A method produces transparent ceramics having high transmittance and no bubble defects with uniform insertion loss over the entire inner surface thereof. The method comprising the steps of: obtaining a candidate composition containing a binder, optionally a dispersant, and optionally a plasticizer; dissolving the candidate composition in a solvent, then reducing a contained solvent volume to 0.1% by mass or less, and measuring a glass transition temperature; selecting a candidate composition having a glass transition temperature of 25° C. or more and 60° C. or less as an organic additive composition; preparing the organic additive composition containing the binder, optionally the dispersant, and the plasticizer, and having the composition obtained in the selecting step; pulverizing a raw material for sintering formed from metal oxide powder and the organic additive composition to obtain a pulverized mixture; granulating the pulverized mixture; sintering the granulated mixture to obtain a sintered body; and pressurizing the sintered body.

A method produces transparent ceramics having high transmittance and no bubble defects with uniform insertion loss over the entire inner surface thereof. The method comprising the steps of: obtaining a candidate composition containing a binder, optionally a dispersant, and optionally a plasticizer; dissolving the candidate composition in a solvent, then reducing a contained solvent volume to 0.1% by mass or less, and measuring a glass transition temperature; selecting a candidate composition having a glass transition temperature of 25° C. or more and 60° C. or less as an organic additive composition; preparing the organic additive composition containing the binder, optionally the dispersant, and the plasticizer, and having the composition obtained in the selecting step; pulverizing a raw material for sintering formed from metal oxide powder and the organic additive composition to obtain a pulverized mixture; granulating the pulverized mixture; sintering the granulated mixture to obtain a sintered body; and pressurizing the sintered body.

A porous formed article includes an organic polymer resin and an inorganic ion adsorbent and having the most frequent pore size of 0.08 to 0.70 μm measured with a mercury porosimeter. Such a porous formed article can be prepared by crushing and mixing a good solvent for the organic polymer resin and the inorganic ion adsorbent to obtain slurry; dissolving the organic polymer resin and a water-soluble polymer in the slurry; shape-forming the slurry; promoting coagulation of the shape-formed product by controlling the temperature and humidity of a spatial portion coming into contact with the shape-formed product, until the shape-formed product is coagulated in a poor solvent; and coagulating the coagulation-promoted shape-formed product in a poor solvent. A production apparatus can be used to prepare such a porous formed article.

A porous formed article includes an organic polymer resin and an inorganic ion adsorbent and having the most frequent pore size of 0.08 to 0.70 μm measured with a mercury porosimeter. Such a porous formed article can be prepared by crushing and mixing a good solvent for the organic polymer resin and the inorganic ion adsorbent to obtain slurry; dissolving the organic polymer resin and a water-soluble polymer in the slurry; shape-forming the slurry; promoting coagulation of the shape-formed product by controlling the temperature and humidity of a spatial portion coming into contact with the shape-formed product, until the shape-formed product is coagulated in a poor solvent; and coagulating the coagulation-promoted shape-formed product in a poor solvent. A production apparatus can be used to prepare such a porous formed article.

A process for providing fluoresence to a dental ceramic body by treating at least a portion of the outer surface of the dental ceramic body or a precursor thereof with a bismuth containing substance, characterized by the steps of placing the dental ceramic body or the precursor thereof into a closeable container, in particular a crucible; generating a bismuth containing atmosphere in the container and exposing at least a portion of the outer surface of the dental ceramic body or of the precursor to the bismuth containing atmosphere at a temperature above 1000° C.

A process for providing fluoresence to a dental ceramic body by treating at least a portion of the outer surface of the dental ceramic body or a precursor thereof with a bismuth containing substance, characterized by the steps of placing the dental ceramic body or the precursor thereof into a closeable container, in particular a crucible; generating a bismuth containing atmosphere in the container and exposing at least a portion of the outer surface of the dental ceramic body or of the precursor to the bismuth containing atmosphere at a temperature above 1000° C.

Disclosed are methods of forming a chamber component for a process chamber. The methods may include filling a mold with nanoparticles or plasma spraying nanoparticles, where at least a portion of the nanoparticles include a core particle and a thin film coating over the core particle. The core particle and thin film are formed of, independently, a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride, or combinations thereof. The nanoparticles may have a donut-shape having a spherical form with indentations on opposite sides. The methods also may include sintering the nanoparticles to form the chamber component and materials. Further described are chamber components and coatings formed from the described nanoparticles.

Disclosed are methods of forming a chamber component for a process chamber. The methods may include filling a mold with nanoparticles or plasma spraying nanoparticles, where at least a portion of the nanoparticles include a core particle and a thin film coating over the core particle. The core particle and thin film are formed of, independently, a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride, or combinations thereof. The nanoparticles may have a donut-shape having a spherical form with indentations on opposite sides. The methods also may include sintering the nanoparticles to form the chamber component and materials. Further described are chamber components and coatings formed from the described nanoparticles.

The invention provides Y.sub.2O.sub.3:RE nanoparticles having a cubic crystal structure, wherein RE is a trivalent rare earth metal ion. The invention further provides a method of preparing Y.sub.2O.sub.3:RE nanoparticles, comprising: a) providing a mixture comprising (i) an yttrium salt and/or yttrium alkoxide, (ii) a rare earth metal salt and/or rare earth metal alkoxide, and (iii) an organic solvent; b) optionally, subjecting the mixture to a pre-treatment step which comprises heating the mixture at a temperature of at least 80° C. and/or at a temperature such that crystal water and/or organic impurities are removed, c) heating the mixture at a temperature between 220° C. and 320° C. and/or at a temperature such that a precursor complex forms; d) subjecting the mixture to a precipitation stage, wherein a precipitate forms, said precipitation stage preferably comprising allowing the mixture to cool and/or adding an antisolvent to the mixture; and e) heating the precipitate at a temperature between 600° C. and 900° C. and/or at a temperature such that a cubic Y.sub.2O.sub.3 crystal structure forms, preferably for at least 10 minutes.

The invention provides Y.sub.2O.sub.3:RE nanoparticles having a cubic crystal structure, wherein RE is a trivalent rare earth metal ion. The invention further provides a method of preparing Y.sub.2O.sub.3:RE nanoparticles, comprising: a) providing a mixture comprising (i) an yttrium salt and/or yttrium alkoxide, (ii) a rare earth metal salt and/or rare earth metal alkoxide, and (iii) an organic solvent; b) optionally, subjecting the mixture to a pre-treatment step which comprises heating the mixture at a temperature of at least 80° C. and/or at a temperature such that crystal water and/or organic impurities are removed, c) heating the mixture at a temperature between 220° C. and 320° C. and/or at a temperature such that a precursor complex forms; d) subjecting the mixture to a precipitation stage, wherein a precipitate forms, said precipitation stage preferably comprising allowing the mixture to cool and/or adding an antisolvent to the mixture; and e) heating the precipitate at a temperature between 600° C. and 900° C. and/or at a temperature such that a cubic Y.sub.2O.sub.3 crystal structure forms, preferably for at least 10 minutes.