Provided are a pellicle film, a pellicle, an original plate for exposure, an exposure device, a method of producing a semiconductor device, and a method of producing a pellicle, the pellicle film containing carbon nanotubes having a silicon carbide layer in which at least a part of carbon is substituted with silicon at least on a surface layer side.

Provided are a pellicle film, a pellicle, an original plate for exposure, an exposure device, a method of producing a semiconductor device, and a method of producing a pellicle, the pellicle film containing carbon nanotubes having a silicon carbide layer in which at least a part of carbon is substituted with silicon at least on a surface layer side.

A nanofiber yarn placement system includes a yarn dispenser assembly, and a placement assembly. The placement assembly includes a compliant flange, and a guide connected to the compliant flange. The guide defining a channel. The channel includes at least one internal surface and at least one corner defined by the at least one internal surface.

A nanofiber yarn placement system includes a yarn dispenser assembly, and a placement assembly. The placement assembly includes a compliant flange, and a guide connected to the compliant flange. The guide defining a channel. The channel includes at least one internal surface and at least one corner defined by the at least one internal surface.

A plurality of CNTs are drawn out of VACNTs so as to be continuous in lines and are bundled into a thread shape, and a temporary thread bundled into a thread shape is temporarily wound on the first winder. The first winder is then rotated about an axis along a feeding direction of the temporary thread to twist the temporary thread while the temporary thread is fed from the first winder.

A plurality of CNTs are drawn out of VACNTs so as to be continuous in lines and are bundled into a thread shape, and a temporary thread bundled into a thread shape is temporarily wound on the first winder. The first winder is then rotated about an axis along a feeding direction of the temporary thread to twist the temporary thread while the temporary thread is fed from the first winder.

A carbon nanotube-resin composite includes: a carbon nanotube assembled wire including a plurality of carbon nanotubes; and a resin, wherein in the carbon nanotube assembled wire, the carbon nanotubes are oriented at a degree of orientation of 0.9 or more and 1 or less.

A carbon nanotube-resin composite includes: a carbon nanotube assembled wire including a plurality of carbon nanotubes; and a resin, wherein in the carbon nanotube assembled wire, the carbon nanotubes are oriented at a degree of orientation of 0.9 or more and 1 or less.

A system and process for producing doped carbon nanomaterials is disclosed. A carbonate electrolyte including a doping component is provided during the electrolysis between an anode and a cathode immersed in carbonate electrolyte contained in a cell. The carbonate electrolyte is heated to a molten state. An electrical current is applied to the anode, and cathode, to the molten carbonate electrolyte disposed between the anode and cathode. A morphology element maximizes carbon nanotubes, versus graphene versus carbon nano-onion versus hollow carbon nano-sphere nanomaterial product. The resulting carbon nanomaterial growth is collected from the cathode of the cell.

A system and process for producing doped carbon nanomaterials is disclosed. A carbonate electrolyte including a doping component is provided during the electrolysis between an anode and a cathode immersed in carbonate electrolyte contained in a cell. The carbonate electrolyte is heated to a molten state. An electrical current is applied to the anode, and cathode, to the molten carbonate electrolyte disposed between the anode and cathode. A morphology element maximizes carbon nanotubes, versus graphene versus carbon nano-onion versus hollow carbon nano-sphere nanomaterial product. The resulting carbon nanomaterial growth is collected from the cathode of the cell.