Provided is a cutting tool including a base material and a coating layer provided on the base material, the coating layer including a titanium carbonitride layer provided on the base material, an intermediate layer provided on the titanium carbonitride layer in contact therewith, and an alumina layer provided on the intermediate layer in contact therewith, the intermediate layer being composed of a compound made of titanium, carbon, oxygen, and nitrogen, the intermediate layer having a thickness of more than 1 μm, when P.sub.O1 atomic % represents an atomic ratio of the oxygen in an interface between the intermediate layer and the alumina layer, and P.sub.O2 atomic % represents an atomic ratio of the oxygen at a point A away from the interface by 1 μm on a side of the intermediate layer, a ratio P.sub.O1/P.sub.O2 of the P.sub.O1 to the P.sub.O2 being more than or equal to 1.03.

Methods and apparatus for processing a substrate are provided herein. For example, a method of processing a substrate in an integrated tool comprising a physical vapor deposition chamber and a thermal atomic layer deposition chamber comprises depositing, in the physical vapor deposition chamber, a bottom layer of titanium nitride on the substrate to a thickness of about 10 nm to about 80 nm, transferring, without vacuum break, the substrate from the physical vapor deposition chamber to the thermal atomic layer deposition chamber for depositing a nanolaminate layer of high-k material atop the bottom layer of titanium nitride to a thickness of about 2 nm to about 10 nm, and transferring, without vacuum break, the substrate from the thermal atomic layer deposition chamber to the physical vapor deposition chamber for depositing a top layer of titanium nitride atop the nanolaminate layer of high-k material to a thickness of about 10 nm to about 80 nm.

In one aspect, coatings are described herein employing composite architectures providing high aluminum content and high hardness for various cutting applications. For example, a coated cutting tool comprises a substrate and a coating comprising a refractory layer deposited by physical vapor deposition adhered to the substrate, the refractory layer comprising a plurality of sublayer groups, a sublayer group comprising a titanium aluminum nitride sublayer and an adjacent composite sublayer comprising alternating nanolayers of titanium silicon nitride and titanium aluminum nitride.

A surface-coated cutting tool has a hard coating layer and a tool body, which is coated with a lower layer including a TiCN layer having at least an NaCl type face-centered cubic crystal structure and an upper layer formed of a TiAlCN layer having a single phase crystal structure of NaCl type face-centered cubic crystals or a mixed phase crystal structure of NaCl type face-centered cubic crystals and hexagonal crystals. The tool body is further coated with an outermost surface layer including an Al.sub.2O.sub.3 layer, when the layer of a complex nitride or complex carbonitride of Ti and Al is expressed by the composition formula: (Ti.sub.1-xAl.sub.x)(C.sub.yN.sub.1-y), the average amount Xave of Al in Ti and Al and the average amount Yave of C in C and N (both Xave and Yave are atomic ratios) respectively satisfy 0.60≦Xave≦0.95 and 0≦Yave≦0.005.

A composite article includes a substrate and a powder-derived composite coating on the substrate. The composite coating includes discrete regions of a first material and discrete regions of a second material. At least one of the first material or the second material is a chemical precursor.

Disclosed are devices, materials, systems, and methods, including a device that includes one or more structural components, at least one of the one or more structural components comprising substantially HfO.sub.2—TiO.sub.2 material. Also disclosed is a hemispherical resonator that includes a hemisphere including one or more structural components with at least one of the one or more structural components comprising substantially HfO.sub.2—TiO.sub.2 material, a forcer electrode configured to apply an electrical force on the hemisphere to cause the hemisphere to oscillate, and one or more sensor electrodes disposed in proximity to the hemisphere and configured to sense an orientation of a vibration pattern of the hemispherical resonator gyroscope.

A turbomachine component having a main body and a multilayer coating, which is applied directly to the main body is provided. The multilayer coating is at least 5 μm and at most 35 μm thick and has a plurality of layers applied directly one on top of the other, wherein the layer applied directly to the main body is an adhesion promoting layer, which comprises chromium nitride, and at least one of the remaining layers comprises a hard material.

A cutting tool includes a base body and a coating applied thereto. For providing a cutting tool, having both a hard coating that also exhibits fracture toughness, the coating includes at least one oxide layer deposited in the PVD process, consisting of at least 10 alternating single coats of Al.sub.2O.sub.3 and (Al.sub.x, Me.sub.1-x).sub.2O.sub.3, where 0<x<1, wherein Me is selected from one or more of the group of Si, Ti, V, Zr, Mg, Fe, B, Gd, La and Cr.

A coated cutting tool includes a substrate of cemented carbide, cermet, ceramics, steel or cubic boron nitride and a multi-layered wear resistant coating. The multi-layered wear resistant coating has a total thickness from 5 to 25 μm and includes refractory coating layers deposited by chemical vapour deposition (CVD) or moderate temperature chemical vapour deposition (MT-CVD). The multi-layered wear resistant coating has at least one pair of layers (a) and (b), with layer (b) being deposited immediately on top of layer (a). Layer (a) is a layer of aluminium nitride having hexagonal crystal structure (h-AlN) and a thickness from 10 nm to 750 nm. Layer (b) is a layer of titanium aluminium nitride or titanium aluminium carbonitride represented by the general formula Ti.sub.1-xAl.sub.xC.sub.yN.sub.z with 0.4≤x≤0.95, 0≤y≤0.10 and 0.85≤z≤1.15, having a thickness from 0.5 μm to 15 μm, and at least 90% of the Ti.sub.1-xAl.sub.xC.sub.yN.sub.z of layer (b) has a face-centered cubic (fcc) crystal structure.

The hard coating layer includes at least a complex nitride or carbonitride layer (2) expressed by a composition formula: (Ti.sub.1-x-yAl.sub.xMe.sub.y)(C.sub.zN.sub.1-z), Me being an element selected from Si, Zr, B, V, and Cr. The average content ratio X, the average content ratio Y, and the average content ratio Z satisfy 0.60≦x.sub.avg, 0.005≦y.sub.avg≦0.10, 0≦z.sub.avg≦0.005, and 0.605≦x.sub.avg+y.sub.avg≦0.95. There are crystal grains having a cubic structure in the crystal grains constituting the complex nitride or carbonitride layer (2). A predetermined periodic content ratio change of Ti, Al and Me exists in the crystal grains having the cubic structure.