The object is to provide a mask blank substrate, a mask blank, and a transfer mask which can achieve easy correction of a wavefront by a wavefront correction function of an exposure apparatus. The further object is to provide methods for manufacturing them.

A virtual surface shape, which is an optically effective flat reference surface shape defined by a Zernike polynomial, is determined, wherein the Zernike polynomial is composed of only terms in which the order of variables related to a radius is second or lower order and includes one or more terms in which the order of the variables related to a radius is second-order; and the mask blank substrate, in which difference data (PV value) between the maximum value and the minimum value of difference shape between a virtual surface shape and a composite surface shape obtained by composing respective surface shapes of two main surfaces is 25 nm or less, is selected.

A coated glass article including a glass substrate and a coating deposited over the glass substrate. The coating includes a first inorganic metal oxide layer deposited over a major surface of the glass substrate. A second inorganic metal oxide layer is deposited over the first inorganic metal oxide layer. A third inorganic metal oxide layer is deposited over the second inorganic metal oxide layer. A fourth inorganic metal oxide layer is deposited over the third inorganic metal oxide layer. The coated glass article exhibits a total visible light transmittance (Illuminant C) of 40% or more and a visible light reflectance (Illuminant C) of 30% or more.

Embodiments of a scratch-resistant and optically transparent material comprising silicon, aluminum, nitrogen, and optionally oxygen are disclosed. In one or more embodiments, the material exhibits an extinction coefficient (k) at a wavelength of 400 nm of less than about 1×10.sup.−3, and an average transmittance of about 80% or greater, over an optical wavelength regime in the range from about 380 nm to about 780 nm, as measured through the material having a thickness of about 0.4 micrometer. In one or more embodiments, the material comprises an intrinsic maximum hardness of about 12 GPa or greater as measured on a major surface of the material having a thickness of about 400 by a Berkovich Indenter Hardness Test along an indentation depth of about 100 nm or greater, low compressive stress and low roughness (Ra). Articles and devices incorporating the material are also disclosed.

The present application provides a preparation method of a hydrogenated composite film and an optical filter, and relates to the field of optical film filter technologies. The preparation method includes: introducing inert gas and hydrogen into a reaction chamber, and bombarding at least two materials in the reaction chamber and the introduced hydrogen using plasma formed by the inert gas, such that the at least two materials are sputtered onto a substrate and react with hydrogen ions generated by the hydrogen to form a hydrogenated composite film layer. The hydrogenated composite film layer includes at least two materials which are co-sputtered onto the same substrate using the sputtering technology to obtain a required material performance, so as to obtain the hydrogenated composite film layer with a refractive index greater than 3.5 and an extinction coefficient less than 0.005 under a wavelength of 700 nm to 1800 nm.

The present invention provides low-reflection coating glass in which a dielectric layer having a higher refractive index and a dielectric layer having a lower refractive index are stacked alternately on a glass substrate.

The near-infrared reflective film has, on a base material, a high refractive layer containing a water-soluble polymer and a metal oxide particle having a refractive index higher than the refractive index of the water-soluble polymer, and a low refractive layer containing a water-soluble polymer and a metal oxide particle having a refractive index lower than the refractive index of the water-soluble polymer are alternately laminated individually in two or more layers. The total number of the layers of the high refractive layer and the low refractive layer is n. The total film thickness of the component layers from the region of n/2 to the base material is Σd1, and the total film thickness of the component layers from the region of n/2 to the outermost layer is Σd2. The film thickness ratio Σd1/Σd2 is from 1.05 to 1.80.

According to one or more embodiments described herein, a coated article may comprise a transparent substrate and an optical coating. The transparent substrate may have a major surface, and the optical coating may be disposed on the major surface of the transparent substrate and form an air-side surface. The optical coating may comprise one or more layers of deposited material and one or more light-altering features which may reduce oscillations in the reflectance spectrum of the coated article. The coated article may exhibit a maximum hardness of about 8 GPa or greater, have an average photopic transmittance of about 50% or greater, and exhibit an angular color shift of less than about 10 from a reference illumination angle in a range of 0-10 degrees to an incident illumination angle in a range of 30-60 degrees relative to the air-side surface.

An ophthalmic lens comprising an antireflective stack which strongly reduces reflection in the UV range and in the visible range. The antireflective stack comprises composite high index layers comprising zirconium oxide and another metal oxide.

A detection device includes (a) a LiDAR sensing device and (b) a housing enclosing the LiDAR sensing device, the housing including at least one cover lens. At least a portion of the cover lens is made of at least one glass sheet having an absorption coefficient lower than 5 m.sup.−1 in the wavelength range from 750 to 1650 nm. The cover lens helps to protect the LiDAR sensing device from external degradation.

Embodiments of this disclosure pertain to a coating material comprising silicon and/or aluminum, hydrogen and any two or more of oxygen, nitrogen, carbon, and fluorine. The coating material exhibits a hardness of about 17 GPa or greater and an optical band gap of about 3.5 eV or greater. In some embodiments, the coating material includes, in atomic %, silicon and/or aluminum in an amount of about 40 or greater, hydrogen in an amount in the range from about 1 to about 25, nitrogen in an amount of about 30 or greater, oxygen in an amount in the range from about 0 to about 7.5, and carbon in an amount in the range from about 0 to about 10. The coating material may optionally include fluorine and/or boron. Articles including the coating material are also described and exhibit an average transmittance of about 85% or greater over an optical wavelength regime in the range from about 380 nm to about 720 nm and colorlessness.