An object of the present invention is to provide a composition including hydrogen peroxide, which can be used for semiconductor device manufacturing and which exhibits an excellent storage stability and has a reduced effect of defects on a semiconductor substrate. Further, another object of the present invention is to provide a method for producing the composition including hydrogen peroxide, and a composition reservoir for storing the composition.

The composition of the present invention includes hydrogen peroxide, an acid, and a Fe component, in which a content of the Fe component is 10.sup.5 to 10.sup.2 in terms of mass ratio with respect to the content of the acid.

An object of the present invention is to provide a composition including hydrogen peroxide, which can be used for semiconductor device manufacturing and which exhibits an excellent storage stability and has a reduced effect of defects on a semiconductor substrate. Further, another object of the present invention is to provide a method for producing the composition including hydrogen peroxide, and a composition reservoir for storing the composition.

The composition of the present invention includes hydrogen peroxide, an acid, and a Fe component, in which a content of the Fe component is 10.sup.5 to 10.sup.2 in terms of mass ratio with respect to the content of the acid.

A process for sterilization or disinfection treatment includes: a) obtaining a hydrogen peroxide vapour from an aqueous hydrogen peroxide solution having a dry residue determined at 105? C. of at most 5 ppm and a total content of Fe, Cr, Mn and Ni in the solution of at most 6 ppb as determined by ICP-MS analysis; and b) treating an object to be sterilized or disinfected with the hydrogen peroxide vapour obtained in a).

A process for sterilization or disinfection treatment includes: a) obtaining a hydrogen peroxide vapour from an aqueous hydrogen peroxide solution having a dry residue determined at 105? C. of at most 5 ppm and a total content of Fe, Cr, Mn and Ni in the solution of at most 6 ppb as determined by ICP-MS analysis; and b) treating an object to be sterilized or disinfected with the hydrogen peroxide vapour obtained in a).

The invention provides a micro-interface enhanced oxidation system and an oxidation method for preparing hydrogen peroxide, wherein the micro-interface enhanced oxidation system includes: an oxidation reactor, wherein a top portion of a side surface is provided with a liquid phase pipeline for delivering hydrogenated anthraquinone, and a bottom portion of the side surface is provided with a gas phase pipeline for delivering air; and a liquid distributor, a packing section, a seal pan and a hybrid micro-interface unit that are arranged in order from top to bottom are arranged in the oxidation reactor, wherein the hybrid micro-interface unit comprises a upper-mounted micro-interface generator and a lower-mounted micro-interface generator that are communicated with each other up and down, and the hydrogenated anthraquinone delivered in goes down in turn until being mixed with the air in the hybrid micro-interfacial unit to be dispersed and crushed after being distributed through the liquid distributor.

In the production of hydrogen peroxide, when ketone forms are increased upon conversion from higher alcohol components in organic solvents, such increased levels of ketone forms reduce the water content in a working solution and lead to deterioration of catalytic activity. Moreover, increased levels of ketone forms reduce the solubility of anthrahydroquinone compounds and may cause an obstacle to stable and safe operation in the production of hydrogen peroxide due to crystallization and deposition of the anthrahydroquinone compounds. The object of the present invention is to provide a process in which polar solvent-derived altered substances (ketone forms) in a working solution provided for use in the production of hydrogen peroxide via the anthraquinone process are regenerated into the original alcohol components to thereby improve the production efficiency of hydrogen peroxide. From a working solution which has been used for many years, organic solvent components containing ketone forms are separated by distillation and hydrogenated in the presence of a metal catalyst to regenerate the organic solvent components into the original alcohol components, whereby hydrogen peroxide can be produced more efficiently.

In the production of hydrogen peroxide, when ketone forms are increased upon conversion from higher alcohol components in organic solvents, such increased levels of ketone forms reduce the water content in a working solution and lead to deterioration of catalytic activity. Moreover, increased levels of ketone forms reduce the solubility of anthrahydroquinone compounds and may cause an obstacle to stable and safe operation in the production of hydrogen peroxide due to crystallization and deposition of the anthrahydroquinone compounds. The object of the present invention is to provide a process in which polar solvent-derived altered substances (ketone forms) in a working solution provided for use in the production of hydrogen peroxide via the anthraquinone process are regenerated into the original alcohol components to thereby improve the production efficiency of hydrogen peroxide. From a working solution which has been used for many years, organic solvent components containing ketone forms are separated by distillation and hydrogenated in the presence of a metal catalyst to regenerate the organic solvent components into the original alcohol components, whereby hydrogen peroxide can be produced more efficiently.

The invention provides a micro-interface enhanced oxidation system and an oxidation method for preparing hydrogen peroxide, wherein the micro-interface enhanced oxidation system includes: an oxidation reactor, wherein a top portion of a side surface is provided with a liquid phase pipeline for delivering hydrogenated anthraquinone, and a bottom portion of the side surface is provided with a gas phase pipeline for delivering air; and a liquid distributor, a packing section, a seal pan and a hybrid micro-interface unit that are arranged in order from top to bottom are arranged in the oxidation reactor, wherein the hybrid micro-interface unit comprises a upper-mounted micro-interface generator and a lower-mounted micro-interface generator that are communicated with each other up and down, and the hydrogenated anthraquinone delivered in goes down in turn until being mixed with the air in the hybrid micro-interfacial unit to be dispersed and crushed after being distributed through the liquid distributor.

The invention provides a micro-interface enhanced oxidation system and an oxidation method for preparing hydrogen peroxide, wherein the micro-interface enhanced oxidation system includes: an oxidation reactor, wherein a top portion of a side surface is provided with a liquid phase pipeline for delivering hydrogenated anthraquinone, and a bottom portion of the side surface is provided with a gas phase pipeline for delivering air; and a liquid distributor, a packing section, a seal pan and a hybrid micro-interface unit that are arranged in order from top to bottom are arranged in the oxidation reactor, wherein the hybrid micro-interface unit comprises a upper-mounted micro-interface generator and a lower-mounted micro-interface generator that are communicated with each other up and down, and the hydrogenated anthraquinone delivered in goes down in turn until being mixed with the air in the hybrid micro-interfacial unit to be dispersed and crushed after being distributed through the liquid distributor.

An integrated process for making propene oxide and an alkyl tert-butyl ether comprises dehydrogenating a feed stream comprising propane and iso-butane to provide a stream comprising propene, iso-butene and hydrogen; separating this stream into a stream consisting essentially of hydrogen and a stream comprising propene and iso-butene; separating the stream comprising propene and iso-butene into a stream comprising propene and a stream comprising iso-butene; reacting a part or all of the stream comprising iso-butene with an alkanol in the presence of a solid acid catalyst to provide an alkyl tert-butyl ether; and reacting a part or all of the stream comprising propene with hydrogen peroxide in the presence of an epoxidation catalyst to provide propene oxide.