A method for manufacturing an SiO.sub.2TiO.sub.2 based glass upon a target by a direct method, includes: an ingot growing step of growing an SiO.sub.2TiO.sub.2 based glass ingot having a predetermined length on the target by flame hydrolysis by feeding a silicon compound and a titanium compound into an oxyhydrogen flame, wherein the ingot growing step includes: a first step of increasing a ratio of a feed rate of the titanium compound to a feed rate of the silicon compound as the SiO.sub.2TiO.sub.2 based glass ingot grows until the ratio reaches a predetermined value; and a second step of gradually growing the SiO.sub.2TiO.sub.2 based glass ingot after the ratio has reached the predetermined value in the first stage with keeping the ratio within a predetermined range.

A device for manufacturing SiO.sub.2TiO.sub.2 based glass by growing a glass ingot upon a target by a direct method. The device includes the target, comprising a thermal storage portion that accumulates heat by being preheated, and a heat insulating portion that suppresses conduction of heat from the thermal storage portion in a direction opposite to the glass ingot.

The present invention relates to a silica glass substrate including: a first main surface and a second main surface that are facing each other, in which the silica glass substrate has a density of 2.0 g/cm3 or less, the silica glass substrate includes a plurality of bubbles, the silica glass substrate has an average diameter of first recessed portions of 30 m or less, the first recessed portions being formed by the bubbles exposed on the first main surface, and the silica glass substrate has the number of the first recessed portions of 200/mm2 or less on the first main surface.

The core region of an optical fiber is doped with chlorine in a concentration that allows for the viscosity of the core region to be lowered, approaching the viscosity of the surrounding cladding. An annular interface region is disposed between the core and cladding and contains a concentration of fluorine dopant sufficient to match the viscosity of the core. By including this annular stress accommodation region, the cladding layer can be formed to include the relatively high concentration of fluorine required to provide the desired degree of optical signal confinement (i.e., forming a low loss optical fiber).