C30B31/10

Method of decomposing quartz sample, method of analyzing metal contamination of quartz sample, and method of manufacturing quartz member
11421342 · 2022-08-23 · ·

Provided is a method of decomposing a quartz sample, which includes contacting a liquid in which at least a part of a quartz sample to be analyzed is immersed with a gas generated from a mixed acid to decompose at least a part of the quartz sample, wherein the liquid is a liquid containing at least water; and the mixed acid is a mixed acid of hydrogen fluoride and sulfuric acid, and a mole fraction of sulfuric acid in the mixed acid ranges from 0.07 to 0.40.

METHOD FOR DEPOSITING LOW TEMPERATURE PHOSPHOROUS-DOPED SILICON
20210254238 · 2021-08-19 ·

Methods and devices for low-temperature deposition of phosphorous-doped silicon layers. Disilane is used as a silicon precursor, and nitrogen or a noble gas is used as a carrier gas. Phosphine is a suitable phosphorous precursor.

METHOD FOR DEPOSITING LOW TEMPERATURE PHOSPHOROUS-DOPED SILICON
20210254238 · 2021-08-19 ·

Methods and devices for low-temperature deposition of phosphorous-doped silicon layers. Disilane is used as a silicon precursor, and nitrogen or a noble gas is used as a carrier gas. Phosphine is a suitable phosphorous precursor.

Process chamber with resistive heating

A process chamber which may be operated as follows: mounting substrates in a substrate carrier; loading the substrate carrier into a vacuum chamber and mating the substrate carrier with an upper gas manifold and a lower gas manifold; providing and maintaining a vacuum environment within the vacuum chamber; making electrical contact to an at least one electrically-resistive heater; heating the substrates to a process temperature by flowing current through the at least one electrically-resistive heater; and while heating the substrates, flowing process gas through odd numbered channels from the upper gas manifold to the lower gas manifold, and simultaneously flowing process gas through even numbered channels from the lower gas manifold to the upper gas manifold; wherein the process gas comprises an inert gas and the substrates are being thermally annealed, or wherein the process gas is a dopant gas and the substrates are being doped.

APPARATUS AND METHODS FOR THE MANUFACTURE OF SYNTHETIC DIAMONDS
20200376454 · 2020-12-03 ·

An apparatus for the manufacture of synthetic diamonds includes a pressure vessel having a chamber therein, and a body located in the chamber. The pressure vessel and the body are formed of materials having different coefficients of expansion. The coefficient of expansion of the body is greater than the coefficient of expansion of the pressure vessel. The pressure vessel is formed from a material having a melting point in excess of 1327 C. and capable of withstanding a pressure of at least 4.4 Gpa at a temperature of at least 1327 C. The chamber is configured to receive the body, and a carbon source, the apparatus further comprising a heating means configured to heat at least the body to a temperature at least of 1327 C. The coefficient of expansion of the body is selected such that upon heating thereof to at least 1327 C. the pressure exerted on the carbon source is at least 4.4 Gpa.

REACTION DEVICE FOR HORIZONTAL BOAT PRODUCTION METHOD
20200002834 · 2020-01-02 ·

The present disclosure provides a reaction device for a horizontal boat production method. The device comprises a closed reaction tube, and a horizontal boat container, wherein the horizontal boat container include a plurality of first-layer horizontal boat containers and a second-layer horizontal boat container superposed on a bracket device provided on at least one of the first-layer horizontal boat containers.

METHOD OF DECOMPOSING QUARTZ SAMPLE, METHOD OF ANALYZING METAL CONTAMINATION OF QUARTZ SAMPLE, AND METHOD OF MANUFACTURING QUARTZ MEMBER
20190368071 · 2019-12-05 · ·

Provided is a method of decomposing a quartz sample, which includes contacting a liquid in which at least a part of a quartz sample to be analyzed is immersed with a gas generated from a mixed acid to decompose at least a part of the quartz sample, wherein the liquid is a liquid containing at least water; and the mixed acid is a mixed acid of hydrogen fluoride and sulfuric acid, and a mole fraction of sulfuric acid in the mixed acid ranges from 0.07 to 0.40.

METHOD OF DECOMPOSING QUARTZ SAMPLE, METHOD OF ANALYZING METAL CONTAMINATION OF QUARTZ SAMPLE, AND METHOD OF MANUFACTURING QUARTZ MEMBER
20190368071 · 2019-12-05 · ·

Provided is a method of decomposing a quartz sample, which includes contacting a liquid in which at least a part of a quartz sample to be analyzed is immersed with a gas generated from a mixed acid to decompose at least a part of the quartz sample, wherein the liquid is a liquid containing at least water; and the mixed acid is a mixed acid of hydrogen fluoride and sulfuric acid, and a mole fraction of sulfuric acid in the mixed acid ranges from 0.07 to 0.40.