This invention relates to monodisperse cross-linked hydrogel polymer particles comprising a polymer formed from (a) a hydrophilic vinylic monomer; and (b) a crosslinker comprising at least two vinyl groups. The invention also relates to monodisperse seed particles with a Z-average diameter of from 100 nm to 1500 nm that comprise a plurality of non-crosslinked oligomers of poly N,N-dimethylacrylamide. Also provided are methods of forming the monodisperse cross-linked hydrogel polymer particles and monodisperse seed particles.

A cleaning solution that is used, inter alia, for removal of residue of a photoresist pattern or etching residue, and has exceptional anticorrosion properties with respect to silicon nitride; and a method for cleaning a substrate using the cleaning solution. In a cleaning solution containing a hydrofluoric acid and a solvent, a polymer that includes units derived from a compound of a specific structure having a carboxylic acid amide bond (CON<) and an unsaturated double bond is blended as an anticorrosive agent. Polyvinylpyrrolidone is preferred as the polymer used as the anticorrosive agent.

This invention relates to monodisperse cross-linked hydrogel polymer particles comprising a polymer formed from (a) a hydrophilic vinylic monomer; and (b) a crosslinker comprising at least two vinyl groups. The invention also relates to monodisperse seed particles with a Z-average diameter of from 100 nm to 1500 nm that comprise a plurality of non-crosslinked oligomers of poly N,N-dimethylacrylamide. Also provided are methods of forming the monodisperse cross-linked hydrogel polymer particles and monodisperse seed particles.

This invention relates to monodisperse cross-linked hydrogel polymer particles comprising a polymer formed from (a) a hydrophilic vinylic monomer; and (b) a crosslinker comprising at least two vinyl groups. The invention also relates to monodisperse seed particles with a Z-average diameter of from 100 nm to 1500 nm that comprise a plurality of non-crosslinked oligomers of poly N,N-dimethylacrylamide. Also provided are methods of forming the monodisperse cross-linked hydrogel polymer particles and monodisperse seed particles.

A system for precision polymerization is disclosed comprising at least one Michael-type monomer and a metal compound MR.sup.1R.sup.2R.sup.3 as sole catalyst and initiator, wherein M is aluminum, gallium or indium, each of R.sup.1, R.sup.2, and R.sup.3 independently is CI, F, I, Br, linear, branched or cyclic alkyl, heterocycloalkyl, linear, branched or cyclic alkenyl, heterocycloalkenyl, linear, branched, or cyclic alkenyl, linear, branched, or cyclic alkinyl, heterocycloalkinyl, linear, branched, or cyclic alkoxy, aryl, heteroaryl, aryloxy, silyl, metallocenyl, nitro, nitroso, hydroxy, or carboxyl, wherein each alkyl, alkenyl, alkinyl or alkoxy group independently has up to 12 carbon atoms, wherein each aryl or heteroaryl independently has 5 to 14 ring atoms, wherein any hetero group has at least one hetero atom selected from the group consisting of O, S, and N, wherein each alkyl, alkenyl, alkinyl or alkoxy, heterocycloalkyl, heterocycloalkenyl, heterocycloalkinyl, aryl, heteroaryl, aryloxy group can be substituted by 1 up to the highest possible number of halogen atoms, or at least one electron-donating or electron-withdrawing group; with the proviso that not all three groups R.sup.1, R.sup.2, and R.sup.3 are halogen, hydroxy, or alkoxy or wherein two of R.sup.1, R.sup.2, and R.sup.3 together with M form a substituted or unsubstituted cyclic or heterocyclic group having 3 to 6 atoms, wherein a heterocyclic group has at least one hetero atom selected from the group consisting of O, S, and N; as well as processes for preparing polymers and the polymers obtained therewith.

This invention relates to monodisperse cross-linked hydrogel polymer particles comprising a polymer formed from (a) a hydrophilic vinylic monomer; and (b) a crosslinker comprising at least two vinyl groups. The invention also relates to monodisperse seed particles with a Z-average diameter of from 100 nm to 1500 nm that comprise a plurality of non-crosslinked oligomers of poly N,N-dimethylacrylamide. Also provided are methods of forming the monodisperse cross-linked hydrogel polymer particles and monodisperse seed particles.

This invention relates to monodisperse cross-linked hydrogel polymer particles comprising a polymer formed from (a) a hydrophilic vinylic monomer; and (b) a crosslinker comprising at least two vinyl groups. The invention also relates to monodisperse seed particles with a Z-average diameter of from 100 nm to 1500 nm that comprise a plurality of non-crosslinked oligomers of poly N,N-dimethylacrylamide. Also provided are methods of forming the monodisperse cross-linked hydrogel polymer particles and monodisperse seed particles.

A polymerization method including radically polymerizing a monomer in a polymerization medium comprising a chain transfer agent, and a free radical initiator prepared by oxidizing a reaction product of a ligand-reactive decomplexation agent and an alkyl-borane complex of the formula:

##STR00001##

wherein R.sub.1, R.sub.2, and R.sub.3 are independently selected from hydrogen, an alkyl group containing from 1 to 12 carbon atoms, a cycloalkyl group containing from 3-12 carbon atoms, and an aryl group containing from 6 to 12 carbon atoms, wherein the aryl group may be optionally substituted with an alkyl group having from 1 to 10 carbon atoms, and at least one of R.sub.1, R.sub.2, and R.sub.3 is an alkyl group, a cycloalkyl group or an aryl group, and L is a complexing agent selected from one or more amine groups, amidine groups, hydroxide groups, alkoxyl groups, alkyl ether groups, alkoxide groups and mixtures thereof.

Described herein are embodiments of compositions and methods relating to three-dimensional (3D) printing. Some embodiments are directed to a composition comprising a polymer with one or more dormant functional groups. According to some embodiments, the polymer may be formed through a controlled radical polymerization method. Some embodiments are directed to a composition comprising a polymer with one or more pendent crosslinkable groups. In some cases, the composition may be used as an ink for 3D printing. For example, the composition may be injected into a medium. The composition and/or medium may, in some embodiments, further comprise an initiator and/or a crosslinker. After injection of the composition into the medium, the one or more dormant functional groups and/or one or more pendent crosslinkable groups may be activated, and the polymer may be crosslinked. In certain cases, the crosslinked polymer may be removed from the medium to produce a freestanding three-dimensional structure.

Described herein are embodiments of compositions and methods relating to three-dimensional (3D) printing. Some embodiments are directed to a composition comprising a polymer with one or more dormant functional groups. According to some embodiments, the polymer may be formed through a controlled radical polymerization method. Some embodiments are directed to a composition comprising a polymer with one or more pendent crosslinkable groups. In some cases, the composition may be used as an ink for 3D printing. For example, the composition may be injected into a medium. The composition and/or medium may, in some embodiments, further comprise an initiator and/or a crosslinker. After injection of the composition into the medium, the one or more dormant functional groups and/or one or more pendent crosslinkable groups may be activated, and the polymer may be crosslinked. In certain cases, the crosslinked polymer may be removed from the medium to produce a freestanding three-dimensional structure.