Patent classifications
C23C14/246
Metal droplet jetting system
Systems and methods for additive manufacturing, and, in particular, such methods and apparatus as employ pulsed lasers or other heating arrangements to create metal droplets from donor metal micro wires, which droplets, when solidified in the aggregate, form 3D structures. A supply of metal micro wire is arranged so as to be fed towards a nozzle area by a piezo translator. Near the nozzle, an end portion of the metal micro wire is heated (e.g., by a laser pulse or an electric heater element), thereby causing the end portion of the metal micro wire near the nozzle area to form a droplet of metal. A receiving substrate is positioned to receive the droplet of metal jetted from the nozzle area.
Device for forming coatings on surfaces of a component, band-shaped material, or tool
A device for forming coatings on surfaces of a component, band-shaped material, or tool, in which at least one wire-shaped or band-shaped material is used for forming the coating and that is/are connected to a direct electrical current source, wherein an electric arc is formed between wire-shaped materials or between one wire-shaped or band-shaped material and one anode or cathode, wherein wire-shaped or band-shaped material may be fed by means of a feed device; and melted and/or evaporated material of the wire-shaped or band-shaped material flows, by means of a gas jet of a gas or gas mixture, through an inlet into the interior of a chamber that can be heated to a temperature that is at least equal to the evaporation temperature of the at least one material used for the coating or of the material with the highest evaporation temperature, and the material(s) completely evaporates and exits through at least one opening present on the chamber and impinges on the surface to be coated of the component or tool for forming the coating.
APPARATUS FOR AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Disclosed are an apparatus for and a method of manufacturing a semiconductor device, The apparatus includes a chamber, an evaporator that evaporates an organic source to provide a source gas on a substrate in the chamber, a vacuum pump that pumps the source gas and air from the chamber, an exhaust line between the vacuum, pump and the chamber, and an analyzer connected to the exhaust line. The analyzer detects a derived molecule produced from the organic source and determines a replacement time of the evaporator.
Device and method of evaporating a material from a metal melt
A device for evaporating a metal melt, the device comprising a first crucible or crucible portion operative to receive the metal melt comprising at least one aperture, from which the evaporated metal may pass off, a second crucible or crucible portion operative to receive a susceptor material, comprising an electromagnetic radiation source, which is arranged such that it can heat susceptor material comprised in the second crucible or crucible portion through incident electromagnetic induction, wherein it does not or only negligibly heats the metal melt in the first crucible or crucible portion, wherein the first crucible or crucible portion and the second crucible or crucible portion are thermally coupled, such that the metal melt can attain a desired temperature.
Evaporator body with titanium hydride coating, method for the production and usage thereof
An evaporator body for a PVD coating system comprises a basic body and an evaporator surface, to which a titanium dihydride layer is applied. A titanium hydride layer comprises an organic carrier agent and titanium hydride as the single inorganic solid. The thickness of the layer is less than or equal to 10 m.
APPARATUS FOR VACUUM PROCESSING OF A SUBSTRATE, SYSTEM FOR THE MANUFACTURE OF DEVICES HAVING ORGANIC MATERIALS, AND METHOD FOR SEALING A PROCESSING VACUUM CHAMBER AND A MAINTENANCE VACUUM CHAMBER FROM EACH OTHER
The present disclosure provides an apparatus for vacuum processing of a substrate. The apparatus includes a processing vacuum chamber, a maintenance vacuum chamber, an opening for transferring at least a portion of a material deposition source between the processing vacuum chamber and the maintenance vacuum chamber, and a magnetic closing arrangement for magnetically closing the opening.
Baffle device for evaporation apparatus and evaporation apparatus
The present disclosure provides a baffle device for an evaporation apparatus and the evaporation apparatus. The baffle device includes a baffle assembly, configured to separate an evaporation ejection source from a substrate when the substrate is being switched in the evaporation apparatus; and at least one collection device, provided below the baffle assembly, and configured to collect evaporation material falling down from the baffle assembly.
SOLID MATERIAL CONTAINER AND SOLID MATERIAL PRODUCT WITH SOLID MATERIAL FILLED IN SOLID MATERIAL CONTAINER
A solid material container for supplying solid materials housed inside by evaporating the solid materials, and includes a carrier gas introduction line, a first filling section that is filled with the solid material, a second filling section that is located in at least a part of an outer periphery of the first filling section, and is filled with the solid material, at least one tray-shaped third filling section that is disposed on the ceiling side of an interior of the solid material container, and a solid material lead-out line.
Evaporator body with titanium hydride coating, method for the production and usage thereof
An evaporator body for a PVD coating system comprises a basic body and an evaporator surface, to which a titanium dihydride layer is applied. A titanium hydride layer comprises an organic carrier agent and titanium hydride as the single inorganic solid. The thickness of the layer is less than or equal to 10 m.
A coated metallic substrate
A coated metallic substrate including at least a first coating of aluminum, such first coating having a thickness below 5 m and being directly topped by a second coating including from 0.5 to 5.9% by weight of magnesium, the balance being zinc.