One embodiment of the disclosure provides a method of fabricating a chamber component with a coating layer disposed on an interface layer with desired film properties. In one embodiment, a method of fabricating a coating material includes providing a base structure comprising an aluminum or silicon containing material, forming an interface layer on the base structure, wherein the interface layer comprises one or more elements from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and forming a coating layer on the interface layer, wherein the coating layer has a molecular structure of Si.sub.vY.sub.wMg.sub.xAl.sub.yO.sub.z. In another embodiment, a chamber component includes an interface layer disposed on a base structure, wherein the interface layer is selected from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and a coating layer disposed on the interface layer, wherein the coating layer has a molecular structure of Si.sub.vY.sub.wMg.sub.xAl.sub.yO.sub.z.

Grain-oriented electrical steel sheet excellent in magnetic properties and excellent in adhesion of the primary coating to the steel sheet is provided. This is provided with a base metal steel sheet containing a predetermined chemical composition and a primary coating formed on a surface of the base metal steel sheet and containing Mg.sub.2SiO.sub.4 as a main constituent. A peak position of Al emission intensity obtained when performing elemental analysis by glow discharge optical emission spectrometry from a surface of the primary coating in a thickness direction of the grain-oriented electrical steel sheet is arranged within a range of 2.0 to 10.0 μm from the surface of the primary coating in the thickness direction. A number density of Al oxides of a size of 0.2 μm or more in terms of a circle equivalent diameter based on the area at the peak position of Al emission intensity is 0.032 to 0.20/μm.sup.2, and, in a 100 μm×100 μm distribution chart of Al oxides at the peak position of Al emission intensity obtained by glow discharge optical emission spectrometry, if dividing the distribution chart by 10 μm×10 μm grid section, a ratio of a number of grid sections not containing the Al oxides to the total number of grid sections in the distribution chart is 5% or less.

A ceramic honeycomb structure having pluralities of flow paths partitioned by porous cell walls; (a) the cell walls having porosity of 50-60%; and (b) in a pore diameter distribution in the cell walls measured by mercury porosimetry, (i) pore diameters at cumulative pore volumes corresponding to particular percentages of the total pore volume being within specific ranges and having specific relationships; and (ii) the difference between a logarithm of the pore diameter at a cumulative pore volume corresponding to 20% of the total pore volume and a logarithm of the pore diameter at 80% being 0.39 or less, and its production method.

A ceramic honeycomb structure having pluralities of flow paths partitioned by porous cell walls; (a) the cell walls having porosity of 50-60%; and (b) in a pore diameter distribution in the cell walls measured by mercury porosimetry, (i) pore diameters at cumulative pore volumes corresponding to particular percentages of the total pore volume being within specific ranges and having specific relationships; and (ii) the difference between a logarithm of the pore diameter at a cumulative pore volume corresponding to 20% of the total pore volume and a logarithm of the pore diameter at 80% being 0.39 or less, and its production method.

A method for producing a three-dimensionally shaped object by stacking layers includes forming each layer using a three-dimensional shape composition containing particles, measuring the thickness of the layer, and ejecting onto the layer a liquid binder containing a binding agent capable of binding the particles. For the ejecting, the amount of the liquid binder to be ejected per unit area of the layer when viewed from above is adjusted according to the result of the measuring.

A refractory, coarse ceramic product including at least one granular refractory material, has an open porosity of between 22 and 45 vol.-%, in particular of between 23 and 29 vol.-%, and a grain structure of the refractory material, wherein the medium grain size fraction with grain sizes of between 0.1 and 0.5 mm is 10 to 55 wt.-%, in particular 35 to 50 wt.-%, and wherein the remainder of the grain structure is a finest grain fraction with grain sizes of up to 0.1 mm and/or coarse-grain fraction with grain sizes of more than 0.5 mm.

A refractory, coarse ceramic product including at least one granular refractory material, has an open porosity of between 22 and 45 vol.-%, in particular of between 23 and 29 vol.-%, and a grain structure of the refractory material, wherein the medium grain size fraction with grain sizes of between 0.1 and 0.5 mm is 10 to 55 wt.-%, in particular 35 to 50 wt.-%, and wherein the remainder of the grain structure is a finest grain fraction with grain sizes of up to 0.1 mm and/or coarse-grain fraction with grain sizes of more than 0.5 mm.

A three-dimensional shaped article production method includes a layer formation step of forming a layer by ejecting a composition containing particles and a solvent in a predetermined pattern using a dispenser, a measurement step of determining the height of the layer, and a bonding step of subjecting a stacked body including a plurality of layers to a bonding treatment for bonding the particles, wherein when n represents an arbitrary integer of 1 or more, by selecting driving waveform data for the dispenser when ejecting the composition from a data group including a plurality of pieces of driving waveform data based on the information of the height of the layer in the n-th position (n-th layer) determined in the measurement step, the ejection amount of the composition per unit area onto the n-th layer in the layer formation step of forming the layer in the (n+1)th position ((n+1)th layer) is adjusted.

The invention relates to a refractory dry vibratable mix which sets at room temperature when water is added, for use in metallurgical vessels and comprising a refractory main component, a binder and a retarder.

A ceramic composition according to an embodiment of the present invention contains: a main phase component represented by CaMgSi.sub.2O.sub.6 or Ba.sub.4(Re.sub.(1-x), Bi.sub.x).sub.9.33Ti.sub.18O.sub.54; and an additive component containing a Li component and a B component, An observation field, a part of a sectional surface of the ceramic composition, is divided into a plurality of unit observation regions. Among all the unit observation regions, those containing no or little sintering agent component are referred to as the main crystal regions. An area percentage of main crystal regions relative to the observation field is 30% or more, the main crystal regions being the unit observation regions containing 0.5% or less by area of the additive component.