Patent classifications
C23C14/505
Coating film, manufacturing method therefor, and PVD apparatus
The purpose of the invention is to provide technology, which, in addition to being capable of forming thick hard carbon films of excellent durability even using PVD, is able to establish both chipping resistance and wear resistance in the formed hard carbon film and able to improve low friction properties and peeling resistance. Provided is a coating film to be coated on the surface of a substrate, the coating film having a total film thickness of greater than 1 μm to 50 μm wherein: when a cross-section is observed using bright field TEM images, white hard carbon layers that are shown as relatively white and black hard carbon layers that are shown as black are alternately laminated in the thickness direction; and the white hard carbon layers have regions that have grown in a fan-shape in the thickness direction.
SUBSTRATE TREATMENT APPARATUS AND METHOD THEREOF
Provided are a substrate treatment apparatus and method for treating a substrate by simultaneously providing a stripper for peeling a coating film on the substrate to an entire surface of the substrate. The substrate treatment method includes discharging a first liquid onto a substrate by using a first nozzle, and forming a coating film collecting particles by using the first liquid; spraying a second liquid on the substrate by using a second nozzle, and peeling the coating film from the substrate by using the second liquid; and discharging a third liquid onto the substrate by using a third nozzle, and rinsing the coating film from the substrate by using the third liquid, wherein in the peeling of the coating film, the second liquid is simultaneously sprayed on an entire surface of the substrate.
IMPLANT FOR USE IN THE CARDIOVASCULAR SYSTEM
An implant for the cardiovascular system is provided, the implant is insertable into an organ and includes a body structure configured to be disposed inside an organ; and an electret coating disposed on the body structure; wherein the electret coating includes a negative charge such that a negative electrostatic field is formed in proximity of the body structure, the charge is such that the negative electrostatic field corresponds to a positive electrostatic field formed by a damaged tissue of the organ.
Method and apparatus for producing low-particle layers on substrates
The invention relates to methods and devices for producing one or more low-particle layers on substrates in a vacuum. The layers are deposited onto the substrate from a cylindrical source material, optionally together with a reactive gas component, by means of magnetron sputtering. The layer is deposited against the force of gravity in a sputter-up method. During the method or within the device, the structure or stochiometric atomic composition of the layers can optionally be modified using a plasma source. Multiple sputtering sources with different source materials can be provided in the device such that multiple layers of different compositions can be applied on the substrate at a high speed in one process.
System and method for providing a protective layer having a graded intermediate layer
A method of providing an apparatus with a protective layer by simultaneously depositing carbon and seed material on the apparatus to form an intermediate layer, wherein the carbon and seed material have a percentage composition that varies as a function of the intermediate layer thickness; and then providing a diamond-like carbon (DLC) layer adjacent to the intermediate layer to produce the protective layer.
ELECTRONIC COMPONENT AND MANUFACTURING METHOD THEREOF
To provide an electronic component having a protective film formed with good uniformity, over the entire surface thereof. The electronic component has a protective film formed over the entire surface thereof, and the electronic component has elements and wirings formed on a base body. The protective film is formed by a CVD method, over an entire surface of the electronic component, by: arranging an electrode in a chamber; grounding one side of the chamber and the electrode; accommodating the electronic component in the chamber; supplying a raw material gas to the chamber; rotating or swinging the chamber and thereby moving the electronic component in the chamber; supplying high-frequency power to the other side of the chamber and the electrode; and generating a raw-material-gas-based plasma between the electrode and the chamber.
CARBIDE TOOL CLEANING AND COATING PRODUCTION LINE AND METHOD
A carbide tool cleaning and coating production line and a method. The production line includes a cleaning and a coating device. A manipulator is disposed between the devices. The cleaning device includes a support frame, cleaning mechanism, and drying mechanism sequentially disposed under the frame, which is connected to a moving mechanism connected to a lifting mechanism capable of being connected to a tool fixture bracket, which is configured to accommodate the tool fixture. The coating device includes a coating chamber, a plane target mechanism disposed in the coating chamber, a turntable assembly also disposed in the coating chamber, which is capable of being connected to a plurality of tool fixtures, and the tool fixture is capable of rotating around an axial line of the coating chamber under the driving of the turntable assembly, and rotating around an axial line thereof at the same time.
Drug delivery system and method of manufacturing thereof
In one embodiment, a drug delivery system and method provide a member including a combination of a drug substance and a polymer or other material, and an encapsulating layer formed in an outer surface of the member by gas cluster ion beam irradiation of the outer surface of the member, which encapsulating layer is adapted to determine one or more characteristics of the drug delivery system.
Tooling fixture assembly for use in a coating operation
A modular, rotisserie type tooling fixture assembly for use in a coating operation and method of its use are disclosed. The tooling fixture assembly includes an arbor or shaft and a retaining base with a plurality of anchor members disposed in a prescribed radial orientation from the center of the retaining base, the anchor members are uniquely configured or adapted to retain a plurality of workpieces to be coated. The tooling fixture assembly further comprises a unique workpiece masking arrangement that employs a unitary masking cap having a plurality of solid walls or surfaces adapted to cover portions of the plurality of workpieces in a masking relationship.
Apparatus for depositing metal film on surface of three-dimensional object
An apparatus for depositing a metal film on a surface of a three-dimensional object, includes a mounting drum rotatably disposed inside a chamber and having a circumferential surface onto which a plurality of three-dimensional objects is settled and mounted making each surface thereof to be subjected to deposition be exposed to an outside; and at least one source target depositing a metal film onto the surface of the three-dimensional object mounted to the mounting drum by sputtering.