One embodiment of the disclosure provides a method of fabricating a chamber component with a coating layer disposed on an interface layer with desired film properties. In one embodiment, a method of fabricating a coating material includes providing a base structure comprising an aluminum or silicon containing material, forming an interface layer on the base structure, wherein the interface layer comprises one or more elements from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and forming a coating layer on the interface layer, wherein the coating layer has a molecular structure of Si.sub.vY.sub.wMg.sub.xAl.sub.yO.sub.z. In another embodiment, a chamber component includes an interface layer disposed on a base structure, wherein the interface layer is selected from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and a coating layer disposed on the interface layer, wherein the coating layer has a molecular structure of Si.sub.vY.sub.wMg.sub.xAl.sub.yO.sub.z.

One embodiment of the disclosure provides a method of fabricating a chamber component with a coating layer disposed on an interface layer with desired film properties. In one embodiment, a method of fabricating a coating material includes providing a base structure comprising an aluminum or silicon containing material, forming an interface layer on the base structure, wherein the interface layer comprises one or more elements from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and forming a coating layer on the interface layer, wherein the coating layer has a molecular structure of Si.sub.vY.sub.wMg.sub.xAl.sub.yO.sub.z. In another embodiment, a chamber component includes an interface layer disposed on a base structure, wherein the interface layer is selected from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and a coating layer disposed on the interface layer, wherein the coating layer has a molecular structure of Si.sub.vY.sub.wMg.sub.xAl.sub.yO.sub.z.

Paste compositions for additive manufacturing and methods for the same are provided. The paste composition may include an organic vehicle, and one or more powders dispersed in the organic vehicle. The organic vehicle may include a solvent, a polymeric binder, a thixotropic additive, and a dispersant. The organic vehicle may be configured to provide the paste composition with a suitable viscosity. The organic vehicle may also be configured to provide a stable paste composition for a predetermined period of time.

Hollow spherical particles which include: an inorganic particle layer including ceramic particles and conductive carbon-based particles; and a polymer coating layer surrounding the inorganic particle layer, and in which the inorganic particle layer surrounds an empty inner space to form the hollow spherical particles. A method of manufacturing the hollow spherical particles and a heat-dissipating fluid composition including the hollow spherical particles.

Hollow spherical particles which include: an inorganic particle layer including ceramic particles and conductive carbon-based particles; and a polymer coating layer surrounding the inorganic particle layer, and in which the inorganic particle layer surrounds an empty inner space to form the hollow spherical particles. A method of manufacturing the hollow spherical particles and a heat-dissipating fluid composition including the hollow spherical particles.

Disclosed are: damage-resistant ECMCs that need to work and remain elastic between minus 120° C. and positive 300° C.; ECMCs that need to be able to contain a flame of 1900° C. for more than 90 minutes; and composite structures, especially highly stressed structures. One of the characteristic problems of ceramic matrices is their fragility. Indeed, when a fracture starts, it propagates easily in the matrix. Disclosed are elastic ceramic matrix composites (ECMCs), for which: the ceramic matrix is split into solid “ceramic microdomains” (CMDs); the CMDs are connected to one another by a dense network of “elastic microelements” (EMEs); and the bonds between the EMEs and the CMDs are strong chemical bonds, preferably covalent.

Disclosed are: damage-resistant ECMCs that need to work and remain elastic between minus 120° C. and positive 300° C.; ECMCs that need to be able to contain a flame of 1900° C. for more than 90 minutes; and composite structures, especially highly stressed structures. One of the characteristic problems of ceramic matrices is their fragility. Indeed, when a fracture starts, it propagates easily in the matrix. Disclosed are elastic ceramic matrix composites (ECMCs), for which: the ceramic matrix is split into solid “ceramic microdomains” (CMDs); the CMDs are connected to one another by a dense network of “elastic microelements” (EMEs); and the bonds between the EMEs and the CMDs are strong chemical bonds, preferably covalent.

Ceramic slurries may include ceramic particles, a photoreactive-photostable hybrid binder, and a photoinitiator. The photoreactive-photostable hybrid binder may include a photoreactive organic resin component, a photoreactive siloxane component, and one or more photostable siloxane components. Methods of forming a ceramic part may include curing a portion of a ceramic slurry by exposing the portion of the ceramic slurry to light to form a green ceramic part, and partially firing the green ceramic part to form a brown ceramic part. The brown ceramic part may be sintered at or above a sintering temperature of the ceramic particles to form a ceramic part, wherein sintering includes heating the brown ceramic part to a sufficient temperature to promote reaction bonding that converts silica from the photoreactive-photostable hybrid binder into silicates that bond with the ceramic particles.

A ceramic and polymer composite including: a first continuous phase comprising a sintered porous ceramic having a solid volume of from 50 to 85 vol % and a porosity or a porous void space of from 50 to 15 vol %, based on the total volume of the composite; and a second continuous polymer phase situated in the porous void space of the sintered porous ceramic. Also disclosed is a composite article, a method of making the composite, and a method of using the composite.

A ceramic and polymer composite including: a first continuous phase comprising a sintered porous ceramic having a solid volume of from 50 to 85 vol % and a porosity or a porous void space of from 50 to 15 vol %, based on the total volume of the composite; and a second continuous polymer phase situated in the porous void space of the sintered porous ceramic. Also disclosed is a composite article, a method of making the composite, and a method of using the composite.