Patent classifications
C23F1/04
LIGHT SHIELDING PLATE, CAMERA UNIT, ELECTRONIC DEVICE, AND METHOD OF PRODUCING THE LIGHT SHIELDING PLATE
A light shielding plate includes a front surface that is located on a light incident side, a rear surface that is a surface facing away from the front surface, and an aperture that penetrates through the front surface and the rear surface. The aperture has a first aperture portion and a second aperture portion that is connected to the first aperture portion via a central opening, and the first aperture portion extends from a rear opening in the rear surface toward the central opening and has a shape tapered from the rear surface toward the front surface. The second aperture portion extends from a rear opening in the front surface to the central opening and has a shape tapered from the front surface toward the rear surface. The front opening is larger than the rear opening.
Dose-based end-pointing for low-kV FIB milling in TEM sample preparation
A method, system, and computer-readable medium for forming transmission electron microscopy sample lamellae using a focused ion beam including directing a high energy focused ion beam toward a bulk volume of material; milling away the unwanted volume of material to produce an unfinished sample lamella with one or more exposed faces having a damage layer; characterizing the removal rate of the focused ion beam; subsequent to characterizing the removal rate, directing a low energy focused ion beam toward the unfinished sample lamella for a predetermined milling time to deliver a specified dose of ions per area from the low energy focused ion beam; and milling the unfinished sample lamella with the low energy focused ion beam to remove at least a portion of the damage layer to produce the finished sample lamella including at least a portion of the feature of interest.
Dose-based end-pointing for low-kV FIB milling in TEM sample preparation
A method, system, and computer-readable medium for forming transmission electron microscopy sample lamellae using a focused ion beam including directing a high energy focused ion beam toward a bulk volume of material; milling away the unwanted volume of material to produce an unfinished sample lamella with one or more exposed faces having a damage layer; characterizing the removal rate of the focused ion beam; subsequent to characterizing the removal rate, directing a low energy focused ion beam toward the unfinished sample lamella for a predetermined milling time to deliver a specified dose of ions per area from the low energy focused ion beam; and milling the unfinished sample lamella with the low energy focused ion beam to remove at least a portion of the damage layer to produce the finished sample lamella including at least a portion of the feature of interest.
METHOD FOR PRODUCING BASE FOR METAL MASKS, METHOD FOR PRODUCING METAL MASK FOR VAPOR DEPOSITION, BASE FOR METAL MASKS, AND METAL MASK FOR VAPOR DEPOSITION
A rolled metal sheet includes an obverse surface and a reverse surface that is a surface located opposite to the obverse surface. At least either one of the obverse surface and the reverse surface is a processing object. A method for manufacturing a metal mask substrate includes reducing a thickness of the rolled metal sheet to 10 μm or less by etching the processing object by 3 μm or more by use of an acidic etching liquid, and roughening the processing object so that the processing object becomes a resist formation surface that has a surface roughness Rz of 0.2 μm or more, thereby obtaining a metal mask sheet.
Artificial intelligence-enabled preparation end-pointing
Methods and systems for implementing artificial intelligence enabled preparation end-pointing are disclosed. An example method at least includes obtaining an image of a surface of a sample, the sample including a plurality of features, analyzing the image to determine whether an end point has been reached, the end point based on a feature of interest out of the plurality of features observable in the image, and based on the end point not being reached, removing a layer of material from the surface of the sample.
Process for surface treatment of aluminum or aluminum alloys by an alkaline chemical bath
A process for surface treatment of semi-finished aluminum products is provided. The process includes preparing an aqueous solution of sodium hydroxide (NaOH) and dissolved metallic aluminum, kept in suspension by adding complexing agents including gluconate and sorbitol, and placing a semi-finished aluminum product in contact with the aqueous solution, maintaining temperature of the aqueous solution within a predetermined range.
Process for surface treatment of aluminum or aluminum alloys by an alkaline chemical bath
A process for surface treatment of semi-finished aluminum products is provided. The process includes preparing an aqueous solution of sodium hydroxide (NaOH) and dissolved metallic aluminum, kept in suspension by adding complexing agents including gluconate and sorbitol, and placing a semi-finished aluminum product in contact with the aqueous solution, maintaining temperature of the aqueous solution within a predetermined range.
Metal plate, method of manufacturing metal plate, and method of manufacturing mask by using metal plate
A method of inspecting an elongated metal plate is provided, including measuring longitudinal direction metal plate thicknesses, measuring width direction metal plate thicknesses, and selecting the metal plate that satisfies condition (1), (B/A)×100 (%) is 5% or less, A being an average value of the longitudinal direction metal plate thicknesses, and B being obtained by multiplying a standard deviation of the longitudinal direction metal plate thicknesses by 3, and that satisfies condition (2), (C/X)×100 (%) is 3% or less, C being a value obtained by multiplying a standard deviation of the width direction metal plate thicknesses by 3, and X being a central portion width direction metal plate thickness obtained when the width direction metal plate thicknesses are measured to calculate the standard deviation of the metal plate thicknesses in the width direction.
METAL PLATE
The object of the present invention is to provide a metal plate capable of manufacturing a deposition mask in which dispersion of positions of through-holes is restrained. A thermal recovery rate is defined as parts per million of a difference a distance between to measurement points on a sample before a heat treatment and a distance therebetween after the heat treatment, relative to the distance therebetween before the heat treatment. In this case, an average value of the thermal recovery rates of the respective samples is not less than −10 ppm and not more than +10 ppm, and (2) a dispersion of the thermal recovery rates of the respective samples is not more than 20 ppm.
Metal plate, deposition mask, and manufacturing method therefor
Discussed is a deposition mask including a metal plate having a first surface and a second surface opposite to the first surface, wherein the metal plate including an invar, wherein the metal plate includes a plurality of through-hole, wherein the through-hole includes a first surface hole forming in the first surface, a second surface hole forming in the second surface, and a connecting part through which the first surface hole and the second surface hole communicate with each other, and wherein an angle formed by a virtual line connecting the end of the connecting part and the end of the second surface hole, and a virtual line extending in a direction parallel to the second face from the end of the second surface hole is 30 to 60 degrees.