There is provided a substrate processing apparatus for performing film formation by supplying a processing gas to a substrate, including: a rotary table provided in a processing container; a mounting stand provided to mount the substrate and configured to be revolved by rotating the rotary table; a processing gas supply part configured to supply a processing gas to a region through which the mounting stand passes by the rotation of the rotary table; a rotation shaft rotatably provided in a portion rotating together with the rotary table and configured to support the mounting stand; a driven gear provided on the rotation shaft; a driving gear provided along an entire circumference of a revolution trajectory of the driven gear to face the revolution trajectory of the driven gear and configured to constitute a magnetic gear mechanism with the driven gear; and a rotating mechanism configured to rotate the driving gear.

A method of producing a film of carbon nitride material, including the steps of providing a precursor of the carbon nitride material in a reacting vessel and a substrate substantially above the precursor of the carbon nitride material; heating the reacting vessel, the precursor of the carbon nitride material and the substrate at the first predetermined temperature; and quenching the reacting vessel to reach the second predetermined temperature; wherein the film of carbon nitride material is formed on a surface of the substrate during the quenching of the reacting vessel.

An effusion cell includes a crucible for containing material to be evaporated or sublimated, a delivery tube configured to deliver evaporated or sublimated material originating from the crucible into a chamber, a supply tube extending from the crucible, the supply tube located and configured to trap condensate originating from the evaporated or sublimated material and to deliver the condensate back to the crucible, and at least one heating element located and configured to heat material in the crucible so as to cause evaporation or sublimation of the material and flow of the evaporated or sublimated material through the delivery tube and out from the effusion cell. The effusion cell is configured such that the crucible can be filled with the material to be evaporated or sublimated without removing the effusion cell from the process vacuum chamber. Semiconductor substrate processing systems may include such effusion cells.

One or more heating assemblies for a material deposition apparatus for pre-heating a substrate before entering a material deposition area and/or for post-heating the substrate after exiting the material deposition area are described.

One or more heating assemblies for a material deposition apparatus for pre-heating a substrate before entering a material deposition area and/or for post-heating the substrate after exiting the material deposition area are described.

The present invention provides a heating device for evaporation of an OLED material, which includes a crucible (1) for receiving and containing therein an OLED material (10), a lower heating coil (2) surrounding outside an outer circumference of the body section (11) of the crucible (1), an upper heating coil (3) surrounding outside an outer circumference of the top cover section (13) of the crucible (1), a lower thermally conductive temperature homogenizing sleeve (4) arranged between the body section (11) and the lower heating coil (2), an upper thermally conductive temperature homogenizing sleeve (5) arranged between the top cover section (13) and the upper heating coil (3), and a thermal insulation ring (6) arranged between the upper and lower thermally conductive temperature homogenizing sleeves (5, 4). The upper and lower heating coils (3, 2) are each connected to a power supply for individually controlling a heating temperature of each of the top cover section (13) and the body section (11). The heating device prevents gaseous molecules of the OLED material (10) from getting condensed and solidified at a gas release hole (131) of the crucible (1) so as to prevent jamming and blocking of the gas release hole (131).

The present invention provides a heating device for evaporation of an OLED material, which includes a crucible (1) for receiving and containing therein an OLED material (10), a lower heating coil (2) surrounding outside an outer circumference of the body section (11) of the crucible (1), an upper heating coil (3) surrounding outside an outer circumference of the top cover section (13) of the crucible (1), a lower thermally conductive temperature homogenizing sleeve (4) arranged between the body section (11) and the lower heating coil (2), an upper thermally conductive temperature homogenizing sleeve (5) arranged between the top cover section (13) and the upper heating coil (3), and a thermal insulation ring (6) arranged between the upper and lower thermally conductive temperature homogenizing sleeves (5, 4). The upper and lower heating coils (3, 2) are each connected to a power supply for individually controlling a heating temperature of each of the top cover section (13) and the body section (11). The heating device prevents gaseous molecules of the OLED material (10) from getting condensed and solidified at a gas release hole (131) of the crucible (1) so as to prevent jamming and blocking of the gas release hole (131).

Provided are a Zn—Mg alloy plated steel sheet and a method for manufacturing same. The Zn—Mg alloy plated steel sheet comprises a base steel sheet and a Zn—Mg plating layer formed on the base steel sheet, wherein the content of Mg in the Zn—Mg plating layer is 8 weight % or less (provided that 0 weight % is excluded), and the Zn—Mg plating layer is a compound phase of Zn and Mg2Zn11. According to the present invention, provided are a Zn—Mg alloy plated steel sheet and a method for manufacturing the same, wherein the Zn—Mg alloy plated steel sheet has excellent corrosion resistance, high adhesion, and superior surface quality of metallic luster.

Provided are a Zn—Mg alloy plated steel sheet and a method for manufacturing same. The Zn—Mg alloy plated steel sheet comprises a base steel sheet and a Zn—Mg plating layer formed on the base steel sheet, wherein the content of Mg in the Zn—Mg plating layer is 8 weight % or less (provided that 0 weight % is excluded), and the Zn—Mg plating layer is a compound phase of Zn and Mg2Zn11. According to the present invention, provided are a Zn—Mg alloy plated steel sheet and a method for manufacturing the same, wherein the Zn—Mg alloy plated steel sheet has excellent corrosion resistance, high adhesion, and superior surface quality of metallic luster.

A method of forming metal nanostructures is a low temperature closed space vacuum deposition method. The method includes disposing a source material in an enclosed space at low evaporation temperatures to controllably form nanostructures of different dimensionalities on a substrate. The nanostructures have dimensionalities determined by a chosen evaporation temperature. An apparatus is also provided for performing the method.