The purpose of the present invention is to provide a coated metal mold having superior durability and adhesion resistance over a usage range from cold to warm/hot; and a method for manufacturing the coated metal mold. The coated metal mold is characterized by having a hard coating on a surface, wherein the hard coating includes an A layer formed from a nitride and having a film thickness not smaller than 5 and a B layer formed of a diamond-like carbon coating, the B layer is disposed closer to the outer surface side than the A layer, the surface of the B layer has an arithmetic mean roughness Ra0.2 a maximum height Rz2.0 and a skewness Rsk<0.

An object including a. a fiber reinforced plastic and b. a ceramic material, wherein the ceramic material is prepared by plasma electrolytic oxidation of aluminium. A process for the preparation of the object, including the steps of a. providing aluminium, a fiber reinforced plastic and a resin, or providing aluminium and a precursor of a fiber reinforced plastic comprising fibers and a resin, b. treating, at least partially, the aluminium with plasma electrolytic oxidation to provide a ceramic material, c. attaching the ceramic material to the fiber reinforced plastic with the resin, or attaching the ceramic material to the fibers with the resin, d. curing the resin to provide the object including the fiber reinforced plastic and the ceramic material at least partly bound to the fiber reinforced plastic.

A method of manufacturing an article comprises providing an article. An ion assisted deposition (IAD) process is performed to deposit a second protective layer over a first protective layer. The second protective layer is a plasma resistant rare earth oxide having a thickness of less than 50 microns and a porosity of less than 1%. The second protective layer seals a plurality of cracks and pores of the first protective layer.

A system and method of fabricating a percussion tool that includes one or more surfaces modified using the ferritic nitrocarburization process. The percussion tool includes a piston positioned in sliding contact within a casing. The piston includes an inner wall and an outer wall, where the inner wall defines a passageway extending longitudinally therethrough. The outer wall is positioned in close fitting relationship with an internal surface of the casing. One or more surfaces of at least one of the casing's internal surface and/or the piston's outer wall are modified using the ferritic nitrocarburization process.

A coating on a surface of a metallic substrate which includes one or more layers of DLC (Diamond-Like Carbon) containing silicon and oxygen. The coatings optionally have an intermediate layer, such as a nitrocarburized layer. A method of producing a non-stick coating on a surface of a metallic material. The method includes producing one of nitriding layer, nitrocarburization layer, and carburization layer on the surface of a metallic material by one of ion plasma nitriding, gas nitriding, and salt bath nitriding; and producing one or more layers of DLC, each layer containing silicon and oxygen on top of and in contact with the nitrocarburized layer by a plasma enhanced chemical vapor deposition (PECVD) vacuum process. An article containing on its surface one or more layers of DLC containing silicon and oxygen, and optionally an intermediate layer.

A method for preparing thin double-structured composite corrosion resistant and/or passivating coatings that consist of a thin metal oxide-hydroxide subcoating prepared by anodizing the metal substrate materials near-surface part and then provided with an atomic layer deposition (ALD) topmost nanocoating, of e.g. oxide, nitride, carbonate, carbide etc. or their mixes or laminates, or laminates with ceramic and metallic layers, or laminates with inorganic or organic polymers and ceramic layers.

A method of manufacturing an article comprises providing an article. An ion assisted deposition (IAD) process is performed to deposit a second protective layer over a first protective layer. The second protective layer is a plasma resistant rare earth oxide having a thickness of less than 50 microns and a porosity of less than 1%. The second protective layer seals a plurality of cracks and pores of the first protective layer.

A method of forming a silicon nitride film on a substrate in a vacuum vessel, includes forming the silicon nitride film by depositing a layer of reaction product by repeating a cycle a plurality of times. The cycle includes a first process of supplying a gas of a silicon raw material to the substrate to adsorb the silicon raw material to the substrate, subsequently, a second process of supplying a gas of ammonia in a non-plasma state to the substrate to physically adsorb the gas of the ammonia to the substrate, and subsequently, a third process of supplying active species obtained by converting a plasma forming gas containing a hydrogen gas for forming plasma into plasma to the substrate and causing the ammonia physically adsorbed to the substrate to react with the silicon raw material to form the layer of reaction product.

A rotary compressor includes: a compressing unit that includes an annular cylinder, an end plate, an annular piston which is fit in an eccentric portion of a rotation shaft, and a vane which protrudes from the inside of a vane groove of the cylinder to the inside of an operation chamber, comes into contact with the annular piston, and partitions the operation chamber into an inlet chamber and a compression chamber. The vane is formed of steel and has a diamond-like carbon layer formed on a sliding surface with respect to the annular piston. The annular piston is formed of NiCrMo cast iron to which 0.15 wt % to 0.45 wt % of phosphorus is added, or is formed of cast iron or steel and has an iron nitride layer formed on an outer circumferential surface thereof.

A chamber component comprises a body, a first protective layer and a conformal second protective layer over the first protective layer. The first protective layer comprises a plasma resistant ceramic, has a thickness of greater than approximately 50 microns and comprises a plurality of cracks and pores. The conformal second protective layer comprises a plasma resistant rare earth oxide, has a thickness of less than 50 microns, has a porosity of less than 1%, and seals the plurality of cracks and pores of the first protective layer.