A sintered body, a method of fabricating the sintered body, a semiconductor fabricating device, and a method of fabricating the semiconductor fabricating device, the sintered body including 50 mass % or more of Y.sub.5O.sub.4F.sub.7, wherein the sintered body has a relative density of 97.0% or more and a Vickers hardness of 2.4 GPa or more.

A method of manufacturing a CMC structure includes infiltrating a porous substrate with a composite material and performing a first densification on the infiltrated porous substrate, forming a first densified porous substrate, wherein the first densification includes techniques selected from the group of techniques comprising photonic curing, photonic sintering, pulsed thermal heating, or combinations thereof.

A sagger receiving element for burning powdery cathode materials for producing lithium ion accumulators including a rectangular shell comprising four side walls and a base, wherein the sagger receiving element is produced by a burning process from heat-resistant material which withstands temperatures of in particular more than 900° C., and wherein the material of the sagger receiving element is produced on the basis of oxide-bonded SiC, the material having the following chemical composition in percent by weight to a total of 100%: silicon carbide (SiC) content in a range of 40.0%-80.0%, Al.sub.2O.sub.3 content in a range of 10%-43%, total SiO.sub.2 content in a range of 5%-30%, and alkali oxide and iron oxide content of less than 2%.

The present disclosure discloses a rare earth tantalate ceramic resisting corrosion of a low melting point oxide. A general chemical formula of the ceramic is RETaO.sub.4. A method for preparing the ceramic includes: weighing RE.sub.2O.sub.3 powder and Ta.sub.2O.sub.5 powder and adding to a solvent to mix, and ball milling the mixed solution with a ball mill to obtain powder A; drying the powder A, and sieving the powder A for a first time to obtain powder B; placing the powder B in a mold for compaction, pre-sintering the powder B to form a block C, cooling the block C to room temperature, grounding the block C with a grinder, and sieving the block C for a second time to obtain powder D; and sintering the powder D to obtain the rare earth tantalate ceramic. The ceramic has high density and strong corrosion resistance to low melting point oxides.

A bond coating material providing unexpectedly high thermal cyclic fatigue resistance and sulfidation resistance, and unexpectedly prolonged thermal cycle life in high temperature environments of gas turbine engine components with and without the presence of sulfur contains: a) 10% to 30% by weight chromium, b) at least one of tantalum and molybdenum in a total amount of 3% to 15% by weight, c) 5% to 13% by weight aluminum, d) 0.1% to 1.4% by weight silicon, e) 0.1% to 0.8% by weight yttrium, f) 0% to 1.2% by weight carbon, g) 0% to 1% by weight dysprosium, h) 0% to 1% by weight cerium, i) the balance being nickel, and the percentages of a) to i) adding up to 100% by weight. The total amount of tantalum and molybdenum, and the amounts of aluminum and silicon are each critical for avoiding delamination of a top coat from a bond coat.

An ultra-low thermal mass refractory article includes fibers impregnated with a colloidal inorganic oxide. The refractory article has at least one of the following properties: (i) a density of 500 kg/m.sup.3 to 1500 kg/m.sup.3; (ii) a thermal conductivity of 1.0 Wm/K or less at 700° C.; and/or (iii) a linear thermal shrinkage at 1400° C. of less than 2.5%.

The present invention provides a plasma-resistant ceramic member, which includes a substrate and a ceramic coating layer formed on the substrate, in which the ceramic coating layer includes a lower layer consisting of an oxide formed on the substrate, and a surface layer in which an oxide composition component constituting the surface of the ceramic coating layer is surface-modified with a composition containing one or more anions selected from the group consisting of F.sup.− and Cl.sup.−, wherein the surface layer is a layer in which a raw material containing one or more anions selected from the group consisting of F.sup.− and Cl.sup.− is vaporized by heating and adsorbed to the surface of the ceramic coating layer, and thus modified with a composition containing one or more anions selected from the group consisting of F.sup.− and Cl.sup.−, and a method of manufacturing the same. According to the present invention, the plasma-resistant property, durability, and etching process stability of the ceramic member may be improved with low costs.

Disclosed is a ceramic sintered body comprising magnesium aluminate spinel of composition MgAl.sub.2O.sub.4 having from 90 to 100% by volume of a cubic crystallographic structure and a density of from 3.47 to 3.58 g/cc, wherein the ceramic sintered body is free of sintering aids. A method of making the ceramic sintered body comprising spinel is also disclosed.

A cubic boron nitride sintered material comprises 30% by volume or more and 99.9% by volume or less of cubic boron nitride grains and 0.1% by volume or more and 70% by volume or less of a binder phase, the cubic boron nitride grain having a carbon content of 0.08% by mass or less, the cubic boron nitride sintered material being free of free carbon.

A ceramic material that has a high resistivity and high corrosion resistance according to the present invention contains magnesium-aluminum oxynitride and has a carbon content of 0.005 to 0.275 mass %.