-resistant ceramic coating on a metallic substrate, the method comprising providing a passivation layer on a surface of the metallic substrate by electrochemical passivation of the metallic substrate under a first electrical current and using a first electrically conducting solution; and providing the corrosion-resistant ceramic coating on an outermost surface of the metallic substrate, the outermost surface in use adapted to be exposed to a corrosive environment, by plasma electrolytic oxidation of the metallic substrate with the passivation layer, in a second electrically conducting solution and under a second electrical current having a discharge voltage. The first and the second electrically conducting solutions comprise a tetrafluoroborate compound.

An alkoxysilane is contacted with water and an inorganic acid to form a first composition. A zirconium alkoxide is contacted with an organic acid to form a second composition. One or more alkoxysilanes and an organic acid are contacted with a mixture of the first and second compositions to form a sol-gel composition, to which a photoinitiator is added. The sol-gel composition has a ratio of a number of moles of silicon to a number of moles of zirconium (n.sub.Si/n.sub.Zr) ranging from about 2 to about 10. The sol-gel composition is applied on a substrate (e.g., an aluminum alloy substrate) multiple times to form multiple sol-gel layers, and at least one of the sol-gel layers is cured by UV radiation. The multiple sol-gel layers are then thermally cured.

Systems and methods electronic barcoding of particles. The methods comprise: performing operations by a spin coater to spin coat a single layer of particles onto a substrate; performing operations by a heat applicator to apply heat to the substrate so as to evaporate a liquid; and performing operations by at least one material depositor to transform the particles into Electronically Barcoded Particles (“EBPs”). EBPs are fabricated by: coating a portion of each said particle of the particles with a first conductive layer; depositing an insulative layer on the first conductive layer; and/or depositing a second conductive layer on the insulative layer so as to form a parallel plate capacitor on the particle. The parallel plate capacitor is tuned so that the particle has a capacitance that is different than the capacitances of other ones of the electronically barcoded particles.

A method is disclosed of forming core-shell iron oxide-polymer nanofiber composites. The method includes synthesizing composite nanofibers of polyacrylonitrile (PAN) with embedded hematite (α-Fe.sub.2O.sub.3) nanoparticles via a single-pot electrospinning synthesis; and generating a core-shell nanofiber composite through a subsequent hydrothermal growth of α-Fe.sub.2O.sub.3 nanostructures on the composite nanofibers of polyacrylonitrile (PAN) with the embedded hematite (α-Fe.sub.2O.sub.3) nanoparticles.