A chemical-mechanical polishing (CMP) system includes a head, a polishing pad, and a magnetic system. The slurry used in the CMP process contains magnetizable abrasives. Application and control of a magnetic field, by the magnetic system, allows precise control over how the magnetizable abrasives in the slurry may be drawn toward the wafer or toward the polishing pad.

An abrasive grain is disclosed and may include an elongated body. The body may define a length (l), a width (w), and a height (h), where the length is the longest dimension. The elongated body may have a first end face, a second end face, and a side surface extending between the first end face and the second end face. The body can include a twist along an axis body.

The present invention provides a method for producing a polishing composition which can polish an object to be polished at a high polishing speed and with fewer scratches (defects). The present invention is a method for producing a polishing composition, the method including: preparing silica in which an intensity of a peak of a silica four-membered ring structure and an intensity of a peak derived from a silica random network structure when analyzed by Raman spectroscopy satisfy a predetermined requirement; and mixing the silica with a dispersing medium.

Various shaped abrasive particles are disclosed. Each shaped abrasive particle includes a body having at least one major surface and another surface extending from the major surface.

A bonded abrasive article comprises a bonded abrasive matrix. The bonded abrasive matrix comprises, based on the total weight of the bonded abrasive matrix: 10 to 30 weight percent of phenolic binder; abrasive particles retained in the phenolic binder; and from 0.001 to 9 weight percent of ethyl maltol. Methods of making and using are also disclosed.

A functional abrasive particle comprises a ceramic body having at least one hole extending therethrough. A functional material is at least partially disposed within the hole. The functional material contains a binder and functional particles that are magnetizable, metallic, or both. Methods of making functional abrasive particles, and abrasive articles including them are also disclosed.

Various shaped abrasive particles are disclosed. Each shaped abrasive particle includes a body having at least one major surface and another surface extending from the major surface.

Provided are electrofused alumina grains capable of preventing grain binding on production and of achieving high grinding performance. The electrofused alumina grains of the present invention contain at least either one of tungsten or molybdenum.

The formed ceramic abrasive particle includes a plurality of ceramic oxides. The particle further includes a first plurality of oxides, a second plurality of oxides, or a mixture thereof. The first plurality of oxides includes an oxide of yttrium, praseodymium, samarium, ytterbium, neodymium, lanthanum, gadolinium, dysprosium, erbium, or a combination thereof. The second plurality of oxides includes an oxide of iron, magnesium, zinc, silicon, cobalt, nickel, zirconium, hafnium, chromium, cerium, titanium, or a combination thereof. The formed ceramic abrasive particle further includes a plurality of edges, each edge having a length independently ranging from about 0.1 m to about 5000 m. The formed ceramic abrasive particle further includes a tip defined by a junction of at least two of the edges, the tip can have a radius of curvature ranging from about 0.5 m to about 80 m.

An abrasive article including a body having a bond material extending throughout the body and including at least 8 wt % aluminum oxide (Al.sub.2O.sub.3) for a total weight of the bond material, and also including unagglomerated abrasive particles including silicon carbide (SiC) contained within the bond material and present in an amount of greater than 30 vol % for a total volume of the body.