C03C3/112

Yttrium aluminum silicate glass ceramic coating for semiconductor chamber apparatus
11535550 · 2022-12-27 · ·

Articles may be protected against halide plasma, by applying a rare earth-containing glaze to the surface of the article. The glaze may be a coating comprising; 20 to 90 mol % SiO.sub.2, 0 to 60 mol % Al.sub.2O.sub.3, 10 to 80 mol % rare earth oxides and/or rare earth fluorides (REX), wherein SiO.sub.2+Al.sub.2O.sub.3+REX≥60 mol %.

Aluminosilicate glass, chemically strengthened glass, and application

Aluminosilicate glass, chemically strengthened glass, and an application are provided. After the aluminosilicate glass is chemically strengthened, a glass substrate featuring a good mechanical strength and high chemical stability can be obtained, thereby meeting a requirement of cover glass for a glass material. The aluminosilicate glass does not include a B element and a P element, and includes at least silicon oxide, aluminium oxide, alkali metal oxide, and gallium oxide. The alkali metal oxide is at least one of lithium oxide and sodium oxide. The glass is used for production of the cover glass.

Aluminosilicate glass, chemically strengthened glass, and application

Aluminosilicate glass, chemically strengthened glass, and an application are provided. After the aluminosilicate glass is chemically strengthened, a glass substrate featuring a good mechanical strength and high chemical stability can be obtained, thereby meeting a requirement of cover glass for a glass material. The aluminosilicate glass does not include a B element and a P element, and includes at least silicon oxide, aluminium oxide, alkali metal oxide, and gallium oxide. The alkali metal oxide is at least one of lithium oxide and sodium oxide. The glass is used for production of the cover glass.

COATED GLASS OR GLASS CERAMIC SUBSTRATE, COATING COMPRISING CLOSED PORES, AND METHOD FOR COATING A SUBSTRATE

Coated glass or glass ceramic substrates having high temperature resistance, high strength, and a low coefficient of thermal expansion. The coating includes pores, is fluid-tight and suitable for coating a temperature-resistant, high-strength glass or glass ceramic substrate with a low coefficient of thermal expansion, and to a method for producing such a coated substrate.

COATED GLASS OR GLASS CERAMIC SUBSTRATE, COATING COMPRISING CLOSED PORES, AND METHOD FOR COATING A SUBSTRATE

Coated glass or glass ceramic substrates having high temperature resistance, high strength, and a low coefficient of thermal expansion. The coating includes pores, is fluid-tight and suitable for coating a temperature-resistant, high-strength glass or glass ceramic substrate with a low coefficient of thermal expansion, and to a method for producing such a coated substrate.

THERMALLY TEMPERED GLASS-CERAMICS

A thermally tempered aluminosilicate glass-ceramic composition includes a crystalline phase and a residual glass phase, wherein the two phases form a system wherein the thermal expansion curve of the system has two distinct sections diverging from an inflection point temperature in the range of about 450° C. to about 600° C., and wherein the difference between coefficient of thermal expansion of the glass-ceramic below and above the inflection point is greater than about 4 ppm/° C.

THERMALLY TEMPERED GLASS-CERAMICS

A thermally tempered aluminosilicate glass-ceramic composition includes a crystalline phase and a residual glass phase, wherein the two phases form a system wherein the thermal expansion curve of the system has two distinct sections diverging from an inflection point temperature in the range of about 450° C. to about 600° C., and wherein the difference between coefficient of thermal expansion of the glass-ceramic below and above the inflection point is greater than about 4 ppm/° C.

METHOD OF MAKING A GLASS PRODUCT, AND A GLASS PRODUCT

A method of making a glass product includes the steps of: melting a batch of a plurality of glass raw materials in a melting tank to form a glass melt; heating at least one of the plurality of glass raw materials and the glass melt using at least one fuel burner by reacting hydrogen and oxygen; withdrawing the glass melt from the melting tank; obtaining a glass product, the glass product having an Fe.sup.2+ to Fe.sup.3+ ratio of less than 0.2 or less than 0.05 and having at least one of less than 80 bubbles in a size range of from 0.1 mm to 0.2 mm per 10 kg of glass and less than 2 bubbles of a size larger than 0.2 mm per 10 kg of a glass.

Glass composition and glass fiber having the same

Disclosed herein is a glass composition that includes, based on the total weight of the composition, 52 wt % to 58 wt % of SiO.sub.2, 12 wt % to 16 wt % of Al.sub.2O.sub.3, 16 wt % to 26 wt % of B.sub.2O.sub.3, greater than 0 wt % and not greater than 2 wt % of MgO, 1 wt % to 6 wt % of CaO, greater than 1 wt % and lower than 5 wt % of TiO.sub.2, greater than 0 wt % and not greater than 0.6 wt % of Na.sub.2O, 0 wt % to 0.5 wt % of K.sub.2O, 0 wt % to 1 wt % of F.sub.2, 1 wt % to 5 wt % of ZnO, greater than 0 wt % and not greater than 1 wt % of Fe.sub.2O.sub.3; and 0.1 wt % to 0.6 wt % of SO.sub.3. Also disclosed herein is a glass fiber including the glass composition.

Glass composition and glass fiber having the same

Disclosed herein is a glass composition that includes, based on the total weight of the composition, 52 wt % to 58 wt % of SiO.sub.2, 12 wt % to 16 wt % of Al.sub.2O.sub.3, 16 wt % to 26 wt % of B.sub.2O.sub.3, greater than 0 wt % and not greater than 2 wt % of MgO, 1 wt % to 6 wt % of CaO, greater than 1 wt % and lower than 5 wt % of TiO.sub.2, greater than 0 wt % and not greater than 0.6 wt % of Na.sub.2O, 0 wt % to 0.5 wt % of K.sub.2O, 0 wt % to 1 wt % of F.sub.2, 1 wt % to 5 wt % of ZnO, greater than 0 wt % and not greater than 1 wt % of Fe.sub.2O.sub.3; and 0.1 wt % to 0.6 wt % of SO.sub.3. Also disclosed herein is a glass fiber including the glass composition.