Composite particles of the present invention include alumina particles and an inorganic coating disposed on a surface of the alumina particles, the alumina particles containing molybdenum (Mo), the inorganic coating including a composite metal oxide.

A method of fabricating a ceramic matrix composite includes infiltrating pores of a porous structure with a preceramic matrix polymer using a composite molding technique. The porous structure includes fibers and an exposed carbon coating on the fibers. The preceramic matrix polymer wets the exposed carbon coating. The preceramic matrix polymer is then pyrolyzed to convert the preceramic matrix polymer to a ceramic matrix.

A method of treating a carbon/carbon composite is provided. The method may include infiltrating a carbonized fibrous structure with hydrocarbon gas to form a densified fibrous structure. The method may include treating the densified fibrous structure with heat at a first temperature range from about 1600 to about 2400 C. to form a heat treated densified fibrous structure. The method may include infiltrating the heat treated densified fibrous structure with silicon to form a silicon carbide infiltrated fibrous structure.

A body including a first phase having silicon carbide, a second phase comprising a metal oxide, the second phase being a discrete intergranular phase located at the grain boundaries of the first phase, and the body has an average strength of at least 700 MPa.

Provided is a liquid material for forming a three-dimensional object. The liquid material is adapted to harden a powder material for forming a three-dimensional object containing an organic material. The liquid material contains a solvent and a cross-linking agent. A dynamic contact angle of the liquid material over a film made of the organic material is from 20 to 80.

Nanopowders containing nanoparticles having a core particle with a thin film coating. The core particles and thin film coatings are, independently, formed from at least one of a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride or combinations thereof. The thin film coating may be formed using a non-line of sight technique such as atomic layer deposition (ALD). Also disclosed herein are nanoceramic materials formed from the nanopowders and methods of making and using the nanopowders.

A method of melt infiltration for producing a ceramic matrix composite comprises applying a non-wetting coating onto one or more outer surfaces of a porous fiber preform. The non-wetting coating comprises a non-wetting material with which molten silicon has a contact angle of at least about 45. After applying the non-wetting coating, an uncoated portion of the porous fiber preform is immersed into a molten material comprising silicon, and the molten material is infiltrated into the porous fiber preform through the uncoated portion. The non-wetting coating serves as a barrier to inhibit or prevent the molten material from penetrating the one or more outer surfaces. After infiltration of the molten material into the porous fiber preform, the molten material is cooled to form a ceramic matrix composite, and the non-wetting coating is removed.

Disclosed are methods of forming a chamber component for a process chamber. The methods may include filling a mold with nanoparticles or plasma spraying nanoparticles, where at least a portion of the nanoparticles include a core particle and a thin film coating over the core particle. The core particle and thin film are formed of, independently, a rare earth metal-containing oxide, a rare earth metal-containing fluoride, a rare earth metal-containing oxyfluoride, or combinations thereof. The nanoparticles may have a donut-shape having a spherical form with indentations on opposite sides. The methods also may include sintering the nanoparticles to form the chamber component and materials. Further described are chamber components and coatings formed from the described nanoparticles.

Provided is a powder for shaping through irradiation with an energy beam, the powder including: a sublimable substance; and a sublimation suppression material, wherein the sublimation suppression material is an inorganic compound, and wherein particles of the sublimation suppression material adhere to part of surfaces of particles of the sublimable substance.

A method of melt infiltration for producing a ceramic matrix composite comprises applying a non-wetting coating onto one or more outer surfaces of a porous fiber preform. The non-wetting coating comprises a non-wetting material with which molten silicon has a contact angle of at least about 45. After applying the non-wetting coating, an uncoated portion of the porous fiber preform is immersed into a molten material comprising silicon, and the molten material is infiltrated into the porous fiber preform through the uncoated portion. The non-wetting coating serves as a barrier to inhibit or prevent the molten material from penetrating the one or more outer surfaces. After infiltration of the molten material into the porous fiber preform, the molten material is cooled to form a ceramic matrix composite, and the non-wetting coating is removed.