Embodiments of the present disclosure generally relate to an apparatus and a method for cleaning a processing chamber. In one embodiment, a substrate support cover includes a bulk member coated with a fluoride coating. The substrate support cover is placed on a substrate support disposed in the processing chamber during a cleaning process. The fluoride coating does not react with the cleaning species. The substrate support cover protects the substrate support from reacting with the cleaning species, leading to reduced condensation formed on chamber components, which in turn leads to reduced contamination of the substrate in subsequent processes.

Embodiments of the present disclosure generally relate to an apparatus and a method for cleaning a processing chamber. In one embodiment, a substrate support cover includes a bulk member coated with a fluoride coating. The substrate support cover is placed on a substrate support disposed in the processing chamber during a cleaning process. The fluoride coating does not react with the cleaning species. The substrate support cover protects the substrate support from reacting with the cleaning species, leading to reduced condensation formed on chamber components, which in turn leads to reduced contamination of the substrate in subsequent processes.

A process for separating rare earth elements (REE) from Ca, Mg and other non-REE elements comprises raising the pH of an acidic aqueous solution of REE to pH 8 to pH 11; adding nano- or micro (NoM) particles having a silica or titanium oxide surface; agitating the suspension for 6 h to 48 h to provide for adherent crystallization of REE hydroxide on the particles; separating the particles from the solution; releasing REE by treatment with aqueous acid to form an aqueous solution of REE salt; separating them from the aqueous solution of REE salt formed. The acidic aqueous solution comprising REE is preferably provided by leaching of an REE mineral with aqueous acid; adding a base to bring the pH to from pH 4.0 to pH 6.5; separating precipitated non-REE hydroxide from the solution.

Provided are a black mixed oxide that contains chromium per se of any valency as a main component, and fails to contain cobalt as the main component material, and has a high safety, an excellent color tone and economical efficiency, and a method for producing the same, and various products using the black mixed oxide material. The mixed oxides comprise oxides containing La, Mn and Cu as main components but containing neither Cr nor Co as a main component, wherein the contents of La, Mn and Cu in the mixed oxides satisfy the following ratios, as oxide equivalent amount with respect to 100% by weight of the oxide equivalent amount: the La content as La.sub.2O.sub.3 being 35-70 wt %; the Mn content as MnO.sub.2 being 25-60 wt %; and the Cu content as CuO being 0.5-10 wt %.

Provided are a black mixed oxide that contains chromium per se of any valency as a main component, and fails to contain cobalt as the main component material, and has a high safety, an excellent color tone and economical efficiency, and a method for producing the same, and various products using the black mixed oxide material. The mixed oxides comprise oxides containing La, Mn and Cu as main components but containing neither Cr nor Co as a main component, wherein the contents of La, Mn and Cu in the mixed oxides satisfy the following ratios, as oxide equivalent amount with respect to 100% by weight of the oxide equivalent amount: the La content as La.sub.2O.sub.3 being 35-70 wt %; the Mn content as MnO.sub.2 being 25-60 wt %; and the Cu content as CuO being 0.5-10 wt %.

A composite having a composition expressed by A.sub.nX.sub.yM.sub.m wherein, A represents a lanthanoid that is in a trivalent state at least partially or entirely, X represents an element that is a Group-2 element in the periodic table selected from the group consisting of Ca, Sr, and Ba, or a lanthanoid that is different from A, M represents an element that is a Group-1 element in the periodic table, a Group-2 element selected from the group consisting of Ca, Sr, and Ba, or a lanthanoid that is different from A and X, n satisfies 0<n<1, y satisfies 0<y<1, m satisfies 0m<1, and n+y+m=1.

A method of recovering metal compounds from solid oxide fuel cell scrap includes processing the solid oxide fuel cell scrap to form a powder, digesting the processed scrap, extracting lanthanum oxide and cerium oxide from a solution containing the digested processed scrap, extracting a zirconium compound from the solution after extracting the lanthanum oxide and cerium oxide, and extracting scandium compound from the solution extracting the zirconium compound from the solution.

Provided are a black mixed oxide that contains chromium per se of any valency as a main component, and fails to contain cobalt as the main component material, and has a high safety, an excellent color tone and economical efficiency, and a method for producing the same, and various products using the black mixed oxide material. The mixed oxides comprise oxides containing La, Mn and Cu as main components but containing neither Cr nor Co as a main component, wherein the contents of La, Mn and Cu in the mixed oxides satisfy the following ratios, as oxide equivalent amount with respect to 100% by weight of the oxide equivalent amount: the La content as La.sub.2O.sub.3 being 35-70 wt %; the Mn content as MnO.sub.2 being 25-60 wt %; and the Cu content as CuO being 0.5-10 wt %.

Provided are a black mixed oxide that contains chromium per se of any valency as a main component, and fails to contain cobalt as the main component material, and has a high safety, an excellent color tone and economical efficiency, and a method for producing the same, and various products using the black mixed oxide material. The mixed oxides comprise oxides containing La, Mn and Cu as main components but containing neither Cr nor Co as a main component, wherein the contents of La, Mn and Cu in the mixed oxides satisfy the following ratios, as oxide equivalent amount with respect to 100% by weight of the oxide equivalent amount: the La content as La.sub.2O.sub.3 being 35-70 wt %; the Mn content as MnO.sub.2 being 25-60 wt %; and the Cu content as CuO being 0.5-10 wt %.

Nanowires useful as heterogeneous catalysts are provided. The nanowire catalysts are prepared by polymer templated methods and are useful in a variety of catalytic reactions, for example, the oxidative coupling of methane to ethane and/or ethylene. Related methods for use and manufacture of the same are also disclosed.