A method for manufacturing an electrostatic chuck with multiple chucking electrodes made of ceramic pieces using metallic aluminum as the joining. The aluminum may be placed between two pieces and the assembly may be heated in the range of 770C to 1200C. The joining atmosphere may be non-oxygenated. After joining the exclusions in the electrode pattern may be machined by also machining through one of the plate layers. The machined exclusion slots may then be filled with epoxy or other material. An electrostatic chuck or other structure manufactured according to such methods.

This invention relates to a product and a method of preparing ceramic and/or ceramic hybrid materials through the construction of a printed die. The printed die being made by three dimensional printing or additive manufacturing processes possesses both an external geometry and an internal geometry.

The present invention discloses a guide pin, which comprises a base support layer (1) and a protective layer (2). The base support layer (1) is a rod-shaped structure. The protective layer (2) tightly wraps the surface of the base support layer (1). A manufacturing method for the guide pin made of various materials is also disclosed. The guide pin manufactured by the method of the present invention is not prone to bending or deformation and has good corrosion resistance and acid/alkaline resistance properties; it is wear resistant and has of extended service life; it is easy to be processed and is low in cost.

A refractory article including a body having central opening extending through at least a portion of the body, the central opening having a receiving surface having a convex curvature. In an embodiment, the body can include a coupling protrusion extending from a portion of an upper surface of the body and a coupling depression on a portion of a bottom surface of the body.

A sintering jig according to the disclosure includes a first plate including a plurality of protrusions and a second plate stacked on the first plate and including through holes corresponding to the protrusions. The through hole includes a cylindrical portion through which the protrusion enter and exit and a conical portion widening towards an upper surface of the second plate from the cylindrical portion.

A graphite article which can be compressed by more three (3%) percent at a contact pressure of 100 KPa or less without damaging the graphite article reducing the thermal impedance exhibited by the article. Also a graphite article comprising graphitized polymer having a thickness of at least 75 microns. Preferably the graphite has a density of less than 1.50 g/cc and a compressibility of more than 3% at a contact pressure of 100 KPa. Also the article has a generally sheet like shape. These articles may be used in a thermal management system to dissipate heat from a heat source.

A method for the manufacture of a three-dimensional object using a refractory matrix material is provided. The method includes the additive manufacture of a green body from a powder-based refractory matrix material followed by densification via chemical vapor infiltration (CVI). The refractory matrix material can be a refractory ceramic (e.g., silicon carbide, zirconium carbide, or graphite) or a refractory metal (e.g., molybdenum or tungsten). In one embodiment, the matrix material is deposited according to a binder-jet printing process to produce a green body having a complex geometry. The CVI process increases its density, provides a hermetic seal, and yields an object with mechanical integrity. The residual binder content dissociates and is removed from the green body prior to the start of the CVI process as temperatures increase in the CVI reactor. The CVI process selective deposits a fully dense coating on all internal and external surfaces of the finished object.

A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.

A method of processing a CMC component includes preparing a fiber preform having a predetermined shape, and positioning the fiber preform with tooling having holes facing one or more surfaces of the fiber preform. After the positioning, a clamping pressure is applied to the tooling to force portions of the one or more surfaces of the fiber preform into the holes, thereby forming protruded regions of the fiber preform. During the application of the clamping pressure, the fiber preform is exposed to gaseous reagents at an elevated temperature, and a matrix material is deposited on the fiber preform to form a rigidized preform including surface protrusions. After removing the tooling, the rigidized preform is infiltrated with a melt for densification, and a CMC component having surface bumps is formed. When the CMC component is assembled with a metal component, the surface bumps may reduce diffusion at high temperatures.

A method of fabricating cooling features on a CMC component may comprise compressing a fabric preform within tooling including holes and/or recesses facing the fabric preform. During the compression, portions of the fabric preform are pushed into the holes and/or recesses. Gases are delivered through the tooling to deposit a matrix material on exposed surfaces of the fabric preform while the fabric preform is being compressed. The matrix material builds up on the portions of the fabric preform pushed into the holes and/or recesses, and a rigidized preform with surface protrusions is formed. The tooling is removed, and the rigidized preform is densified, thereby forming a CMC component including raised surface features.