A method for forming a component for a plasma processing chamber is provided. An internal mold is provided. An external mold is provided around the internal mold. The external mold is filled with a ceramic powder, wherein the ceramic powder surrounds the internal mold. The ceramic powder is sintered to form a solid part. The solid part is removed from the external mold.

Methods of making ceramic matrix prepregs are described. The methods include exposing a coated tow of ceramic fibers to a ceramic matrix slurry comprising a solvent and ceramic precursor. The coating is at least partially removed and the slurry infuses into the ceramic fibers to form prepreg. Steps to form ceramic matrix composites are also described, including forming the prepreg into a green body, and sintering the ceramic precursor.

The disclosure relates to microchemical (or microfluidic) apparatus as well as related methods for making the same. The methods generally include partial sintering of sintering powder (e.g., binderless or otherwise free-flowing sintering powder) that encloses a fugitive phase material having a shape corresponding to a desired cavity structure in the formed apparatus. Partial sintering removes the fugitive phase and produces a porous compact, which can then be machined if desired and then further fully sintered to form the final apparatus. The process can produce apparatus with small, controllable cavities shaped as desired for various microchemical or microfluidic unit operations, with a generally smooth interior cavity finish, and with materials (e.g., ceramics) able to withstand harsh environments for such unit operations.

A process for manufacturing a part made of a ceramic matrix composite material, includes coating an outer surface of a porous preform with a layer of a fugitive material to form a model of the part to be obtained, the fugitive material being wax or resin, the fugitive material layer in the model not exceeding the highest peak of surface undulations of the preform, and ceramic and/or carbon particles being present in the porosity of the preform, coating the model formed with a ceramic powder composition, heat treating the coated model to remove the fugitive material and form a ceramic shell mold by sintering of the ceramic powder composition, introducing a molten composition including silicon into the shell mold to obtain the part in the shell mold, the molten composition infiltrating the porosity of the preform to form the ceramic matrix, and separating the shell mold from the part obtained.

A sensor element (10) having a laminate structure, and extending in an axial direction AX, the sensor element including a first and second ceramic layers (118B, 115) disposed apart from each other in a laminating direction; a third ceramic layer (118) intervening between the first and second ceramic layers in the laminating direction and having a hollow space (10G) formed therein; and an internal space which is the hollow space surrounded by the first ceramic layer, the second ceramic layer, and the third ceramic layer, wherein, at a periphery (10f) of the internal space, a fourth ceramic layer (181) containing as a main component a ceramic material different from that contained as a main component in the first and third ceramic layers intervenes between the first ceramic layer and the third ceramic layer which are exposed to the internal space. Also disclosed is a method for manufacturing the gas sensor element.

A method may include depositing a sacrificial support material on or adjacent to a build surface. The sacrificial support material may be configured to support a continuous reinforcement material during an additive manufacturing technique. The method also may include extruding the continuous reinforcement material from an additive manufacturing device such that at least a portion of the continuous reinforcement material contacts and is supported by the sacrificial support material; and removing the sacrificial support material to result in a feature defined at least in part by the continuous reinforcement material at the absence of sacrificial support material.

This invention relates to a product and a method of preparing ceramic and/or ceramic hybrid materials through the construction of a printed die. The printed die being made by three dimensional printing or additive manufacturing processes possesses both an external geometry and an internal geometry.

The disclosure relates to microchemical (or microfluidic) apparatus as well as related methods for making the same. The methods generally include partial sintering of sintering powder (e.g., binderless or otherwise free-flowing sintering powder) that encloses a fugitive phase material having a shape corresponding to a desired cavity structure in the formed apparatus. Partial sintering removes the fugitive phase and produces a porous compact, which can then be machined if desired and then further fully sintered to form the final apparatus. The process can produce apparatus with small, controllable cavities shaped as desired for various microchemical or microfluidic unit operations, with a generally smooth interior cavity finish, and with materials (e.g., ceramics) able to withstand harsh environments for such unit operations.

A method is described for manufacturing a ceramic composite structure. The method includes wrapping ceramic fibers (22), such as SiC fibers, about the external surface of at least one form. The method further includes heating the wrapped fibers (22) to a temperature no greater than a first temperature, infiltrating voids (24) in the wrapped fibers (22) with the ceramic composite in a first vessel (12) at the first temperature, transferring the infiltrated wrapped fibers (22) from the first vessel (12) to a second vessel (14), distinct from the first vessel (12), and coating the infiltrated wrapped fibers (22) with the ceramic composite in the second vessel (14) at a second temperature, higher than the first temperature.

A method of forming a ceramic matrix composite component with cooling channels includes embedding a plurality of wires into a preform structure, densifying the preform structure with embedded wires, and removing the plurality of wires to create a plurality of corresponding channels within the densified structure.