An article includes a substrate, a ceramic barrier coating, and a layer of networked ceramic nanofibers. The ceramic barrier coating is disposed on the substrate and has a porous columnar microstructure. The layer of networked ceramic nanofibers is disposed on the ceramic barrier layer and seals the pores of the porous columnar microstructure.

A chamber component comprises a body and a plasma sprayed ceramic coating on the body. The plasma sprayed ceramic coating is applied using a method that includes feeding powder comprising a yttrium oxide containing solid solution into a plasma spraying system, wherein the powder comprises a majority of donut-shaped particles, each of the donut-shaped particles having a spherical body with indentations on opposite sides of the spherical body. The method further includes plasma spray coating the body to apply a ceramic coating onto the body, wherein the ceramic coating comprises the yttrium oxide containing solid solution, wherein the donut-shaped particles cause the ceramic coating to have an improved morphology and a decreased porosity as compared to powder particles of other shapes, wherein the improved surface morphology comprises a reduced amount of surface nodules.

A chamber component comprises a body and a plasma sprayed ceramic coating on the body. The plasma sprayed ceramic coating is applied using a method that includes feeding powder comprising a yttrium oxide containing solid solution into a plasma spraying system, wherein the powder comprises a majority of donut-shaped particles, each of the donut-shaped particles having a spherical body with indentations on opposite sides of the spherical body. The method further includes plasma spray coating the body to apply a ceramic coating onto the body, wherein the ceramic coating comprises the yttrium oxide containing solid solution, wherein the donut-shaped particles cause the ceramic coating to have an improved morphology and a decreased porosity as compared to powder particles of other shapes, wherein the improved surface morphology comprises a reduced amount of surface nodules.

The present invention is directed to methods for formation of refractory carbide, nitride, and boride coatings without use of a binding agent. The present invention is directed to methods of creating refractory coatings with controlled porosity. Refractory coatings can be formed from refractory metal, metal oxide, or metal/metal oxide composite refractory coating precursor of the 9 refractory metals encompassed by groups 4-6 and periods 4-6 of the periodic table; non-metallic elements (e.g. Si & B) and their oxides (i.e. SiO.sub.2 & B.sub.2O.sub.3) are also pertinent. The conversion of the refractory coating precursor to refractory carbide, nitride or boride is achieved via carburization, nitridization, or boridization in the presence of carbon-containing (e.g. CH.sub.4), nitrogen containing (e.g. NH.sub.3), and boron-containing (e.g. B.sub.2H.sub.6) gaseous species. Any known technique of applying the refractory coating precursor can be used. The porosity of resultant refractory coatings is controlled through compositional manipulation of composite refractory coating precursors.

The present invention is directed to methods for formation of refractory carbide, nitride, and boride coatings without use of a binding agent. The present invention is directed to methods of creating refractory coatings with controlled porosity. Refractory coatings can be formed from refractory metal, metal oxide, or metal/metal oxide composite refractory coating precursor of the 9 refractory metals encompassed by groups 4-6 and periods 4-6 of the periodic table; non-metallic elements (e.g. Si & B) and their oxides (i.e. SiO.sub.2 & B.sub.2O.sub.3) are also pertinent. The conversion of the refractory coating precursor to refractory carbide, nitride or boride is achieved via carburization, nitridization, or boridization in the presence of carbon-containing (e.g. CH.sub.4), nitrogen containing (e.g. NH.sub.3), and boron-containing (e.g. B.sub.2H.sub.6) gaseous species. Any known technique of applying the refractory coating precursor can be used. The porosity of resultant refractory coatings is controlled through compositional manipulation of composite refractory coating precursors.

This application relates to a method of manufacturing an electrostatic chuck having a high heat dissipation property and high thermal shock resistance and being lightweight, and an electrostatic chuck manufactured by the method. In one aspect, the method includes preparing a composite powder by milling (i) aluminum or aluminum alloy powder and (ii) carbon-based nanomaterial powder through ball milling. The method may also include manufacturing a multilayer billet including a core layer and one or more shell layers surrounding the core layer, in which at least one of the core and shell layers contains the composite powder. The method may further include extruding the multilayer billet to form an electrode layer and forming a dielectric layer on the electrode layer.

This application relates to a method of manufacturing an electrostatic chuck having a high heat dissipation property and high thermal shock resistance and being lightweight, and an electrostatic chuck manufactured by the method. In one aspect, the method includes preparing a composite powder by milling (i) aluminum or aluminum alloy powder and (ii) carbon-based nanomaterial powder through ball milling. The method may also include manufacturing a multilayer billet including a core layer and one or more shell layers surrounding the core layer, in which at least one of the core and shell layers contains the composite powder. The method may further include extruding the multilayer billet to form an electrode layer and forming a dielectric layer on the electrode layer.

This application relates to a method of manufacturing an electrostatic chuck having good characteristics in heat dissipation, thermal shock resistance, and lightness. In one aspect, the method includes preparing a composite powder by ball-milling (i) aluminum or aluminum alloy powder and (ii) carbon-based nanomaterial powder. The method may also include preparing an electrode layer by sintering the composite powder through spark plasma sintering (SPS), and forming a dielectric layer on the electrode layer.

This application relates to a method of manufacturing an electrostatic chuck having good characteristics in heat dissipation, thermal shock resistance, and lightness. In one aspect, the method includes preparing a composite powder by ball-milling (i) aluminum or aluminum alloy powder and (ii) carbon-based nanomaterial powder. The method may also include preparing an electrode layer by sintering the composite powder through spark plasma sintering (SPS), and forming a dielectric layer on the electrode layer.

Disclosed is a thermal barrier coating system for components of a turbomachine, especially for high temperature-stressed or hot gas-stressed components of a turbomachine, comprising a ceramic coating of fully or partially stabilized zirconium oxide, and an oxide cover coating which comprises aluminum and at least one element from the group lanthanum, magnesium, silicon, calcium and sodium. The aluminum oxide exists at least partially as free α-Al.sub.2O.sub.3. Also disclosed is a method for producing a corresponding thermal barrier coating system.