Provided are a coated member in which damage of a coating film can be suppressed in a high temperature environment and the coating may be performed at low cost, and a method of manufacturing the same. A coated member includes a bond coat and a top coat sequentially laminated on a substrate made of a Si-based ceramic or a SiC fiber-reinforced SiC matrix composite, wherein the top coat includes a layer composed of a mixed phase of a (Y.sub.1-aLn.sub.1a) solid solution (here, Ln.sub.1 is any one of Nd, Sm, Eu, and Gd) and Y.sub.2SiO.sub.5 or a (Y.sub.1-bLn.sub.1′.sub.b).sub.2SiO.sub.5 solid solution (here, Ln.sub.1′ is any one of Nd, Sm, Eu, and Gd), or a mixed phase of a (Y.sub.1-cLn.sub.2c).sub.2Si.sub.2O.sub.7 solid solution (here, Ln.sub.2 is any one of Sc, Yb, and Lu) and Y.sub.2SiO.sub.5 or a (Y.sub.1-dLn.sub.2′.sub.d).sub.2SiO.sub.5 solid solution (here, Ln.sub.2′ is any one of Sc, Yb, and Lu).

Methods for producing oxide/metal composite components for use in high temperature systems, and components produced thereby. The methods use a fluid reactant and a porous preform that contains a solid oxide reactant. The fluid reactant contains yttrium as a displacing metal and the solid oxide reactant of the preform contains niobium oxide, of which niobium cations are displaceable species. The preform is infiltrated with the fluid reactant to react its yttrium with the niobium oxide of the solid oxide reactant and produce an yttria/niobium composite component, during which yttrium at least partially replaces the niobium cations of the solid oxide reactant to produce yttria and niobium metal, which together define a reaction product. The pore volume of the preform is at least partially filled by the reaction product, whose volume is greater than the volume lost by the solid oxide reactant as a result of reacting yttrium and niobium oxide.

Methods for producing oxide/metal composite components for use in high temperature systems, and components produced thereby. The methods use a fluid reactant and a porous preform that contains a solid oxide reactant. The fluid reactant contains yttrium as a displacing metal and the solid oxide reactant of the preform contains niobium oxide, of which niobium cations are displaceable species. The preform is infiltrated with the fluid reactant to react its yttrium with the niobium oxide of the solid oxide reactant and produce an yttria/niobium composite component, during which yttrium at least partially replaces the niobium cations of the solid oxide reactant to produce yttria and niobium metal, which together define a reaction product. The pore volume of the preform is at least partially filled by the reaction product, whose volume is greater than the volume lost by the solid oxide reactant as a result of reacting yttrium and niobium oxide.

A coated substrate is provided that includes an environmental barrier coating on (e.g., directly on) a surface of a substrate (e.g., a ceramic matrix composite). The environmental barrier coating can include a barrier layer having a refractory material phase and a silicon-containing glass phase. The silicon-containing glass phase may be a continuous phase within the barrier layer (e.g., a breathable grain boundary of the barrier layer), or may be a plurality of discontinuous layers dispersed throughout the refractory material phase. The refractory material phase can include a rare earth silicate material having a rare earth component at a first atomic percent, while the silicon-containing glass phase comprises the rare earth component at a second atomic percent that is less than the first atomic percent. Methods are also provided for forming a barrier layer on a substrate.

A coated substrate is provided that includes an environmental barrier coating on (e.g., directly on) a surface of a substrate (e.g., a ceramic matrix composite). The environmental barrier coating can include a barrier layer having a refractory material phase and a silicon-containing glass phase. The silicon-containing glass phase may be a continuous phase within the barrier layer (e.g., a breathable grain boundary of the barrier layer), or may be a plurality of discontinuous layers dispersed throughout the refractory material phase. The refractory material phase can include a rare earth silicate material having a rare earth component at a first atomic percent, while the silicon-containing glass phase comprises the rare earth component at a second atomic percent that is less than the first atomic percent. Methods are also provided for forming a barrier layer on a substrate.

Provided are a coating structure, a turbine part having the same, and a method for manufacturing the coating structure. The coating structure is provided on a surface of a base portion including a ceramic matrix composite. The coating structure is layered on the surface of the base portion, and includes a bond coat layer formed of a rare-earth silicate and a top coat layer layered on the bond coat layer. The residual stress present in the bond coat layer is compressive residual stress. The oxygen permeability coefficient of the bond coat layer is no greater than 10.sup.−9 kg.Math.m.sup.−1.Math.s.sup.−1 at a temperature of not lower than 1200° C. and a higher oxygen partial pressure of not less than 0.02 MPa. The bond coat layer may contain carbonitride particles or carbonitride whiskers.

Provided are a coating structure, a turbine part having the same, and a method for manufacturing the coating structure. The coating structure is provided on a surface of a base portion including a ceramic matrix composite. The coating structure is layered on the surface of the base portion, and includes a bond coat layer formed of a rare-earth silicate and a top coat layer layered on the bond coat layer. The residual stress present in the bond coat layer is compressive residual stress. The oxygen permeability coefficient of the bond coat layer is no greater than 10.sup.−9 kg.Math.m.sup.−1.Math.s.sup.−1 at a temperature of not lower than 1200° C. and a higher oxygen partial pressure of not less than 0.02 MPa. The bond coat layer may contain carbonitride particles or carbonitride whiskers.

An electrostatic chuck is provided, the electrostatic chuck includes a base; and an insulating layer, an electrode layer, a first dielectric layer, and a second dielectric layer sequentially stacked on the base. The first dielectric layer is aluminum oxide (Al.sub.2O.sub.3) or aluminum nitride (AlN). A material of the second dielectric layer is different from a material of the first dielectric layer, and the second dielectric layer includes titanium element, IVA group element, and oxygen element.

An electrostatic chuck is provided, the electrostatic chuck includes a base; and an insulating layer, an electrode layer, a first dielectric layer, and a second dielectric layer sequentially stacked on the base. The first dielectric layer is aluminum oxide (Al.sub.2O.sub.3) or aluminum nitride (AlN). A material of the second dielectric layer is different from a material of the first dielectric layer, and the second dielectric layer includes titanium element, IVA group element, and oxygen element.

An airfoil includes a ceramic matrix composite airfoil core that defines an airfoil portion and a root portion. The ceramic matrix composite airfoil core is subject to core thermal growth. A platform includes a ceramic matrix composite that wraps around the root portion. The platform is subject to platform thermal growth. A buffer layer is located between the root portion and the platform. The buffer layer absorbs a mismatch between the core thermal growth and the platform thermal growth.