Disclosed are methods of forming a chamber component for a process chamber. The methods may include filling a mold with nanoparticles or plasma spraying nanoparticles, where at least a portion of the nanoparticles include a core particle and a thin film coating over the core particle. The core particle and thin film are formed of, independently, a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride, or combinations thereof. The nanoparticles may have a donut-shape having a spherical form with indentations on opposite sides. The methods also may include sintering the nanoparticles to form the chamber component and materials. Further described are chamber components and coatings formed from the described nanoparticles.

In order to provide a negative electrode material for a lithium-ion secondary battery that achieves both of high capacity and rapid charge/discharge performance, a nano-carbon composite is used as the negative electrode material. The nano-carbon composite 7 includes: low-crystallinity carbon 1; a composite in which a mixture of silicon oxide 2 containing silicon nanoparticles 3 and fibrous carbon 4 are partially or entirely coated with a carbon coating 5; and carbon nanohorn aggregates 6 supported on a surface of the composite.

A method of making shaped ceramic abrasive particles includes cutting a layer of ceramic precursor material using a laser beam and forming shaped ceramic precursor particles. Further thermal processing provides shaped ceramic abrasive particles. Shaped ceramic abrasive particles producible by the methods and abrasive articles containing them are also disclosed.

A ceramic membrane including a feed flow inlet, a retentate flow outlet, a permeate flow outlet, a membrane interface portion. The membrane interface portion include a feed flow channel fluidly coupled to the feed flow inlet and to the retentate flow outlet and permeate flow channel fluidly coupled to the retentate flow outlet, wherein the membrane interface portion is operable to allow for fluid communication between the feed flow channels and the permeate flow channels through a membrane portion, and wherein the ceramic membrane has an open porosity of at least 10%. Also provided is a process for preparing the ceramic membrane by additive manufacture.

A method includes: supplying sources or nanoparticles of any one or two or more combinations selected from a group which consists of a carbon source, a doping source, a doped element containing carbon source, and a waste plastic source into a high-temperature and high-pressure closed autoclave, completely closing the high-temperature and high-pressure closed autoclave, and forming a nanoparticle-carbon core-shell structure by a single process by coating a carbon layer on the surface of the nanoparticles or forming a core-shell structure of nanoparticle-doped carbon by the single process by coating a carbon layer doped with the doped element on the surface of the nanoparticles under pressure self-generated in the autoclave and a reaction temperature in the range of 500 to 850 C. by heating the autoclave.

A porous plate-shaped filler of the present invention is a plate shape having an aspect ratio of 3 or more, a surface shape is one of a round shape, an oval and a round-corner polygonal shape, and its minimum length is from 0.1 to 50 m. Furthermore, a sectional shape is one of an arch shape, an elliptic shape, and a quadrangular shape in which at least a part of corners is rounded. Consequently, it is possible to obtain the heat insulation film in which the porous plate-shaped fillers 1 are easy to be laminated and the heat insulation effect improves.

Currently, the commercial fuel of choice, UO.sub.2-zircaloy, is economical due to an established and simple fabrication process. However, the alternatives to the UO.sub.2-zircaloy that may improve on system safety are sought. The fully ceramic microencapsulated (FCM) fuel system that is potentially inherently safe fuel and is an improvement on the UO.sub.2-zircaloy system is prohibitively expensive because of the known methods to produce it. Disclosed herein is a new production route and fixturing that produces identical or superior FCM fuel consistent with mass production by providing a plurality of tristructural-isotropic fuel particles; mixing the plurality of tristructural-isotropic fuel particles with ceramic powder to form a mixture; placing the mixture in a die; and applying a current to the die so as to sinter the mixture by direct current sintering into a fuel element.

Insulating ceramic panels and methods of forming insulating ceramic panels are disclosed herein. The insulating ceramic panels include a plurality of hollow particles and an oxide binder. The plurality of hollow particles are formed from a hollow particle material that includes a metal oxide. The plurality of hollow particles defines an average equivalent particle diameter of at least 10 micrometers (m) and at most 500 m. In addition, the plurality of hollow particles defines an average wall thickness that is at least 3% and at most 30% of the average equivalent particle diameter. The oxide binder material attaches each hollow particle to at least one other hollow particle and differs from the hollow particle material. The insulating ceramic panels define a particle-enclosed void volume fraction, which is enclosed within the plurality of hollow particles, and an interstitial void volume fraction, which is defined within an interstitial space among the plurality of hollow particles.

Disclosed is a chamber component of a processing chamber, the chamber component comprising a body and a coating on at least one surface of the body. The coating comprises about 89 mol % to about 93 mol % Y.sub.2O.sub.3 and about 7 mol % to about 11 mol % ZrO.sub.2. The coating has a hardness of about 1-50 GPa.

Insulating ceramic panels and methods of forming insulating ceramic panels. The insulating ceramic panels include a plurality of hollow particles and an oxide binder. The plurality of hollow particles are formed from a hollow particle material that includes a metal oxide. The plurality of hollow particles defines an average equivalent particle diameter of at least 10 micrometers (.Math.m) and at most500 .Math.m. In addition, the plurality of hollow particles defines an average wall thickness that is at least 3% and at most 30% of the average equivalent particle diameter. The oxide binder material attaches each hollow particle to at least one other hollow particle and differs from the hollow particle material. The insulating ceramic panels define a particle-enclosed void volume fraction, which is enclosed within the plurality of hollow particles, and an interstitial void volume fraction, which is defined within an interstitial space among the plurality of hollow particles.