A component for a plasma processing apparatus includes a substrate and a film on at least a part of the substrate. The film includes an oxide, a fluoride, an oxyfluoride, or a nitride of a rare earth element. A ratio σ22/σ11 of a compressive stress σ11 to occur across a surface of the film to be exposed to plasma and a compressive stress σ22 to occur across the surface in a direction perpendicular to the compressive stress σ11 is 5 or less. A plasma processing apparatus includes the above component.

This disclosure provides a package structure for a semiconductor device, comprising a three-layer film consisting of a first SiO.sub.2 film, a Si.sub.3N.sub.4 film and a second SiO.sub.2 film stacked in this order, wherein the first SiO.sub.2 film is formed by a thermal oxidation process, the Si.sub.3N.sub.4 film is formed by a low pressure chemical vapor deposition process, and the second SiO.sub.2 film is formed by a low temperature atomic layer deposition process. This disclosure also provides a method for preparing the package structure for a semiconductor device.

This disclosure provides a package structure for a semiconductor device, comprising a three-layer film consisting of a first SiO.sub.2 film, a Si.sub.3N.sub.4 film and a second SiO.sub.2 film stacked in this order, wherein the first SiO.sub.2 film is formed by a thermal oxidation process, the Si.sub.3N.sub.4 film is formed by a low pressure chemical vapor deposition process, and the second SiO.sub.2 film is formed by a low temperature atomic layer deposition process. This disclosure also provides a method for preparing the package structure for a semiconductor device.

Producing a Ni superalloy component in which the superalloy has a γ phase matrix containing intermetallic γ′ precipitates. Providing a Ni superalloy casting of the component; solutioning the component by heat treating the casting under vacuum and/or in an inert atmosphere at a temperature above the γ′ solvus to homogenize the γ phase; quenching and ageing the solutioned component to grow intermetallic γ′ precipitates in the homogenized γ phase. Before the solutioning step: heat treating the casting to produce a thermally grown oxide on the surface, oxide adherent to supress volatilization of Ni from the surface of the casting during the solutioning heat treatment. Performing the solutioning step under a Ni vapor pressure which is sufficient to supress volatilization of Ni from the surface of the casting during the solutioning heat treatment. During the solutioning heat treatment the component is encapsulated in a container protecting the casting from Si-doped contaminants.

Producing a Ni superalloy component in which the superalloy has a γ phase matrix containing intermetallic γ′ precipitates. Providing a Ni superalloy casting of the component; solutioning the component by heat treating the casting under vacuum and/or in an inert atmosphere at a temperature above the γ′ solvus to homogenize the γ phase; quenching and ageing the solutioned component to grow intermetallic γ′ precipitates in the homogenized γ phase. Before the solutioning step: heat treating the casting to produce a thermally grown oxide on the surface, oxide adherent to supress volatilization of Ni from the surface of the casting during the solutioning heat treatment. Performing the solutioning step under a Ni vapor pressure which is sufficient to supress volatilization of Ni from the surface of the casting during the solutioning heat treatment. During the solutioning heat treatment the component is encapsulated in a container protecting the casting from Si-doped contaminants.

There is provided a titanium alloy member including a base metal portion, and an outer hardened layer formed on an outer layer of the base metal portion, the cross sectional hardness of the base metal portion is 330 HV or higher and lower than 400 HV, the cross sectional hardnesses at positions 5 μm and 15 μm from the surface of the outer hardened layer are 450 HV or higher and lower than 600 HV, the outer hardened layer includes an oxygen diffusion layer and a nitrogen diffusion layer, the oxygen diffusion layer is at a depth of 40 to 80 μm from the surface of the outer hardened layer, and the nitrogen diffusion layer is at a depth of 2 to 5 μm from surface of the outer hardened layer. This titanium alloy member includes an outer hardened layer, is high in cross sectional hardness of the base metal portion, and is excellent in fatigue strength and wear resistance.

Method for the preoxidation of high-strength strip steel. The invention relates to an improved method for the preoxidation of high-strength strip steel in a reaction chamber arranged in a furnace chamber. The reaction chamber is sealed at a strip entrance and a strip exit against gas exchange between the furnace chamber and the reaction chamber, and a gas that forms an oxidizing atmosphere in the reaction chamber is introduced, and the gas is continuously circulated within the reaction chamber

A system and method are detailed for aluminizing surfaces of metallic substrates, parts, and components with a protective alumina layer in-situ. Aluminum (Al) foil sandwiched between the metallic components and a refractory material when heated in an oxidizing gas under a compression load at a selected temperature forms the protective alumina coating on the surface of the metallic components. The alumina coating minimizes evaporation of volatile metals from the metallic substrates, parts, and components in assembled devices that can degrade performance during operation at high temperature.

A system and method are detailed for aluminizing surfaces of metallic substrates, parts, and components with a protective alumina layer in-situ. Aluminum (Al) foil sandwiched between the metallic components and a refractory material when heated in an oxidizing gas under a compression load at a selected temperature forms the protective alumina coating on the surface of the metallic components. The alumina coating minimizes evaporation of volatile metals from the metallic substrates, parts, and components in assembled devices that can degrade performance during operation at high temperature.

A method for producing hardened steel components is provided. Sheet bars are cut out from an alloy-galvanized strip made of a hardenable steel alloy and the sheet bars are heated to a temperature that produces a structural change to austenite, preferably to a temperature above the respective Ac3 point. The austenitized sheet bars are then conveyed to a press hardening tool in which the sheet bars are hot formed in a single stroke or multiple strokes by means of an upper and lower tool, wherein the formed sheet bar is cooled against the tools at a speed above the critical cooling rate so that a martensitic hardening occurs.After the galvanization, which can be hot-dip galvanization of the steel strip and before the temperature increase for achieving the austenitization, tin is applied to the surface of the strip or sheet bar.