C23C14/246

EVAPORATION CELL FOR VACUUM EVAPORATION CHAMBER AND ASSOCIATED EVAPORATION METHOD
20210115551 · 2021-04-22 ·

The invention relates to an evaporation cell (1) for vacuum evaporation chamber, the evaporation cell (1) comprising a crucible (5), the crucible (5) being adapted to receive a solid or liquid material to be sublimated or evaporated, heating means (3) to heat the material in the crucible, a nozzle (6) placed at an open end of the crucible (5), the nozzle (6) comprising a frustoconical portion (61) having an opening (60) adapted for the passage of a flow of evaporated or sublimated material towards the vacuum evaporation chamber, and a cover (7) placed on the nozzle (6), the cover (7) having an opening (70) arranged about the frustoconical portion (61) of the nozzle (6). According to the invention, the cover (7) has at least one frustoconical portion (71, 72, 73) arranged about the frustoconical portion (61) of the nozzle (6), the cover (7) forming a thermal barrier between the crucible (5) and the vacuum evaporation chamber.

CO-DESPOSITION OF CESIUM TELLURIDE PHOTOCATHODE AND X-RAY FLUORESCENCE CONTROLLER CO-DEPOSITION OF CESIUM TELLURIDE PHOTOCATHODE

One or more embodiments relates to a system and method for growing ultrasmooth and high quantum efficiency photocathodes. The method includes exposing a substrate of Si wafer to an alkali source; controlling co-evaporating growth and co-deposition forming a growth including Te; and monitoring a stoichiometry of the growth, forming the photocathodes.

FILL VESSELS AND CONNECTORS FOR CHEMICAL SUBLIMATORS
20210071301 · 2021-03-11 ·

Herein disclosed are systems and methods related to solid source chemical intermediate fill vessels. The fill vessel can include a proximate end, a distal end, and a base disposed at the proximate end that is configured to hold solid source chemical reactant therein. The intermediate fill vessel can further include a lid at the distal end comprising a second thermal conductor. The lid can include a chemical inlet, a carrier gas inlet, and a chemical outlet. The fill vessel can further include an intermediate layer that is disposed between the base and the lid. The intermediate layer may include an insulator that is configured to reduce heat flow between the base and the lid.

DEPOSITION APPARATUS AND DEPOSITION METHOD

Provided is an apparatus and a method that is capable of performing continuous coating at a constant coating composition and rate. One embodiment is a deposition apparatus for coating two or more compounds or elements on a substrate, the apparatus comprising: a supply unit for supplying the two or more compounds or elements to a plurality of solid bodies; a heating unit for melting and evaporating the solid bodies supplied from the supply unit to form vapor; a buffer unit, connected to the heating unit, in which the vapor stays and is mixed with previously generated vapor; and a nozzle connected to the buffer unit and having an opening toward the substrate.

MULTILAYERED ZINC ALLOY PLATED STEEL MATERIAL HAVING EXCELLENT SPOT WELDABILITY AND CORROSION RESISTANCE
20210002772 · 2021-01-07 ·

Provided is a multilayered zinc alloy plated steel material comprising a base iron and multilayered plated layers formed on the base iron, wherein each of the multilayered plated layers is any one of a Zn-plated layer, a Mg-plated layer, and a ZnMg alloy-plated layer, and the ratio of the weight of Mg contained in the multilayered plated layers is 0.13-0.24 on the basis of the total weight of the multilayered plated layers.

Recurring process for laser induced forward transfer and high throughput and recycling of donor material by the reuse of a plurality of target substrate plates or forward transfer of a pattern of discrete donor dots

The technology disclosed relates to high utilization of donor material in a writing process using Laser-Induced Forward Transfer. Specifically, the technology relates to reusing, or recycling, unused donor material by recoating target substrates with donor material after a writing process is performed with the target substrate. Further, the technology relates to target substrates including a pattern of discrete separated dots to be individually ejected from the target substrate using LIFT.

METAL DROPLET JETTING SYSTEM
20200376596 · 2020-12-03 ·

Systems and methods for additive manufacturing, and, in particular, such methods and apparatus as employ pulsed lasers or other heating arrangements to create metal droplets from donor metal micro wires, which droplets, when solidified in the aggregate, form 3D structures. A supply of metal micro wire is arranged so as to be fed towards a nozzle area by a piezo translator. Near the nozzle, an end portion of the metal micro wire is heated (e.g., by a laser pulse or an electric heater element), thereby causing the end portion of the metal micro wire near the nozzle area to form a droplet of metal. A receiving substrate is positioned to receive the droplet of metal jetted from the nozzle area.

Method and apparatus for manufacturing display apparatus

An apparatus for manufacturing a display apparatus includes: a chamber; a plurality of source units outside the chamber, wherein the plurality of source units which accommodate a deposition material and transform the deposition material into gas; a nozzle unit in the chamber, wherein the nozzle unit is connected to the plurality of source units and injects, into the chamber, the deposition material supplied from one of the plurality of source units; and a regulating unit between each of the plurality of source units and the nozzle unit, wherein the regulating unit interrupts the deposition material supplied from each of the plurality of source units to the nozzle unit and selectively connects the plurality of source units with the nozzle unit.

Arc evaporation device

An arc evaporation device includes a bar-shaped target having a front end surface and a side surface to be melted and evaporated from the front end surface by arc discharge; an arc power supply; a target feed unit which moves the target axially and in a feed direction; an ignition rod capable of contact with the side surface of the target, in an intersecting direction intersecting the feed direction; a rotary actuator which moves the ignition rod along the intersecting direction from a retraction position apart from the side surface in the intersecting direction to make the ignition rod enter a transport region into which the target is fed; and a detection unit which detects whether or not the ignition rod has come into contact with the side surface of the target during movement of the ignition rod.

CABINET FOR SOLID MATERIAL CONTAINER
20200362454 · 2020-11-19 ·

A cabinet for a solid material container comprises a main body having a top wall, a side wall, and a bottom wall; an entry/exit portion which is attached to a portion of the main body, for putting in and taking out the solid material container; an exhaust duct attached to a portion of the main body; a heating portion for heating the solid material container; a temperature measuring portion for measuring a temperature of the solid material container, or of the heating portion; and a cooling blower for blowing cooling air toward the solid material container.