C04B35/103

Electrostatic chuck device and method for manufacturing electrostatic chuck device

An electrostatic chuck device includes: a base having one principal surface which is a placing surface on which a plate-shaped sample is placed, wherein the base is made from a sintered compact of ceramic particles, which include silicon carbide particles and aluminum oxide particles, as a forming material; and an electrostatic attraction electrode which is provided on a surface of the base on the side opposite to the placing surface of the base, or in the interior of the base, in which the volume resistivity value of the sintered compact is 0.5×10.sup.15 Ωcm or more in the entire range from 24° C. to 300° C., a graph which shows the relationship of the volume resistivity value of the sintered compact to a temperature at which the volume resistivity value of the sintered compact is measured has a maximum value in the range from 24° C. to 300° C., and the amount of metal impurities in the sintered compact other than aluminum and silicon in the sintered compact is 100 ppm or less.

Composite sintered body, electrostatic chuck member, and electrostatic chuck device

This composite sintered body is a ceramic composite sintered body which includes aluminum oxide which is a main phase, and silicon carbide which is a sub-phase, the composite sintered body including an interface layer which includes, as a forming material, a material other than the aluminum oxide and the silicon carbide, at an interface between a crystal grain of the aluminum oxide and a crystal grain of the silicon carbide in a grain boundary.

Composite sintered body, electrostatic chuck member, and electrostatic chuck device

This composite sintered body is a ceramic composite sintered body which includes aluminum oxide which is a main phase, and silicon carbide which is a sub-phase, the composite sintered body including an interface layer which includes, as a forming material, a material other than the aluminum oxide and the silicon carbide, at an interface between a crystal grain of the aluminum oxide and a crystal grain of the silicon carbide in a grain boundary.

STRUCTURE HAVING FLOW CHANNEL AND METHOD FOR MANUFACTURING THE SAME
20210197165 · 2021-07-01 ·

A structure having excellent rectification performance and durability and having a micro flow channel is provided. The structure has a flow channel in the inside, wherein the cross section of the flow channel has a shape in which a region surrounded by a substantially elliptical curve and a line segment is connected to a triangular region with the base being the line segment, the region surrounded by the line segment and the substantially elliptical curve is semielliptical or more, and the base angle of the triangular region is 45 degrees or more.

STRUCTURE HAVING FLOW CHANNEL AND METHOD FOR MANUFACTURING THE SAME
20210197165 · 2021-07-01 ·

A structure having excellent rectification performance and durability and having a micro flow channel is provided. The structure has a flow channel in the inside, wherein the cross section of the flow channel has a shape in which a region surrounded by a substantially elliptical curve and a line segment is connected to a triangular region with the base being the line segment, the region surrounded by the line segment and the substantially elliptical curve is semielliptical or more, and the base angle of the triangular region is 45 degrees or more.

A batch for producing a refractory carbon-bonded brick, a method for producing a refractory carbon-bonded brick and a use of Ti2AlC

The invention relates to a batch composition for producing a carbon-bonded refractory stone, a method for producing a carbon-bonded refractory stone, and use of Ti.sub.2AlC.

REFRACTORY COMPOSITIONS AND IN SITU ANTI-OXIDATION BARRIER LAYERS

A refractory composition for forming a working lining in a metallurgical vessel contains a coarse-grain refractory particle fraction and a fine-grain refractory particle fraction, or at least 0.25% additive calcium oxide, or at least 0.25% titanium dioxide. The coarse-grain refractory particles can include alumina particles, magnesia particles, magnesium aluminate spinel particles, zirconia particles, or doloma particles, or a combination of any of these particles. The fine-grain refractory particles can be comprised of any low-magnesia refractory oxide. The refractory composition can be applied to a metallurgical vessel by spraying, gunning, shotcreting, vibrating, casting, troweling, or positioning preformed refractory shapes, or a combination of any of these techniques. When contacted by molten metal, the molten metal penetrates into the refractory material, wetting the coarse-grain refractory particles, and forming a refractory-metal composite barrier layer that decreases or blocks oxygen transport through the refractory lining.

Refractory molded body, compounds, binders, and method for producing same

The present invention relates to a compound for making high-temperature-resistant or refractory molded bodies, made up of a mixture of: a refractory or high-temperature-resistant inorganic powder, granules and/or granulate, including a free-flowing compound or a powder made of carbon or also without carbon, a binder,
the binder being made of a combination of tannin, lactose, fine-grained silica and aluminum powder, as well as the binder itself, and molded bodies produced from the compound including the binder, and a method of making same.

Refractory molded body, compounds, binders, and method for producing same

The present invention relates to a compound for making high-temperature-resistant or refractory molded bodies, made up of a mixture of: a refractory or high-temperature-resistant inorganic powder, granules and/or granulate, including a free-flowing compound or a powder made of carbon or also without carbon, a binder,
the binder being made of a combination of tannin, lactose, fine-grained silica and aluminum powder, as well as the binder itself, and molded bodies produced from the compound including the binder, and a method of making same.

CBN composite formation method including consolidation

Conventional sintering processes convert a portion of cBN to hBN which is softer than cBN which negatively affects functional properties of an alumina composite. The invention is directed to method for making an alumina-cubic boron nitride (Al.sub.2O.sub.3-cBN) composite that contains substantially no hexagonal boron nitride (hBN) by non-conventional spark plasma sintering of cBN with nano-sized alumina particles. The invention is also directed to Al.sub.2O.sub.3-cBN/Ni composites, which contain substantially no hBN, and which exhibit superior physical and mechanical properties compared to alumina composites containing higher amounts of hBN.