Patent classifications
C23C16/486
Multi-layered diamond-like carbon coating for electronic components
A multi-layer coating on an outer surface of a substrate includes a first layer applied directly to the outer surface of the substrate. The first layer includes diamond-like carbon (DLC) configured to mitigate metal whisker formation. A second layer is applied on a top surface of the first layer. The second layer is a conformal coating that includes a second material configured to bind to the top surface of the first layer and fill any microfractures that may form in the first layer. Optionally, a third layer is applied on a top surface of the second layer and includes DLC configured to protect the second layer from oxidation and degradation.
Ion Beam-Induced Epitaxial Crystallization on an Integrated Processing Architecture
Disclosed herein are methods and systems for epitaxial crystallization on an integrated processing architecture. In some embodiments, a method may include performing a first plasma treatment on a semiconductor substrate to remove a native oxide layer along an upper surface of the semiconductor substrate, and forming a film layer over the upper surface by performing a second plasma treatment on the semiconductor substrate. The method may further include performing an ion implantation process to crystallize the film layer, wherein the implant process comprises delivering an ion species to the film layer while the semiconductor substrate is at a temperature greater than 100 C.
Method for long-term storage of information and storage medium therefor
The present invention relates to an information storage medium and a method for long-term storage of information comprising the steps of: providing a ceramic substrate; coating the ceramic substrate with a layer of a second material different from the material of the ceramic substrate, the layer having a thickness no greater than 10 m; tempering the coated ceramic substrate to form a writable plate or disc; encoding information on the writable plate or disc by using a laser and/or a focused particle beam to manipulate localized areas of the writable plate or disc.