Provided are a member for plasma processing device which has an excellent plasma resistance and improved adhesion strength of a film to a base material, and a plasma processing device provided with the same. A member for plasma processing device includes: a base material containing a first element which is a metal element or a metalloid element; a film containing a rare-earth element oxide, or a rare-earth element fluoride, or a rare-earth element oxyfluoride as a major constituent, the film being located on the base material; and an amorphous portion containing the first element, a rare earth element, and at least one of oxygen and fluorine, the amorphous portion being interposed between the base material and the film.

Provided are a member for plasma processing device which has an excellent plasma resistance and improved adhesion strength of a film to a base material, and a plasma processing device provided with the same. A member for plasma processing device includes: a base material containing a first element which is a metal element or a metalloid element; a film containing a rare-earth element oxide, or a rare-earth element fluoride, or a rare-earth element oxyfluoride as a major constituent, the film being located on the base material; and an amorphous portion containing the first element, a rare earth element, and at least one of oxygen and fluorine, the amorphous portion being interposed between the base material and the film.

[Problem]

To support the metal without segregation on the zirconia mill blank for dental cutting and machining which has been adjusted to a hardness that enables to cut and machine by calcining at a low temperature.

[Solution]

A zirconia mill blank for dental cutting and machining is prepared by A preparing method of a zirconia mill blank for dental cutting and machining, comprising an impregnation step of impregnating a porous zirconia molded body with an impregnating solution containing at least one metal ion and at least one precipitant, and a deposition step of decomposing the precipitant in the porous zirconia molded body to deposit a metal compound.

A blade outer air seal has at least one internal surface and a layer atop the at least one internal surface. The layer has: a matrix comprising at least one of hafnium silicate (HfSiO.sub.4) and zirconium silicate (ZrSiO.sub.4), ytterbium disilicate (Yb.sub.2Si.sub.2O.sub.7); and barium magnesium alumino silicate (BMAS) or other alkaline earth aluminosilicate.

A blade outer air seal has at least one internal surface and a layer atop the at least one internal surface. The layer has: a matrix comprising at least one of hafnium silicate (HfSiO.sub.4) and zirconium silicate (ZrSiO.sub.4), ytterbium disilicate (Yb.sub.2Si.sub.2O.sub.7); and barium magnesium alumino silicate (BMAS) or other alkaline earth aluminosilicate.

The present invention relates to a metal oxide coated composite comprising a core consisting of a mixture of a La stabilized Al.sub.2O.sub.3 phase and an Ce/Zr/RE.sub.2O.sub.3 mixed oxide phase, the core having a specific crystallinity, specific pore volume and a specific pore size distribution, and a method for the production of the metal oxide coated composite.

The present invention relates to a metal oxide coated composite comprising a core consisting of a mixture of a La stabilized Al.sub.2O.sub.3 phase and an Ce/Zr/RE.sub.2O.sub.3 mixed oxide phase, the core having a specific crystallinity, specific pore volume and a specific pore size distribution, and a method for the production of the metal oxide coated composite.

A method for manufacturing a pillar-shaped honeycomb structure filter including preparing a pillar-shaped honeycomb structure having a plurality of first cells and a plurality of second cells that are alternately arranged adjacent to each other with a porous partition wall interposed therebetween; adhering ceramic particles containing 50% by mass or more in total of one or two selected from SiC and SiN to a surface of the first cells; and performing a heat-oxidation treatment on the pillar-shaped honeycomb structure in which the ceramic particles are adhered to the surface of the first cells to form a porous film comprised of the ceramic particles having an oxide film thereon so as to satisfy: (1) 0.05≤T≤0.5; (2) 0.05≤T/D50; and (3) 4≤{(W.sub.1−W.sub.0)/W.sub.0×100}/D50.

A precursor mixture for producing a porous body, wherein the precursor mixture comprises: (i) milled alpha alumina powder having a particle size of 0.1 to 6 microns, (ii) boehmite powder that functions as a binder of the alpha alumina powders, and (iii) burnout materials having a particle sizes of 1-10 microns. In some embodiments, an unmilled alpha alumina powder having a particle size of 10 to 100 microns is also included in said precursor mixture. Also described herein is a method for producing a porous body in which the above-described precursor mixture is formed to a given shape, and subjected to a heat treatment step in which the formed shape is sintered to produce the porous body.

A precursor mixture for producing a porous body, wherein the precursor mixture comprises: (i) milled alpha alumina powder having a particle size of 0.1 to 6 microns, (ii) boehmite powder that functions as a binder of the alpha alumina powders, and (iii) burnout materials having a particle sizes of 1-10 microns. In some embodiments, an unmilled alpha alumina powder having a particle size of 10 to 100 microns is also included in said precursor mixture. Also described herein is a method for producing a porous body in which the above-described precursor mixture is formed to a given shape, and subjected to a heat treatment step in which the formed shape is sintered to produce the porous body.