C23C8/24

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND METHOD FOR PRODUCING NANOWIRE OR NANOSHEET TRANSISTOR

The present disclosure appropriately shortens a processing step for processing a substrate in which a silicon layer and a silicon germanium layer are alternatively laminated. The present disclosure provides a substrate processing method of processing the substrate in which the silicon layer and the silicon germanium layer are alternatively laminated, which includes forming an oxide film by selectively modifying a surface layer of an exposed surface of the silicon germanium layer by using a processing gas including fluorine and oxygen and converted into plasma.

METHOD FOR PRODUCING A SINTERED COMPONENT WITH A TOOTHING

A method for producing a sintered component, in particular an annular sintered component, with a toothing, having teeth with tooth roots, tooth tips and tooth flanks, includes the steps of pressing a powder to form a green compact, sintering the green compact, and hardening the sintered component, wherein after sintering, the tooth flanks and possibly the tooth tips are post-compacted and subsequently undergo post-processing by machining, and wherein a transition region between the tooth flanks and the tooth roots has an undercut design, and post-compaction of the tooth flanks is carried out only up to this transition region.

Methods for in situ formation of dispersoids strengthened refractory alloy in 3D printing and/or additive manufacturing
11519063 · 2022-12-06 ·

Methods of fabricating objects using additive manufacturing are provided. The methods create in situ dispersoids within the object. The methods are used with refractory alloy powders which are pretreated to increase the oxygen content to between 500 ppm and 3000 ppm or to increase the nitrogen content to between 250 ppm and 1500 ppm. The pretreated powders are then formed into layers in an environmentally controlled chamber of an additive manufacturing machine. The environmentally controlled chamber is adjusted to have between 500 ppm and 200 ppm oxygen. The layer of pretreated powder is then exposed to a transient moving energy source for melting and solidifying the layer; and creating in situ dispersoids in the layer.

Methods for in situ formation of dispersoids strengthened refractory alloy in 3D printing and/or additive manufacturing
11519063 · 2022-12-06 ·

Methods of fabricating objects using additive manufacturing are provided. The methods create in situ dispersoids within the object. The methods are used with refractory alloy powders which are pretreated to increase the oxygen content to between 500 ppm and 3000 ppm or to increase the nitrogen content to between 250 ppm and 1500 ppm. The pretreated powders are then formed into layers in an environmentally controlled chamber of an additive manufacturing machine. The environmentally controlled chamber is adjusted to have between 500 ppm and 200 ppm oxygen. The layer of pretreated powder is then exposed to a transient moving energy source for melting and solidifying the layer; and creating in situ dispersoids in the layer.

ACTIVATION OF SELF-PASSIVATING METALS USING REAGENT COATINGS FOR LOW TEMPERATURE NITROCARBURIZATION IN THE PRESENCE OF OXYGEN-CONTAINING GAS

A method for low-temperature interstitial case formation on a self-passivating metal workpiece includes exposing the workpiece in a heated gaseous environment comprising oxygen to pyrolysis products of a nonpolymeric reagent comprising nitrogen and carbon.

High fatigue strength components requiring areas of high hardness
11584969 · 2023-02-21 · ·

Metal components subject to wear or contact fatigue in a first area, and subject to bending, axial and/or torsional stress loading in a second area comprise a surface hardened, first surface layer in the first area, and a surface compressive-stress treated, second surface layer in the second area. The second surface layer has a material hardness different from, and typically lower than, the first surface layer, and induced residual compressive stress to improve fatigue strength. Example components described include a gear, a cog, a pinion, a rack, a splined shaft, a splined coupling, a torqueing tool and a nut driving tool. A hybrid manufacturing process is described, including area-selective surface hardening combined with a process to add compressive stress to fatigue failure prone areas.

METHOD FOR FORMING BINDER-FREE REFRACTORY CARBIDE, NITRIDE AND BORIDE COATINGS WITH A CONTROLLED POROSITY

The present invention is directed to methods for formation of refractory carbide, nitride, and boride coatings without use of a binding agent. The present invention is directed to methods of creating refractory coatings with controlled porosity. Refractory coatings can be formed from refractory metal, metal oxide, or metal/metal oxide composite refractory coating precursor of the 9 refractory metals encompassed by groups 4-6 and periods 4-6 of the periodic table; non-metallic elements (e.g. Si & B) and their oxides (i.e. SiO.sub.2 & B.sub.2O.sub.3) are also pertinent. The conversion of the refractory coating precursor to refractory carbide, nitride or boride is achieved via carburization, nitridization, or boridization in the presence of carbon-containing (e.g. CH.sub.4), nitrogen containing (e.g. NH.sub.3), and boron-containing (e.g. B.sub.2H.sub.6) gaseous species. Any known technique of applying the refractory coating precursor can be used. The porosity of resultant refractory coatings is controlled through compositional manipulation of composite refractory coating precursors.

METHOD FOR FORMING BINDER-FREE REFRACTORY CARBIDE, NITRIDE AND BORIDE COATINGS WITH A CONTROLLED POROSITY

The present invention is directed to methods for formation of refractory carbide, nitride, and boride coatings without use of a binding agent. The present invention is directed to methods of creating refractory coatings with controlled porosity. Refractory coatings can be formed from refractory metal, metal oxide, or metal/metal oxide composite refractory coating precursor of the 9 refractory metals encompassed by groups 4-6 and periods 4-6 of the periodic table; non-metallic elements (e.g. Si & B) and their oxides (i.e. SiO.sub.2 & B.sub.2O.sub.3) are also pertinent. The conversion of the refractory coating precursor to refractory carbide, nitride or boride is achieved via carburization, nitridization, or boridization in the presence of carbon-containing (e.g. CH.sub.4), nitrogen containing (e.g. NH.sub.3), and boron-containing (e.g. B.sub.2H.sub.6) gaseous species. Any known technique of applying the refractory coating precursor can be used. The porosity of resultant refractory coatings is controlled through compositional manipulation of composite refractory coating precursors.

Pre-treatment process of a surface of a metallic substrate
11492693 · 2022-11-08 · ·

Process for pre-treatment of a surface of a chromium containing corrosion resistant metallic substrate prior to further processing, wherein the metallic substrate is brought into contact with an in-situ generated activating agent, being the thermal decomposition product of a hydrofluoroolefin, the substrate and the activating agent are heated, and optionally the activating agent is partly or entirely removed before further processing.

Pre-treatment process of a surface of a metallic substrate
11492693 · 2022-11-08 · ·

Process for pre-treatment of a surface of a chromium containing corrosion resistant metallic substrate prior to further processing, wherein the metallic substrate is brought into contact with an in-situ generated activating agent, being the thermal decomposition product of a hydrofluoroolefin, the substrate and the activating agent are heated, and optionally the activating agent is partly or entirely removed before further processing.