One embodiment of the disclosure provides a method of fabricating a chamber component with a coating layer disposed on an interface layer with desired film properties. In one embodiment, a method of fabricating a coating material includes providing a base structure comprising an aluminum or silicon containing material, forming an interface layer on the base structure, wherein the interface layer comprises one or more elements from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and forming a coating layer on the interface layer, wherein the coating layer has a molecular structure of Si.sub.vY.sub.wMg.sub.xAl.sub.yO.sub.z. In another embodiment, a chamber component includes an interface layer disposed on a base structure, wherein the interface layer is selected from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and a coating layer disposed on the interface layer, wherein the coating layer has a molecular structure of Si.sub.vY.sub.wMg.sub.xAl.sub.yO.sub.z.

One embodiment of the disclosure provides a method of fabricating a chamber component with a coating layer disposed on an interface layer with desired film properties. In one embodiment, a method of fabricating a coating material includes providing a base structure comprising an aluminum or silicon containing material, forming an interface layer on the base structure, wherein the interface layer comprises one or more elements from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and forming a coating layer on the interface layer, wherein the coating layer has a molecular structure of Si.sub.vY.sub.wMg.sub.xAl.sub.yO.sub.z. In another embodiment, a chamber component includes an interface layer disposed on a base structure, wherein the interface layer is selected from at least one of Ta, Al, Si, Mg, Y, or combinations thereof, and a coating layer disposed on the interface layer, wherein the coating layer has a molecular structure of Si.sub.vY.sub.wMg.sub.xAl.sub.yO.sub.z.

Batch mixtures comprising alumina trihydrate for forming ceramic honeycomb bodies comprised of cordierite and methods of manufacturing honeycomb bodies from such batch mixtures are provided.

Batch mixtures comprising alumina trihydrate for forming ceramic honeycomb bodies comprised of cordierite and methods of manufacturing honeycomb bodies from such batch mixtures are provided.

Batch mixtures comprising alumina trihydrate for forming ceramic honeycomb bodies comprised of cordierite and methods of manufacturing honeycomb bodies from such batch mixtures are provided.

Cordierite-forming batch mixtures including one or more non-oxide inorganic source materials or materials as pore-formers are provided. Non-oxide inorganic materials, such a non-oxide silicon material that includes at least one of silicon carbide, silicon, or silicon nitride, may be added to cordierite-forming batch mixtures as at least a partial replacement for conventional inorganic pore-formers. Non-oxide inorganic pore-formers may provide an increase in pore volume while having a reduced coefficient of thermal expansion impact as compared with conventional pore-formers. Cordierite-forming mixtures as disclosed herein may additionally include rare-earth catalysts and alkaline-earth materials that may enhance the pore-forming effect of non-oxide inorganic pore-formers without significant exothermic reactions or the production of emissions that may require additional processing treatments.

Cordierite-forming batch mixtures including one or more non-oxide inorganic source materials or materials as pore-formers are provided. Non-oxide inorganic materials, such a non-oxide silicon material that includes at least one of silicon carbide, silicon, or silicon nitride, may be added to cordierite-forming batch mixtures as at least a partial replacement for conventional inorganic pore-formers. Non-oxide inorganic pore-formers may provide an increase in pore volume while having a reduced coefficient of thermal expansion impact as compared with conventional pore-formers. Cordierite-forming mixtures as disclosed herein may additionally include rare-earth catalysts and alkaline-earth materials that may enhance the pore-forming effect of non-oxide inorganic pore-formers without significant exothermic reactions or the production of emissions that may require additional processing treatments.

In a manufacturing method for manufacturing a dispersion body, a plurality of types of solid particles, water, and a liquid dispersant are mixed. In the manufacturing method, at least two types of the solid particles and at least one type of the dispersant that are selected based on a material type selection method are used, and at least an optimal amount of the dispersant that is determined based on an optimal amount determination method is added and mixed. The material type selection method is based on a Hansen solubility parameter distance to water, Hansen spheres of the solid particles, and a Hansen sphere of the dispersant.

In a manufacturing method for manufacturing a dispersion body, a plurality of types of solid particles, water, and a liquid dispersant are mixed. In the manufacturing method, at least two types of the solid particles and at least one type of the dispersant that are selected based on a material type selection method are used, and at least an optimal amount of the dispersant that is determined based on an optimal amount determination method is added and mixed. The material type selection method is based on a Hansen solubility parameter distance to water, Hansen spheres of the solid particles, and a Hansen sphere of the dispersant.

A method for producing a honeycomb structure, the method comprising the steps of: kneading a forming raw material containing a cordierite forming material and then forming it to produce a honeycomb formed body; and firing the honeycomb formed body to provide a honeycomb structure. In the producing method, from 0.1 to 6.0 parts by mass of a magnesium silicate mineral having a 2:1 ribbon type structure per 100 parts by mass of the cordierite forming material is added to the forming raw material.