C23C28/44

Extreme Ultraviolet Mask Absorber Materials

Extreme ultraviolet (EUV) mask blanks, methods for their manufacture and production systems therefor are disclosed. The EUV mask blanks comprise a substrate; a multilayer stack of reflective layers on the substrate; a capping layer on the multilayer stack of reflecting layers; and an absorber layer on the capping layer, the absorber layer made from an alloy of tantalum and nickel.

THERMALLY CONDUCTIVE AND PROTECTIVE COATING FOR ELECTRONIC DEVICE
20200019750 · 2020-01-16 · ·

A protective coating layer, an electronic device including such a protective coating layer, and the methods of making the same are provided. The electronic device includes a substrate, a thin film circuit layer disposed over the substrate, and a protective coating layer disposed over the thin film circuit layer. The protective coating layer includes a first coating and a second coating disposed over the first coating. Each coating has a cross-plane thermal conductivity in a direction normal to a respective coating surface equal to or higher than 0.5 W/(m*K). The first coating and the second coating have different crystal structures, or different crystalline orientations, or different compositions, or a combination thereof to provide different nanoindentation hardness. The first coating has a hardness lower than that of the second coating.

COMPOSITE COATING LAYER HAVING IMPROVED EROSION RESISTANCE AND TURBINE COMPONENT INCLUDING THE SAME
20190390556 · 2019-12-26 ·

Provided are a composite coating layer having improved erosion resistance and a turbine component including the same. The composite coating layer may include a TiN layer; and a TiAlN layer, wherein the composite coating layer is formed by alternately stacking the TiN layer and the TiAlN layer, and a total number of layers including the TiN layer and the TiAlN layer is 6 to 18, whereby the composite coating layer is capable of exhibiting high erosion resistance, high hardness, superior high-cycle fatigue characteristics and low surface roughness. Moreover, the turbine component including the composite coating layer is also capable of manifesting improved properties, such as high erosion resistance, high hardness, superior high-cycle fatigue characteristics and low roughness, thus remarkably increasing lifespan characteristics.

Metal and metal-derived films

Embodiments described herein relate to methods and materials for fabricating semiconductor device structures. In one example, a metal film stack includes a plurality of metal containing films and a plurality of metal derived films arranged in an alternating manner. In another example, a metal film stack includes a plurality of metal containing films which are modified into metal derived films. In certain embodiments, the metal film stacks are used in oxide/metal/oxide/metal (OMOM) structures for memory devices.

WEAR RESISTANT COATING PRODUCED FROM AT LEAST TWO DIFFERENT ALCR-BASED TARGETS
20240102144 · 2024-03-28 ·

Coating system deposited on a surface of a substrate including an under coating film, an interjacent coating film deposited as a multi-layered film, including a plurality of A-layers and a plurality of B-layers deposited alternating one on each other forming a A/B/A/B/A . . . architecture, the A-layers including aluminium chromium and optionally one or more dopant elements and the B-layers including aluminium chromium nitride and one or more dopant elements.

Coated cutting tool
11931811 · 2024-03-19 · ·

A coated cutting tool comprising a substrate containing a cubic boron nitride-containing sintered body, and a coating layer formed on the substrate, wherein the coating layer comprises a lowermost layer and an alternating laminate structure in this order, the lowermost layer comprises (Al.sub.1-xCr.sub.x)N, an average thickness of the lowermost layer is 0.01 ?m or more and 0.2 ?m or less, the alternating laminate structure includes mutually different two kinds of compound layers of a first compound layer containing (Al.sub.1-y1Cr.sub.y1)N and a second compound layer containing (Al.sub.1-y2Cr.sub.y2)N alternately laminated repeatedly twice or more, an average thickness of the entire alternating laminate structure is 0.1 ?m or more and 1.2 ?m or less, an average thickness of the entire coating layer is 0.2 ?m or more and 1.3 ?m or less, and a compressive residual stress at the cubic crystal (111) plane is 3.0 GPa or less.

COATED CUTTING TOOL
20240075534 · 2024-03-07 ·

A coated cutting tool having excellent wear resistance and controlled brittleness is provided. An embodiment of the present disclosure provides a coated cutting tool including: a substrate; and a cutting layer disposed on the substrate, wherein: the cutting layer includes a brittleness suppressing layer and a wear-resistant layer disposed on the brittleness suppressing layer; the substrate includes a hard alloy body such as cemented carbide, cermet, ceramic, cubic boron nitride-based materials, or high-speed steel; the brittleness suppressing layer includes a first layer and a second layer disposed on the first layer; the first layer and the second layer each independently includes any one of (Al.sub.bTi.sub.1-b)X (where 0.6<b<0.8, and X is at least one selected from N, C, CN, NO, CO, and CNO) and (Ti.sub.cAl.sub.1-c)X (where 0.4<c?0.5, and X is at least one selected from N, C, CN, NO, CO, and CNO); and the first layer and the second layer include materials different from each other.

COATING SYSTEM FOR PLASTIC PROCESSING APPLICATIONS

A multilayer coating exhibits good corrosion resistance and good abrasion resistance. The multilayer coating includes layers A and layers B deposited forming a sequence of the type . . . A/B/A/B/A . . . , with the layers A being CrN-based layers or CrN layers and the layers B being CrON-based layers or CrON layers. The multilayer coating exhibits a modulated ratio of the thicknesses of the A layers and B layers, in a manner that the multilayer coating comprises at least two different coating portions along the whole multilayer coating thickness, with differently adjusted ratio of the thicknesses of the A layers and B layers.

METHOD FOR COATING A METALLIC SURFACE

The invention relates to a method for providing a metallic surface with a coating by applying one or more layers of one or more metal-containing slips to the surface. At least one of the slips comprises a coloring and/or color-imparting substance which has no influence on the properties of the completed coating and/or can be decomposed by thermal treatment, and the local thickness of the applied slip layer is determined on the basis of the local color intensity of the layer.

Coated cutting tool
10471516 · 2019-11-12 · ·

A coated cutting tool comprises a substrate and a coating layer and the coating layer comprises a first laminate structure and a second laminate structure and each of the first laminate structure and the second laminate structure is laminated in an alternating manner and the number of laminations is three or more and one compound layer and other compound layer of the compound layers of two kinds in the each of the first laminate structure and the second laminate structure has a specific composition and the first laminate structure and each of the second laminate structure satisfies a specific condition and an average thickness of each of the layers constituting the first laminate structure and the second laminate structure and an average thickness of the coating layer is respectively a specific one.