A method of obtaining helium from a process gas. The process gas is at a pressure less than 15 bar to a first membrane separation stage having a first membrane more readily permeable for helium than for at least one other component in the process gas. A first retentate stream is fed to a second membrane separation stage having a second membrane more readily permeable for helium than for at least one other component in the process gas. Helium is separated from a first helium-containing permeate stream using a pressure swing adsorption to obtain a helium-containing product stream. A second helium-containing permeate stream is recycled to the first membrane separation stage. A purge gas from the pressure swing adsorption is also recycled to the first membrane separation stage.

A process for separating components or a fluid mixture using membranes comprising a selective layer made from copolymers of an amorphous per fluorinated dioxolane and a fluorovinyl monomer. The resulting membranes have superior selectivity performance for certain fluid components of interest while maintaining fast permeance compared to membranes prepared using conventional perfluoropolymers, such as Teflon® AF, Hyflon® AD, and Cytop®.

A process for recovering a noncondensable gas from a gaseous mixture, the method comprising the steps of: supplying a gaseous mixture comprising a noncondensable component; supplying a sweep gas comprising a condensable component; introducing the gaseous mixture and the sweep gas to a swept membrane stage to obtain a retentate stream and a mixed permeate stream, the mixed permeate stream comprising at least a portion of the condensable component and at least a portion of the noncondensable component; introducing the mixed permeate stream to a vapor-liquid separator and subjecting the mixed permeate stream to thermodynamic conditions sufficient to condense most of the condensable component into a liquid, and obtain a raw noncondensable component stream, wherein the raw noncondensable component stream is enriched in the noncondensable component; and introducing the raw noncondensable component to a concentration unit to obtain a noncondensable component product stream enriched in the noncondensable component.

Recovering helium from a gaseous stream includes contacting an acid gas removal membrane with a gaseous stream to yield a permeate stream and a residual stream, removing a majority of the acid gas from the residual stream to yield a first acid gas stream and a helium depleted clean gas stream, removing a majority of the acid gas from the permeate stream to yield a second acid gas stream and a helium rich stream, and removing helium from the helium rich stream to yield a helium product stream and a helium depleted stream. A helium removal system for removing helium from a gaseous stream including hydrocarbon gas, acid gas, and helium includes a first processing zone including a first acid gas removal unit, a second processing zone including a second acid gas removal unit, a third processing zone, and a helium purification unit.

The invention provides a process of purifying a fluid useful in a manufacturing process, particularly in the manufacture of silicon wafers, by removing one or more impurities; and apparatus for use in the process.

In a helium purification process, a stream containing at least 10% of helium, at least 10% of nitrogen in addition to hydrogen and methane is separated to form a helium-enriched stream containing hydrogen, a first stream enriched in nitrogen and in methane and a second stream enriched in nitrogen and in methane, the helium-enriched stream is treated to produce a helium-rich product and a residual gas containing water, the residual gas is treated by adsorption (TSA) to remove the water and the regeneration gas from the adsorption is sent to a combustion unit (O).

A method for extending useful life of a sorbent for purifying a gas by sorption of an impurity is provided. The method generating a electrical discharge within the gas to obtain a spectral emission representative of a concentration of the impurity. The method also includes monitoring the concentration of the impurity according to the spectral emission. The method also includes lowering the concentration of the impurity by conversion of at least a portion of the impurity into a secondary impurity having a greater affinity to the sorbent than the impurity. The method also includes comparing the concentration of the impurity to a polluting concentration and managing the sorption of the gas onto the sorbent according to the comparison.

The invention provides a process for producing a fermentable gas stream from a gas source that contains one or more constituent which may be harmful to the fermentation process. To produce the fermentable gas stream, the gas stream is passed through a specifically ordered series of removal modules. The removal modules remove and/or convert various constituents found in the gas stream which may have harmful effects on downstream removal modules and/or inhibitory effects on downstream gas fermenting microorganisms. At least a portion of the fermentable gas stream is preferably capable of being passed to a bioreactor, which contains gas fermenting microorganisms, without inhibiting the fermentation process.

The invention provides a process for producing a fermentable gas stream from a gas source that contains one or more constituent which may be harmful to the fermentation process. To produce the fermentable gas stream, the gas stream is passed through a specifically ordered series of removal modules. The removal modules remove and/or convert various constituents found in the gas stream which may have harmful effects on downstream removal modules and/or inhibitory effects on downstream gas fermenting microorganisms. At least a portion of the fermentable gas stream is preferably capable of being passed to a bioreactor, which contains gas fermenting microorganisms, without inhibiting the fermentation process.

A method and system for purification of helium and CO.sub.2 from a stream containing at least Helium, CO2, nitrogen or methane uses a combination of cryogenic, membrane and adsorption technologies.